公开(公告)号：US20110221537A1

公开(公告)日：2011-09-15

申请号：US13112570

申请日：2011-05-20

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H03B5/32 ,  H01L41/053 ,  H01L41/22

CPC classification number: H03H9/215 ,  H03H3/04 ,  H03H9/0519 ,  H03H9/1021 ,  H03H2003/0492 ,  Y10T29/42

Abstract: The piezoelectric vibrator includes: a package in which a first substrate and a second substrate are superimposed so as to form a cavity therebetween; outer electrodes which are formed on an outer surface of the first substrate; inner electrodes which are formed on the first substrate so as to be accommodated in the cavity; penetration electrodes which are formed so as to penetrate through the first substrate so that the outer electrodes and the inner electrodes are electrically connected; and a piezoelectric vibrating reed which is sealed in the cavity and electrically connected to the inner electrodes at the inner side of the cavity. The first substrate and the second substrate are bonded by a bonding film that is formed of a low-melting-point glass, and the bonding film is heated to a predetermined bonding temperature when the first substrate and the second substrate are bonded together, and is formed by being heated to a temperature higher than the bonding temperature before the bonding is performed.

Abstract translation: 压电振子包括：第一基板和第二基板叠加在其中以在其间形成空腔的封装; 形成在第一基板的外表面上的外电极; 内电极，其形成在第一基板上以容纳在空腔中; 穿透电极，其形成为穿过第一基板，使得外电极和内电极电连接; 以及压电振动片，其密封在空腔中并且在腔的内侧电连接到内部电极。 第一基板和第二基板通过由低熔点玻璃形成的接合膜接合，并且当第一基板和第二基板接合在一起时，接合膜被加热到预定的接合温度，并且是 通过加热到高于接合前的接合温度的温度而形成。

公开(公告)号：US20110215879A1

公开(公告)日：2011-09-08

申请号：US13112472

申请日：2011-05-20

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H03B5/32 ,  H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  H03H9/1021

Abstract: A method for manufacturing a piezoelectric vibrator is provided. The piezoelectric vibrator includes: a package in which a first substrate and a second substrate are superimposed so as to form a cavity therebetween; extraction electrodes which are formed on the first substrate so as to be extracted from the inner side of the cavity to an outer edge of the first substrate; a piezoelectric vibrating reed which is sealed in the cavity and electrically connected to the extraction electrodes at an inner side of the cavity; and outer electrodes which are formed on an outer surface of the package so as to be electrically connected to the extraction electrodes at the outer side of the cavity. The method includes: a bonding film forming step of forming a bonding film on at least one of the first substrate and the second substrate using a low-melting-point glass so as to bond the two substrates; a mounting step of electrically connecting the piezoelectric vibrating reed to the extraction electrodes formed on the first substrate; and a bonding step of superimposing the first substrate and the second substrate onto each other with the bonding film disposed therebetween while heating the bonding film to a predetermined bonding temperature to thereby bond the two substrates by the bonding film.

Abstract translation: 提供一种压电振动器的制造方法。 压电振子包括：第一基板和第二基板叠加在其中以在其间形成空腔的封装; 提取电极，其形成在所述第一基板上以便从所述空腔的内侧提取到所述第一基板的外边缘; 压电振动片，其密封在所述空腔中并且在所述空腔的内侧电连接到所述提取电极; 以及外部电极，其形成在所述封装的外表面上，以在所述空腔的外侧电连接到所述引出电极。 该方法包括：接合膜形成步骤，使用低熔点玻璃在至少一个第一基板和第二基板上形成接合膜，以便接合两个基板; 将压电振动片电连接到形成在第一基板上的引出电极的安装步骤; 以及将第一基板和第二基板叠置在一起，并将接合膜加热到预定的接合温度，由此通过接合膜将两个基板接合的结合工序。

公开(公告)号：US20110050045A1

公开(公告)日：2011-03-03

申请号：US12868310

申请日：2010-08-25

Applicant: Kiyoshi Aratake ,  Takeshi Sugiyama ,  Junya Fukuda

Inventor： Kiyoshi Aratake ,  Takeshi Sugiyama ,  Junya Fukuda

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03H9/1021 ,  H03H2003/0478 ,  H03H2003/0492 ,  Y10T29/42

Abstract: Providing a package and a method for manufacturing the package capable of achieving improvement in the degree of vacuum in the cavity, and to provide a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece. There is provided a package which includes a plurality of kinds of gettering materials 20, 21 having different activation temperatures and which are capable of being activated by heating is disposed in the cavity C.

