Heat-shielded low power PCM-based reprogrammable EFUSE device
    33.
    发明授权
    Heat-shielded low power PCM-based reprogrammable EFUSE device 有权
    隔热低功耗基于PCM的可编程EFUSE设备

    公开(公告)号:US07394089B2

    公开(公告)日:2008-07-01

    申请号:US11467294

    申请日:2006-08-25

    IPC分类号: H01L47/00

    摘要: An electrically re-programmable fuse (eFUSE) device for use in integrated circuit devices includes an elongated heater element, an electrically insulating liner surrounding an outer surface of the elongated heater element, corresponding to a longitudinal axis thereof, leaving opposing ends of the elongated heater element in electrical contact with first and second heater electrodes. A phase change material (PCM) surrounds a portion of an outer surface of the electrically insulating liner, a thermally and electrically insulating layer surrounds an outer surface of the PCM, with first and second fuse electrodes in electrical contact with opposing ends of the PCM. The PCM is encapsulated within the electrically insulating liner, the thermally and electrically insulating layer, and the first and second fuse electrodes.

    摘要翻译: 用于集成电路器件的电可重新编程保险丝(eFUSE)器件包括细长的加热器元件,围绕细长加热器元件的外表面的电绝缘衬垫,其对应于其纵向轴线,留下细长加热器的相对端 元件与第一和第二加热器电极电接触。 相变材料(PCM)围绕电绝缘衬垫的外表面的一部分,热和电绝缘层围绕PCM的外表面,其中第一和第二熔丝电极与PCM的相对端电接触。 PCM被封装在电绝缘衬垫,热和电绝缘层以及第一和第二熔丝电极中。