公开(公告)号：US20120274771A1

公开(公告)日：2012-11-01

申请号：US13548668

申请日：2012-07-13

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H01L31/0352 ,  H04N7/18 ,  B82Y15/00

CPC分类号： B82Y20/00 ,  H01L27/14649 ,  H01L27/14694 ,  H01L31/035236

摘要： An image pickup device, a visibility support apparatus, a night vision device, a navigation support apparatus, and a monitoring device are provided in which noise and dark current are suppressed to thereby provide clear images regardless of whether it is day or night. The device includes a light-receiving layer 3 having a multi-quantum well structure and a diffusion concentration distribution control layer 4 disposed on the light-receiving layer so as to be opposite an InP substrate 1, wherein the light-receiving layer has a band gap wavelength of 1.65 to 3 μm, the diffusion concentration distribution control layer has a lower band gap energy than InP, a pn junction is formed for each light-receiving element by selective diffusion of an impurity element, and the impurity selectively diffused in the light-receiving layer has a concentration of 5×1016/cm3 or less. A diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the light-receiving layer, the portion having a low impurity concentration. The concentration of the impurity element selectively diffused in the diffusion concentration distribution control layer is decreased to be 5×1016/cm3 or less toward the light-receiving layer.

摘要翻译： 提供了一种图像拾取装置，可视性支持装置，夜视装置，导航支持装置和监视装置，其中抑制噪声和暗电流，从而提供清晰的图像，而不管它是白天还是夜晚。 该装置包括具有多量子阱结构的光接收层3和设置在光接收层上以与InP衬底1相对的扩散浓度分布控制层4，其中光接收层具有带 间隙波长为1.65〜3μm，扩散浓度分布控制层具有比InP低的带隙能量，通过杂质元素的选择性扩散形成每个受光元件的pn结，并且杂质选择性地扩散在光 接收层的浓度为5×1016 / cm3以下。 扩散浓度分布控制层在扩散前具有2×1015 / cm3以下的n型杂质浓度，扩散浓度分布控制层具有与光接收层相邻的部分，该杂质浓度低的部分。 在扩散浓度分布控制层中选择性扩散的杂质元素的浓度降低到光接收层的5×1016 / cm3以下。

公开(公告)号：US07999231B2

公开(公告)日：2011-08-16

申请号：US12508008

申请日：2009-07-23

申请人： Yasuhiro Iguchi ,  Youichi Nagai

发明人： Yasuhiro Iguchi ,  Youichi Nagai

IPC分类号： G01J5/20

CPC分类号： H01L31/035236 ,  B82Y20/00 ,  H01L31/03042 ,  H01L31/03046 ,  Y02E10/544

摘要： A moisture detector includes a light-receiving element including an absorption layer having a pn-junction, or an array of the light-receiving elements, wherein the absorption layer has a multiquantum well structure composed of a Group III-V semiconductor, the pn-junction is formed by selectively diffusing an impurity element into the absorption layer, and the concentration of the impurity in the absorption layer is 5×1016/cm3 or less. The moisture detector receives light having at least one wavelength included in an absorption band of water lying in a wavelength range of 3 μm or less, thereby detecting moisture.

摘要翻译： 水分检测器包括具有pn结的吸收层或受光元件的阵列的光接收元件，其中吸收层具有由III-V族半导体组成的多量子阱结构，pn- 通过选择性地将杂质元素扩散到吸收层中而形成结，并且吸收层中的杂质浓度为5×1016 / cm3以下。 水分检测器接收具有在3μm以下的波长范围内的水的吸收带中包含的至少一个波长的光，从而检测水分。

公开(公告)号：US08564666B2

公开(公告)日：2013-10-22

申请号：US13548668

申请日：2012-07-13

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H04N7/18

CPC分类号： B82Y20/00 ,  H01L27/14649 ,  H01L27/14694 ,  H01L31/035236

摘要： An image pickup device, a visibility support apparatus, a night vision device, a navigation support apparatus, and a monitoring device are provided in which noise and dark current are suppressed to thereby provide clear images regardless of whether it is day or night. The device includes a light-receiving layer 3 having a multi-quantum well structure and a diffusion concentration distribution control layer 4 disposed on the light-receiving layer so as to be opposite an InP substrate 1, wherein the light-receiving layer has a band gap wavelength of 1.65 to 3 μm, the diffusion concentration distribution control layer has a lower band gap energy than InP, a pn junction is formed for each light-receiving element by selective diffusion of an impurity element, and the impurity selectively diffused in the light-receiving layer has a concentration of 5×1016/cm3 or less. A diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the light-receiving layer, the portion having a low impurity concentration. The concentration of the impurity element selectively diffused in the diffusion concentration distribution control layer is decreased to be 5×1016/cm3 or less toward the light-receiving layer.