Abstract translation: 提供一种能够实现空腔内真空度提高的封装和封装方法，以及提供压电振动器，振荡器，电子设备和无线电控制的钟表。 提供了包括多种具有不同活化温度的吸气材料20,21的包装件，其能够通过加热而被活化。

公开(公告)号：US20070159029A1

公开(公告)日：2007-07-12

申请号：US11605165

申请日：2006-11-28

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H03H9/21

CPC classification number: H03H9/215 ,  H03H3/02 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/1021 ,  H03H2003/026

Abstract: There are provided a piezoelectric vibrating piece, which has been more miniaturized and whose efficiency has been more increased, by easily and certainly electrode-dividing an exciting electrode, and a manufacturing method of the same. There is provided a manufacturing method of a piezoelectric vibrating piece, characterized by having an exposure process in which a mask having an opening part is disposed such that the opening part is located on at least either edge of a 1st edge, in two places, formed by a main face and a side face of a vibrating arm part or a 2nd edge, in two places, formed by the main face and a side face of a groove part, and a parallel light is slantingly irradiated through the opening part toward at least either of a bottom face or an outside of the groove part while following a face intersecting perpendicularly to a longitudinal direction of the vibrating arm part to thereby expose a photosensitive film.

Abstract translation: 提供一种压电振动片及其制造方法，该压电振动片通过容易且确实地分选激励电极而使其更小型化并且效率提高得更多。 提供了一种压电振动片的制造方法，其特征在于具有曝光处理，其中具有开口部的掩模设置成使得开口部位于第一边缘的至少任一边缘上，形成在两个位置 通过由主面和凹槽部分的侧面形成的振动臂部分或第二边缘的主表面和侧面，并且平行的光通过开口部分至少朝向至少 沿着垂直于振动臂部的纵向方向相交的面从而暴露感光性膜的凹槽部的底面或外侧。

公开(公告)号：US06407485B1

公开(公告)日：2002-06-18

申请号：US09493760

申请日：2000-01-28

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H01L4104

CPC classification number: H03H9/0595 ,  H03H3/02 ,  H03H9/1035 ,  H03H9/215

Abstract: A piezoelectric vibrator has a piezoelectric vibration plate having a piezoelectric vibration piece. First and second oscillation electrode films are disposed on the piezoelectric vibration plate for undergoing oscillating movement to vibrate the piezoelectric vibration plate. Each of the first and second oscillation electrode films terminates in a bonding film portion. A pair of cover members form a hermetically sealed cavity containing the piezoelectric vibration piece of the piezoelectric vibration plate. The cover members are anodically bonded together through the bonding film portions of the first and second oscillation electrode films. Each lead electrode of a pair of lead electrodes has a portion connected to a respective one of the bonding film portions of the first and second oscillation electrode films.

Abstract translation: 压电振子具有具有压电振动片的压电振动板。 第一和第二振荡电极膜设置在压电振动板上以进行振荡运动以振动压电振动板。 第一和第二振荡电极膜中的每一个终止于接合膜部分。 一对盖构件形成包含压电振动板的压电振动片的气密密封腔。 盖构件通过第一和第二振荡电极膜的接合膜部分阳极结合在一起。 一对引线电极的每个引线电极具有连接到第一和第二振荡电极膜的接合膜部分的相应一个部分的部分。

公开(公告)号：US08749122B2

公开(公告)日：2014-06-10

申请号：US13050284

申请日：2011-03-17

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H01L41/053 ,  H03H9/10 ,  H03H9/21

CPC classification number: H03H9/1021 ,  H03H9/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: Provided are a vacuum package and a method for manufacturing the vacuum package having excellent airtightness and capable of improving mounting strength, and a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece. The package includes a base substrate and a lid substrate bonded to each other, a cavity formed between the base substrate and the lid substrate and configured to be capable of sealing a piezoelectric vibrating reed, and penetration electrodes penetrating through the base substrate in the thickness direction so as to make the inner side of the cavity and the outer side conductive. Portions of the base substrate and the lid substrate in the vicinity of the cavity form bonding regions in which the two substrates are bonded. A notch portion through which the bonding surface of the lid substrate is exposed as seen from the thickness direction of the base substrate is formed on the corner portions of the base substrate.

