公开(公告)号：US06836329B1

公开(公告)日：2004-12-28

申请号：US10604303

申请日：2003-07-09

申请人： Uldis A. Ziemins ,  Ray A. Reyes ,  David L. Schmoke

发明人： Uldis A. Ziemins ,  Ray A. Reyes ,  David L. Schmoke

IPC分类号： G01B1100

CPC分类号： G01B11/27

摘要： An apparatus and method to align an invisible light beam sensor, such as an IR sensor, utilizing a visible light beam such as a visible LED or HeNe laser, and provide the ability to visually monitor when the sensor needs adjustment in real time and avoid off line adjustments. Various embodiments synchronize and position both the invisible light beam and the visible light beam to travel the same path to a common desired location.

摘要翻译： 一种利用诸如可见LED或HeNe激光器的可见光束来对准不可见光束传感器（例如IR传感器）的设备和方法，并且提供了当传感器需要实时调整以及避免关闭时的视觉监视能力 线调整。 各种实施例同步并定位不可见光束和可见光束，以将相同的路径行进到共同的期望位置。

公开(公告)号：US06620029B2

公开(公告)日：2003-09-16

申请号：US10059775

申请日：2002-01-30

申请人： Raymond M. Khoury ,  Jose M. Ocasio ,  Uldis A. Ziemins

发明人： Raymond M. Khoury ,  Jose M. Ocasio ,  Uldis A. Ziemins

IPC分类号： B24B100

CPC分类号： B24B37/04 ,  B24D13/10

摘要： An apparatus for performing semiconductor planarizing operations is disclosed. In an exemplary embodiment, the apparatus includes a carrier assembly for maintaining a workpiece therein in a face up orientation. A roller assembly includes a first cylindrical roller and a cylindrical second roller, the first and second rollers being linked to one another through a pair of arms. Each of the first and second rollers may be independently positioned with respect to a horizontal plane, the horizontal plane being substantially parallel to a top surface of the workpiece.

摘要翻译： 公开了一种用于执行半导体平面化操作的装置。 在示例性实施例中，该装置包括用于以面朝上的方向将工件保持在其中的托架组件。 辊组件包括第一圆柱形辊和圆柱形第二辊，第一和第二辊通过一对臂相互连接。 第一和第二辊中的每一个可以相对于水平面独立地定位，水平面基本上平行于工件的顶表面。

公开(公告)号：US06343974B1

公开(公告)日：2002-02-05

申请号：US09603684

申请日：2000-06-26

申请人： Daniel L. França ,  Raymond Khoury ,  Jose M. Ocasio ,  Uldis A. Ziemins

发明人： Daniel L. França ,  Raymond Khoury ,  Jose M. Ocasio ,  Uldis A. Ziemins

IPC分类号： B24B4900

CPC分类号： B24B53/017 ,  B24B49/10 ,  B24B53/12

摘要： A conditioning tool including a rotary conditioning pad; a lower shaft attached to the conditioning pad; an upper shaft having an upper end and a lower end, the lower end attached to the lower shaft via a flexible coupling; and a motor attached to the upper end of the upper shaft and adapted to rotate the shaft. The tool further includes a mechanism for measuring an angle of the conditioning pad relative to a reference plane. The conditioning tool may further include a conditioning arm, various control mechanisms, and a controller for receiving feedback from the angle measuring mechanism and the various control mechanisms and for controlling the various control mechanisms in response to the feedback. A chemical-mechanical polishing apparatus and a conditioning method for providing a uniform polishing surface of a chemical-mechanical polishing pad are also disclosed.

摘要翻译： 一种调节工具，包括旋转调节垫; 连接到调节垫的下轴; 具有上端和下端的上轴，所述下端通过柔性连接件附接到所述下轴; 以及安装在上轴的上端并适于旋转轴的马达。 该工具还包括用于测量调节垫相对于参考平面的角度的机构。 调节工具还可以包括调节臂，各种控制机构和用于从角度测量机构和各种控制机构接收反馈的控制器，并且用于响应于反馈来控制各种控制机构。 还公开了一种化学机械抛光装置和用于提供化学机械抛光垫的均匀抛光表面的调节方法。