摘要翻译： 提供了一种图像拾取装置，可视性支持装置，夜视装置，导航支持装置和监视装置，其中抑制噪声和暗电流，从而提供清晰的图像，而不管它是白天还是夜晚。 该装置包括具有多量子阱结构的光接收层3和设置在光接收层上以与InP衬底1相对的扩散浓度分布控制层4，其中光接收层具有带 间隙波长为1.65〜3μm，扩散浓度分布控制层具有比InP低的带隙能量，通过杂质元素的选择性扩散形成每个受光元件的pn结，并且杂质选择性地扩散到光 接收层的浓度为5×1016 / cm3以下。 扩散浓度分布控制层在扩散前具有2×1015 / cm3以下的n型杂质浓度，扩散浓度分布控制层具有与光接收层相邻的部分，该杂质浓度低的部分。 在扩散浓度分布控制层中选择性扩散的杂质元素的浓度降低到光接收层的5×1016 / cm3以下。

公开(公告)号：US20100327386A1

公开(公告)日：2010-12-30

申请号：US12494393

申请日：2009-06-30

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H01L27/146 ,  H01L31/0216 ,  H01L31/18

CPC分类号： H01L27/14689 ,  H01L27/1446 ,  H01L27/14609 ,  H01L27/1463 ,  H01L27/14643

摘要： A photodiode array includes a substrate of a common read-out control circuit; and a plurality of photodiodes arrayed on the substrate and each including an absorption layer, and a pair of a first conductive-side electrode and a second conductive-side electrode. In this photodiode array, each of the photodiodes is isolated from adjacent photodiodes, the first conductive-side electrodes are provided on first conductivity-type regions and electrically connected in common across all the photodiodes, and the second conductive-side electrodes are provided on second conductivity-type regions and individually electrically connected to read-out electrodes of the read-out control circuit.

摘要翻译： 光电二极管阵列包括公共读出控制电路的基板; 以及排列在基板上并且各自包括吸收层的多个光电二极管，以及一对第一导电侧电极和第二导电侧电极。 在该光电二极管阵列中，每个光电二极管与相邻的光电二极管隔离，第一导电侧电极设置在第一导电型区域上，并且在所有光电二极管上共同电连接，第二导电侧电极设置在第二导电型电极上 导电型区域，并且分别电连接到读出控制电路的读出电极。

公开(公告)号：US20100051905A1

公开(公告)日：2010-03-04

申请号：US12508008

申请日：2009-07-23

申请人： Yasuhiro Iguchi ,  Youichi Nagai

发明人： Yasuhiro Iguchi ,  Youichi Nagai

IPC分类号： H01L29/06 ,  H01L31/00

CPC分类号： H01L31/035236 ,  B82Y20/00 ,  H01L31/03042 ,  H01L31/03046 ,  Y02E10/544

摘要： A moisture detector includes a light-receiving element including an absorption layer having a pn-junction, or an array of the light-receiving elements, wherein the absorption layer has a multiquantum well structure composed of a Group III-V semiconductor, the pn-junction is formed by selectively diffusing an impurity element into the absorption layer, and the concentration of the impurity in the absorption layer is 5×1016/cm3 or less. The moisture detector receives light having at least one wavelength included in an absorption band of water lying in a wavelength range of 3 μm or less, thereby detecting moisture.

摘要翻译： 水分检测器包括具有pn结的吸收层或受光元件的阵列的光接收元件，其中吸收层具有由III-V族半导体组成的多量子阱结构，pn- 通过选择性地将杂质元素扩散到吸收层中而形成结，并且吸收层中的杂质浓度为5×1016 / cm3以下。 水分检测器接收具有在3μm以下的波长范围内的水的吸收带中包含的至少一个波长的光，从而检测水分。

公开(公告)号：US08274127B2

公开(公告)日：2012-09-25

申请号：US12494393

申请日：2009-06-30

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H01L27/146

CPC分类号： H01L27/14689 ,  H01L27/1446 ,  H01L27/14609 ,  H01L27/1463 ,  H01L27/14643

摘要： A photodiode array includes a substrate of a common read-out control circuit; and a plurality of photodiodes arrayed on the substrate and each including an absorption layer, and a pair of a first conductive-side electrode and a second conductive-side electrode. In this photodiode array, each of the photodiodes is isolated from adjacent photodiodes, the first conductive-side electrodes are provided on first conductivity-type regions and electrically connected in common across all the photodiodes, and the second conductive-side electrodes are provided on second conductivity-type regions and individually electrically connected to read-out electrodes of the read-out control circuit.

