摘要:
A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system has a light source emitting projection light and projection optics arranged between the mask and the image. Starting from the mask, the following are arranged in the beam path of the projection optics: a first group of optical components with an overall positive refractive power; a second group of optical components with an overall negative refractive power; a third group of optical components with an overall positive refractive power; a fourth group of optical components with an overall negative refractive power, and, a fifth group of optical components with an overall positive refractive power. At least three optical subgroups having at least one optical component can be displaced along the optical axis of the projection optics. The first optical subgroup comprises the mask or at least one optical component from the first group of optical components. The second optical subgroup comprises at least one optical component from the second or the third group of optical components. The third optical subgroup comprises at least one optical component from the third or the fourth group of optical components. With such subgroups, efficient imaging error correction of the projection optics is possible.
摘要:
The invention provides a device for heating, ventilating and air conditioning in vehicles and includes a temperature flap arranged rotatable in the region of a hot air channel and a cold air channel. The temperature flap is designed to largely reduce the temperature dip of the mixed air in an outlet channel, with reference to an associated temperature/rotational position curve. The temperature flap includes a rotational plate with at least one flap opening and at least one dosing element assigned to the flap opening. In the region of the closing element, an opening mechanism, dependent on the rotational position of the temperature flap, actuates the dosing element and opens the flap opening.
摘要:
The present invention involves a compact vehicle temperature control system. The system includes a housing, an evaporator core and a heater core disposed in the housing, and a separation wall disposed between the evaporator core and heater core. The housing has an intake opening for air intake and an output opening for output air. The evaporator core is in fluid communication with the intake opening. The heater core is disposed downstream from the evaporator core and in fluid communication with the evaporator core, defining a space between the evaporator core and the heater core. The heater core has a first portion and a second portion. The separation wall has a first end and a second end. The first end is attached to the first portion of the heater core and extends therefrom along the length of the heater core in the space between the evaporator core and the heater core.
摘要:
A blower air suction device of a motor vehicle air conditioner includes a blower with a vertical arrangement including a blower motor, a blower rotor, and a blower opening, wherein the blower is ensheathed by a blower scroll, and an air inlet housing with a fresh air opening formed in a front wall and with an ambient air opening. The installation of blower is suspended, that is, with the blower rotor under the blower motor, and the air inlet housing is arranged in the process beneath the blower.
摘要:
A vehicle air conditioner is disclosed having means to cool and heat air with three air paths, of which, two outer air paths have a common first temperature and an inner air path has a second temperature, wherein a means for controlling the air volume flow through the outer air paths and the inner air path is provided by two control elements which are configured jointly to be able to move in opposing directions.
摘要:
The invention relates to an HVAC device for a vehicle including an inlet casing, an air distribution casing, and a blower located in a blower casing for drawing air through the inlet casing and delivering the air into the air distribution casing. The device further includes an evaporator in the air distribution casing and a drainage system below the evaporator for draining off liquid condensed out of the air at the surface of the evaporator into the environment of the HVAC device. The inlet casing is positioned such that liquid penetrating the inlet casing accumulates in a lower area of the inlet casing. Between the lower area of the inlet casing and the drainage system of the liquid condensed out at the evaporator, a hydraulic connection is configured such that the liquid is drainable from the inlet easing past the blower casing and evaporator into the drainage system.
摘要:
A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system has a light source emitting projection light and projection optics arranged between the mask and the image. Starting from the mask, the following are arranged in the beam path of the projection optics: a first group of optical components with an overall positive refractive power; a second group of optical components with an overall negative refractive power; a third group of optical components with an overall positive refractive power; a fourth group of optical components with an overall negative refractive power, and, a fifth group of optical components with an overall positive refractive power. At least three optical subgroups having at least one optical component can be displaced along the optical axis of the projection optics. The first optical subgroup comprises the mask or at least one optical component from the first group of optical components. The second optical subgroup comprises at least one optical component from the second or the third group of optical components. The third optical subgroup comprises at least one optical component from the third or the fourth group of optical components. With such subgroups, efficient imaging error correction of the projection optics is possible.
摘要:
The invention relates to a load-carrying component that makes it possible to support a vehicle cross-member or module carrier on the floor region of the body of a motor vehicle. The load-carrying component serves to attach an air conditioning unit and is connected to as least one casing part of the air conditioning unit such that the load-carrying component and the casing create at least one channel through which conditioned air flows into the passenger compartment of the vehicle.
摘要:
A catadioptric projection objective for microlithography has at least one curved mirror that is deformable and adjusting elements that can deform the deformable mirror. The adjusting elements are matched to given image errors and their correction. The invention is suitable for astigmatism, fourfold wavefront-deformations due to lens heating, compaction, and the like.
摘要:
In a system for flushing at least one internal space of an objective, in particular an exposure projection objective for semiconductor lithography, flushing is performed by mixing at least two inert gasses in such a way that the refractive index resulting therefrom corresponds at least approximately to the refractive index of air.