公开(公告)号：US5609780A

公开(公告)日：1997-03-11

申请号：US337799

申请日：1994-11-14

申请人： Candace J. F. Freedenberg ,  Joshua M. Cobb ,  Uldis A. Ziemins

发明人： Candace J. F. Freedenberg ,  Joshua M. Cobb ,  Uldis A. Ziemins

IPC分类号： B23K26/06 ,  B23K26/42 ,  G01J1/42

CPC分类号： G01J1/4257 ,  B23K26/066 ,  B23K26/705

摘要： A laser system which utilizes a reflective objective lens includes a closed loop servo and beam profiling system to provide improved uniformity of the laser beam impinging on the work piece. The laser beam is passed through an aperture to pattern the work piece. A beamsplitter separates the laser beam into workpiece and diagnostic beams. The workpiece and diagnostic beams are both passed through identical reflective objective lenses, to accurately measures performance of the work piece beam. Preferably, a third reflective objective lens collimates the diagnostic beam and directs it to a beam analyzer where the uniformity can be accurately assessed. The information determined by the beam analyzer is then used to position a pre-aperture converging optic (PACO) located between the laser source and the aperture. Adjustments in the x- and y-dimensions of the PACO lens change the angular uniformity at the aperture. Adjustments in the z-dimension of the PACO lens adjust the energy density delivered to the work piece. Homogenizing the laser light provides increased spatial uniformity. In one technique, a fiber optic bundle randomly redistributes the gaussian input energy to achieve spatial uniformity. Preferably, the output end of the fiber optic bundle is annular in shape, while the input end is rectangular to effectively capture light output from a laser, and prevents or reduces energy losses. In another technique, a fine mesh screen or combination of screens is inserted into the path of the laser beam prior to the aperture. The screen or combination of screens is positioned with respected to the converging lens and aperture or mask such that both spatial and angular uniformity result at the mask or aperture planed, and, hence, the work plane.

摘要翻译： 利用反射物镜的激光系统包括闭环伺服和光束分布系统，以提供冲击在工件上的激光束的改进的均匀性。 激光束通过孔径以对工件进行图案化。 分束器将激光束分离成工件和诊断光束。 工件和诊断光束都通过相同的反射物镜，以准确地测量工件梁的性能。 优选地，第三反射物镜准直诊断光束并将其引导到光束分析器，其中可以准确地评估均匀性。 然后由光束分析仪确定的信息用于定位位于激光源和光圈之间的预孔径会聚光学元件（PACO）。 PACO透镜的x和y尺寸的调整改变了孔径处的角均匀性。 PACO镜头的z维度的调节调节传递到工件的能量密度。 使激光均质化提供了增加的空间均匀性。 在一种技术中，光纤束随机地重新分布高斯输入能量以实现空间均匀性。 优选地，光纤束的输出端的形状是环形的，而输入端是矩形的，以有效地捕获从激光器输出的光，并且防止或减少能量损失。 在另一种技术中，在孔之前，将细筛网或筛网的组合插入激光束的路径中。 屏幕或屏幕的组合相对于会聚透镜和孔径或掩模被定位，使得在掩模或孔平面化以及因此工作平面上都产生空间和角均匀性。

公开(公告)号：US5751588A

公开(公告)日：1998-05-12

申请号：US465689

申请日：1995-06-06

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00 ,  G06F19/00 ,  G06G7/64 ,  G06G7/66

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US5626778A

公开(公告)日：1997-05-06

申请号：US465688

申请日：1995-06-06

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US5618454A

公开(公告)日：1997-04-08

申请号：US465978

申请日：1995-06-06

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US5504612A

公开(公告)日：1996-04-02

申请号：US443634

申请日：1995-05-18

申请人： Joshua M. Cobb ,  James H. Covell, II ,  Franz X. Topolovec ,  Uldis A. Ziemins

发明人： Joshua M. Cobb ,  James H. Covell, II ,  Franz X. Topolovec ,  Uldis A. Ziemins

IPC分类号： B41J2/44 ,  B23K26/08 ,  G02B26/10 ,  H01L21/027 ,  H01L21/268 ,  G02B26/08

CPC分类号： G02B26/101 ,  Y10S359/90

摘要： An apparatus and method are disclosed for laser raster scanning a substrate in an XY plane wherein a single motor is used to provide synchronized X-Y scanning by two mirrors positioned orthogonally and which move linearly in an XY plane relative to each other by the rotation of the motor shaft. A preferred embodiment uses a specially designed cam to provide back and forth laser scanning motion and an intermittent gear to provide indexing of the laser. The apparatus and method may be configured for various scan speeds, spot sizes, Y-axis indexing and X-axis scan at the object plane. Over scanning of the active XY area of the object plane is preferred to provide constant velocity and energy density over the active XY area.