摘要翻译： 光电二极管阵列包括公共读出控制电路的基板; 以及排列在基板上并且各自包括吸收层的多个光电二极管，以及一对第一导电侧电极和第二导电侧电极。 在该光电二极管阵列中，每个光电二极管与相邻的光电二极管隔离，第一导电侧电极设置在第一导电型区域上，并且在所有光电二极管上共同电连接，第二导电侧电极设置在第二导电型电极上 导电型区域，并且分别电连接到读出控制电路的读出电极。

公开(公告)号：US20110168895A1

公开(公告)日：2011-07-14

申请号：US13119619

申请日：2009-07-24

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H01L31/0264 ,  G01N21/35

CPC分类号： G01N21/3563 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/2803 ,  G01N21/359 ,  G01N33/025 ,  G01N2201/08 ,  G01N2201/129 ,  H01L27/14678 ,  H01L31/03046 ,  H01L31/0352 ,  H01L31/109 ,  Y02E10/544

摘要： There is provided, for example, a food quality examination device configured to inspect the quality of food with high sensitivity using an InP-based photodiode in which a dark current is decreased without a cooling mechanism and the sensitivity is extended to a wavelength of 1.8 μm or more. An absorption layer has a multiquantum well structure composed of a III-V group semiconductor. A pn junction is formed by selectively diffusing an impurity element into the absorption layer. The concentration of the impurity in the absorption layer is 5×1016/cm3 or less. A diffusion concentration distribution control layer composed of III-V group semiconductor is disposed in contact with the absorption layer on a side of the absorption layer opposite the side adjacent to the InP substrate, the bandgap of the diffusion concentration distribution control layer is lower than that of the InP, the diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the absorption layer, and the portion having a low impurity concentration. The food quality examination device receives light having at least one wavelength of 3 μm or less within the absorption band of water, thereby performing the inspection.

摘要翻译： 例如，提供了一种食品质量检查装置，其被配置为使用在没有冷却机构的情况下降低暗电流的InP基光电二极管以高灵敏度检查食品的质量，并且灵敏度延伸到1.8μm的波长 或者更多。 吸收层具有由III-V族半导体构成的多量子阱结构。 通过选择性地将杂质元素扩散到吸收层中而形成pn结。 吸收层中的杂质浓度为5×1016 / cm3以下。 由III-V族半导体构成的扩散浓度分布控制层与吸收层的与InP衬底相邻的一侧相反侧的吸收层配置，扩散浓度分布控制层的带隙比 的扩散浓度分布控制层在扩散前具有2×1015 / cm3以下的n型杂质浓度，扩散浓度分布控制层具有与吸收层相邻的部分，该部分具有低 杂质浓度。 食品质量检查装置在水的吸收带内接收具有3μm以下的至少一个波长的光，从而进行检查。

公开(公告)号：US08243139B2

公开(公告)日：2012-08-14

申请号：US13063444

申请日：2009-07-24

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H04N7/18

CPC分类号： B82Y20/00 ,  H01L27/14649 ,  H01L27/14694 ,  H01L31/035236

摘要： An image pickup device, a visibility support apparatus, a night vision device, a navigation support apparatus, and a monitoring device are provided in which noise and dark current are suppressed to thereby provide clear images regardless of whether it is day or night. The device includes a light-receiving layer 3 having a multi-quantum well structure and a diffusion concentration distribution control layer 4 disposed on the light-receiving layer so as to be opposite an InP substrate 1, wherein the light-receiving layer has a band gap wavelength of 1.65 to 3 μm, the diffusion concentration distribution control layer has a lower band gap energy than InP, a pn junction is formed for each light-receiving element by selective diffusion of an impurity element, and the impurity selectively diffused in the light-receiving layer has a concentration of 5×1016/cm3 or less. A diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the light-receiving layer, the portion having a low impurity concentration.