公开(公告)号：US5620618A

公开(公告)日：1997-04-15

申请号：US430480

申请日：1995-04-28

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00 ,  B23K26/08

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US5609780A

公开(公告)日：1997-03-11

申请号：US337799

申请日：1994-11-14

申请人： Candace J. F. Freedenberg ,  Joshua M. Cobb ,  Uldis A. Ziemins

发明人： Candace J. F. Freedenberg ,  Joshua M. Cobb ,  Uldis A. Ziemins

IPC分类号： B23K26/06 ,  B23K26/42 ,  G01J1/42

CPC分类号： G01J1/4257 ,  B23K26/066 ,  B23K26/705

摘要： A laser system which utilizes a reflective objective lens includes a closed loop servo and beam profiling system to provide improved uniformity of the laser beam impinging on the work piece. The laser beam is passed through an aperture to pattern the work piece. A beamsplitter separates the laser beam into workpiece and diagnostic beams. The workpiece and diagnostic beams are both passed through identical reflective objective lenses, to accurately measures performance of the work piece beam. Preferably, a third reflective objective lens collimates the diagnostic beam and directs it to a beam analyzer where the uniformity can be accurately assessed. The information determined by the beam analyzer is then used to position a pre-aperture converging optic (PACO) located between the laser source and the aperture. Adjustments in the x- and y-dimensions of the PACO lens change the angular uniformity at the aperture. Adjustments in the z-dimension of the PACO lens adjust the energy density delivered to the work piece. Homogenizing the laser light provides increased spatial uniformity. In one technique, a fiber optic bundle randomly redistributes the gaussian input energy to achieve spatial uniformity. Preferably, the output end of the fiber optic bundle is annular in shape, while the input end is rectangular to effectively capture light output from a laser, and prevents or reduces energy losses. In another technique, a fine mesh screen or combination of screens is inserted into the path of the laser beam prior to the aperture. The screen or combination of screens is positioned with respected to the converging lens and aperture or mask such that both spatial and angular uniformity result at the mask or aperture planed, and, hence, the work plane.

摘要翻译： 利用反射物镜的激光系统包括闭环伺服和光束分布系统，以提供冲击在工件上的激光束的改进的均匀性。 激光束通过孔径以对工件进行图案化。 分束器将激光束分离成工件和诊断光束。 工件和诊断光束都通过相同的反射物镜，以准确地测量工件梁的性能。 优选地，第三反射物镜准直诊断光束并将其引导到光束分析器，其中可以准确地评估均匀性。 然后由光束分析仪确定的信息用于定位位于激光源和光圈之间的预孔径会聚光学元件（PACO）。 PACO透镜的x和y尺寸的调整改变了孔径处的角均匀性。 PACO镜头的z维度的调节调节传递到工件的能量密度。 使激光均质化提供了增加的空间均匀性。 在一种技术中，光纤束随机地重新分布高斯输入能量以实现空间均匀性。 优选地，光纤束的输出端的形状是环形的，而输入端是矩形的，以有效地捕获从激光器输出的光，并且防止或减少能量损失。 在另一种技术中，在孔之前，将细筛网或筛网的组合插入激光束的路径中。 屏幕或屏幕的组合相对于会聚透镜和孔径或掩模被定位，使得在掩模或孔平面化以及因此工作平面上都产生空间和角均匀性。

公开(公告)号：US5543963A

公开(公告)日：1996-08-06

申请号：US457550

申请日：1995-06-01

申请人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

发明人： Candace J. Freedenberg ,  Frederick A. Herring ,  Uldis A. Ziemins

IPC分类号： B23K26/06 ,  G02B15/16 ,  G02B15/14

CPC分类号： G02B15/16 ,  B23K26/06 ,  B23K26/0604 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  Y10S359/90

摘要： A train of air spaced optical mechanisms capable of taking a raw laser beam and focusing it on a workpiece for a range of cut sizes with varying magnifications and energy densities while controlling divergence and providing optimum uniformity. The lenses are diffraction limited for optimum uniformity and edge definition. The system uses variable down collimators to condense the beam to an aperture plane. The aperture is then imaged to the workpiece with Barlow, zoom transfer, collimator, and objective lenses. The components are color corrected to aid in alignment of an invisible beam and allow the aperture to be imaged to a workpiece in visible light.

公开(公告)号：US5541731A

公开(公告)日：1996-07-30

申请号：US444302

申请日：1995-05-18

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00 ,  G01B9/02

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Evaluation and alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪光束的评估和对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。