摘要翻译： 公开了用于在XY平面中激光光栅扫描基板的装置和方法，其中使用单个电机来提供通过正交定位的两个反射镜同步的XY扫描，并且通过电动机的旋转在XY平面中相对于彼此线性移动 轴。 优选实施例使用专门设计的凸轮来提供来回激光扫描运动和间歇齿轮以提供激光的分度。 该装置和方法可以被配置用于在物平面处的各种扫描速度，光斑尺寸，Y轴分度和X轴扫描。 在对象平面的主动XY区域的扫描是优选的，以在主动XY区域上提供恒定的速度和能量密度。

公开(公告)号：US5620618A

公开(公告)日：1997-04-15

申请号：US430480

申请日：1995-04-28

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00 ,  B23K26/08

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪梁的对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US5541731A

公开(公告)日：1996-07-30

申请号：US444302

申请日：1995-05-18

申请人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

发明人： Candace J. Freedenberg ,  David C. Long ,  Joshua M. Cobb ,  Mark J. LaPlante ,  Uldis A. Ziemins ,  Daniel G. Patterson ,  James G. Balz

IPC分类号： B23K26/04 ,  H05K3/00 ,  G01B9/02

CPC分类号： B23K26/04 ,  B23K26/043 ,  H05K3/0017

摘要： A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Evaluation and alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

摘要翻译： 将期望的电子结构设计转换为图形设计格式，并将其分类为与扫描线对应的伪光栅格式。 利用中间物镜扫描系统，通过单独的跟踪光束来控制激光或其它加工光束。 与扫描线数据相比，加工光束的点火频率由跟踪光束在检测器上的位置确定。 通过检测在加工过程中产生的羽流或光谱来验证精度。 加工和跟踪光束的评估和对准是通过干涉测量方法。 该系统提高了远心性的光学性能参数，扫描光束线的角度，扫描线所在的线的位置，散光和场曲率。

公开(公告)号：US07591624B2

公开(公告)日：2009-09-22

申请号：US11306708

申请日：2006-01-09

申请人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

发明人： Philip L. Campbell ,  David J. Pinckney ,  Edward Sherwood ,  Uldis A. Ziemins

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67276 ,  H01L21/67359 ,  H01L21/67379 ,  H01L21/68707 ,  Y10S414/14

摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。

公开(公告)号：US20090025598A1

公开(公告)日：2009-01-29

申请号：US11828657

申请日：2007-07-26

申请人： Clayton D. Menser, JR. ,  David J. Pinckney ,  Uldis A. Ziemins

发明人： Clayton D. Menser, JR. ,  David J. Pinckney ,  Uldis A. Ziemins

IPC分类号： B61B3/00

CPC分类号： B61B3/02 ,  B66F11/04 ,  H01L21/67733

摘要： A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

摘要翻译： 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。

公开(公告)号：US07287740B2

公开(公告)日：2007-10-30

申请号：US11163835

申请日：2005-11-01

申请人： Ray A. Reyes ,  David L. Schmoke ,  Uldis A. Ziemins

发明人： Ray A. Reyes ,  David L. Schmoke ,  Uldis A. Ziemins

IPC分类号： B66D1/26

CPC分类号： B66C13/06

摘要： A cable attachment assembly, a hoist and a transportation system using the cable attachment assembly. The cable attachment assembly including: a plate pivotable about a first axis; first and second pivot assemblies pivotable about respective second and third axes, the first, second and third axes parallel to each other; a first cable retainer in the first pivot assembly, the first cable retainer adapted to rotateably retain an end of a first cable in the first cable pivot assembly, the first cable rotatable about a fourth axis; a second cable retainer in the second pivot assembly, the second cable retainer adapted to rotateably retain an end of a second cable in the second pivot assembly, the second cable rotatable about a fifth axis; wherein the fourth and fifth axes parallel to each other and the fourth and fifth axes are perpendicular to the first, second and third axis.

摘要翻译： 电缆连接组件，起重机和使用电缆连接组件的运输系统。 所述电缆连接组件包括：可围绕第一轴线枢转的板; 第一枢转组件和第二枢轴组件可围绕相应的第二和第三轴线枢转，第一，第二和第三轴线彼此平行; 所述第一电缆保持器在所述第一枢转组件中，所述第一电缆保持器适于将第一电缆的端部可旋转地保持在所述第一电缆枢轴组件中，所述第一电缆可围绕第四轴线旋转; 在第二枢转组件中的第二电缆保持器，第二电缆保持器适于将第二电缆的端部可旋转地保持在第二枢转组件中，第二电缆可围绕第五轴线旋转; 其中第四和第五轴彼此平行，第四和第五轴垂直于第一轴，第二轴和第三轴。