摘要翻译： 提供了一种图像拾取装置，可视性支持装置，夜视装置，导航支持装置和监视装置，其中抑制噪声和暗电流，从而提供清晰的图像，而不管它是白天还是夜晚。 该装置包括具有多量子阱结构的光接收层3和设置在光接收层上以与InP衬底1相对的扩散浓度分布控制层4，其中光接收层具有带 间隙波长为1.65〜3μm，扩散浓度分布控制层具有比InP低的带隙能量，通过杂质元素的选择性扩散形成每个受光元件的pn结，并且杂质选择性地扩散在光 接收层的浓度为5×1016 / cm3以下。 扩散浓度分布控制层在扩散前具有2×1015 / cm3以下的n型杂质浓度，扩散浓度分布控制层具有与光接收层相邻的部分，该杂质浓度低的部分。

公开(公告)号：US20120032147A1

公开(公告)日：2012-02-09

申请号：US13122926

申请日：2009-07-30

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H01L31/0352 ,  B82Y99/00 ,  B82Y20/00

CPC分类号： A61B5/1455 ,  A61B5/14532 ,  G01J3/0218 ,  G01J2003/2866 ,  G01N21/359 ,  G01N21/474 ,  H01L27/1446 ,  H01L31/035209 ,  H01L31/1035

摘要： Provided is a biological component detection device with which a biological component can be detected at high sensitivity by using an InP-based photodiode in which a dark current is reduced without using a cooling mechanism and the sensitivity is extended to a wavelength of 1.8 μm or more. An absorption layer 3 has a multiple quantum well structure composed of group III-V semiconductors, a pn-junction 15 is formed by selectively diffusing an impurity element in the absorption layer, and the concentration of the impurity element in the absorption layer is 5×1016/cm3 or less, the diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the absorption layer, the portion having a low impurity concentration. The biological component detection device is characterized in that an examination is conducted by receiving light having at least one wavelength of 3 μm or less, the wavelength being included in an absorption band of the biological component.

摘要翻译： 本发明提供一种生物成分检测装置，其通过使用其中暗电流减小而不使用冷却机构的InP基光电二极管，以高灵敏度检测生物成分，并且灵敏度延伸至1.8μm以上的波长 。 吸收层3具有由III-V族半导体构成的多量子阱结构，通过选择性地扩散吸收层中的杂质元素形成pn结15，并且吸收层中杂质元素的浓度为5× 1016 / cm3以下，扩散浓度分布控制层在扩散前的n型杂质浓度为2×1015 / cm3以下，扩散浓度分布控制层具有与吸收层相邻的部分，该部分具有 杂质浓度低。 生物成分检测装置的特征在于，通过接收具有3μm以下的波长的波长的波长包含在生物成分的吸收带中进行检查。

公开(公告)号：US20110164136A1

公开(公告)日：2011-07-07

申请号：US13063444

申请日：2009-07-24

申请人： Youichi Nagai ,  Yasuhiro Iguchi

发明人： Youichi Nagai ,  Yasuhiro Iguchi

IPC分类号： H04N7/18 ,  H01L31/0352 ,  H04N5/225

CPC分类号： B82Y20/00 ,  H01L27/14649 ,  H01L27/14694 ,  H01L31/035236

摘要： An image pickup device, a visibility support apparatus, a night vision device, a navigation support apparatus, and a monitoring device are provided in which noise and dark current are suppressed to thereby provide clear images regardless of whether it is day or night. The device includes a light-receiving layer 3 having a multi-quantum well structure and a diffusion concentration distribution control layer 4 disposed on the light-receiving layer so as to be opposite an InP substrate 1, wherein the light-receiving layer has a band gap wavelength of 1.65 to 3 μm, the diffusion concentration distribution control layer has a lower band gap energy than InP, a pn junction is formed for each light-receiving element by selective diffusion of an impurity element, and the impurity selectively diffused in the light-receiving layer has a concentration of 5×1016/cm3 or less. A diffusion concentration distribution control layer has an n-type impurity concentration of 2×1015/cm3 or less before the diffusion, the diffusion concentration distribution control layer having a portion adjacent to the light-receiving layer, the portion having a low impurity concentration.

摘要翻译： 提供了一种图像拾取装置，可视性支持装置，夜视装置，导航支持装置和监视装置，其中抑制噪声和暗电流，从而提供清晰的图像，而不管它是白天还是夜晚。 该装置包括具有多量子阱结构的光接收层3和设置在光接收层上以与InP衬底1相对的扩散浓度分布控制层4，其中光接收层具有带 间隙波长为1.65〜3μm，扩散浓度分布控制层具有比InP低的带隙能量，通过杂质元素的选择性扩散，对每个受光元件形成pn结，杂质选择性地扩散在光 接收层的浓度为5×1016 / cm3以下。 扩散浓度分布控制层在扩散前具有2×1015 / cm3以下的n型杂质浓度，扩散浓度分布控制层具有与光接收层相邻的部分，该杂质浓度低的部分。