Abstract translation: 提供一种具有优异的气密性并且能够提高安装强度的真空封装和制造方法，以及压电振动器，振荡器，电子设备和无线电控制的钟表。 该封装包括：基板和盖基板，其形成在基底基板和盖基板之间，并且能够密封压电振动片，穿透电极在基板的厚度方向上贯通 以使空腔的内侧和外侧导电。 基底基板和盖基板在空腔附近的部分形成两个基板结合的接合区域。 在基底基板的角部形成有从基底基板的厚度方向观察盖基板的接合面露出的切口部。

公开(公告)号：US08653899B2

公开(公告)日：2014-02-18

申请号：US13398350

申请日：2012-02-16

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H03B5/30

CPC classification number: H03H9/1021 ,  G04C3/047 ,  G04R20/10 ,  H03H9/215

Abstract: A piezoelectric vibrator, an oscillator, an electronic device and a ratio timepiece are provided which are capable of increasing a capacitance C0 while achieving miniaturization and cost reduction. The piezoelectric vibrator includes a base substrate, a lid substrate, a piezoelectric vibrating reed on which an excitation electrode is formed, and external electrodes. An electrode pattern for capacitance adjustment, which extends along a routing electrode, is provided extending from a routing electrode.

Abstract translation: 提供一种能够在实现小型化和降低成本的同时增加电容C0的压电振动器，振荡器，电子装置和比率时计。 压电振动器包括基底基板，盖基板，形成有激励电极的压电振动片和外部电极。 设置从布线电极延伸的沿着布线电极延伸的用于电容调整的电极图案。

公开(公告)号：US08448311B2

公开(公告)日：2013-05-28

申请号：US12860570

申请日：2010-08-20

Applicant: Kiyoshi Aratake ,  Yasuo Kawada

Inventor： Kiyoshi Aratake ,  Yasuo Kawada

IPC: H04R17/10

CPC classification number: H03H9/1021 ,  H03H3/02 ,  H03H9/0542 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: When a base substrate where through electrodes are formed is anodically bonded to a lid substrate that includes a bonding film formed on the entire lower surface thereof, a method of manufacturing a piezoelectric vibrator includes a superimposing process for superimposing the lid substrate on the base substrate so that a piezoelectric vibrating reed is received in a cavity, after bonding the piezoelectric vibrating reed to the upper surface of the base substrate; a setting process for placing a dummy member, which is made of a material in which ions can be transferred at a bonding temperature, on an electrode plate, and placing the superimposed substrates on the dummy member so that the base substrate faces the dummy member; and an applying process for applying a bonding voltage between the electrode plate and the bonding film after heating the dummy member and the substrates up to the bonding temperature.

Abstract translation: 当形成贯通电极的基底基板阳极接合到包括形成在其整个下表面上的接合膜的盖基板时，压电振动器的制造方法包括用于将盖基板叠加在基底基板上的叠加处理 在将压电振动片接合到基底基板的上表面之后，将压电振动片接收在空腔中; 用于将由接合温度下的离子可以转移的材料制成的虚拟构件放置在电极板上，并将叠置的基板放置在虚拟构件上使得基底朝向假构件的设定处理; 以及在将虚拟构件和基板加热至接合温度之后，在电极板和接合膜之间施加接合电压的施加处理。

公开(公告)号：US08373334B2

公开(公告)日：2013-02-12

申请号：US12950708

申请日：2010-11-19

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H03H9/21 ,  H01L41/047

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03H3/04 ,  H03H9/1021 ,  H03H2003/026 ,  Y10T29/42

Abstract: There are provided a piezoelectric vibrating reed which can be reliably bonded ultrasonically and which can be efficiently manufactured, a piezoelectric vibrator, a method of manufacturing a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio-controlled timepiece. A piezoelectric vibrating reed includes: a piezoelectric plate having vibrating portions and a base portion adjacent to the vibrating portions; excitation electrodes formed in the vibrating portions; mount electrodes formed in the base portion; lead-out electrodes for making the excitation electrodes and the mount electrodes electrically connected to each other; and a passivation film which is formed of an electrically insulating material and covers the excitation electrodes and the lead-out electrodes. These electrodes disposed on one surface of the base portion are formed only in a region covered by the passivation film.

Abstract translation: 提供了可以可靠地结合超声波并且可以有效地制造的压电振动片，压电振动器，压电振动器的制造方法，振荡器，电子设备和无线电控制的钟表。 一种压电振动片包括：压电板，其具有振动部分和与所述振动部分相邻的基部; 激励电极形成在振动部分中; 形成在基部的安装电极; 用于使激励电极和安装电极彼此电连接的引出电极; 以及由电绝缘材料形成并覆盖激励电极和引出电极的钝化膜。 设置在基部的一个表面上的这些电极仅形成在被钝化膜覆盖的区域中。

公开(公告)号：US08058778B2

公开(公告)日：2011-11-15

申请号：US12857273

申请日：2010-08-16

Applicant: Masashi Numata ,  Kiyoshi Aratake

Inventor： Masashi Numata ,  Kiyoshi Aratake

IPC: H01L41/053 ,  H01L41/047

CPC classification number: H03H9/1021 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: There is provided a piezoelectric vibrator 1 that includes a base substrate 2, a lid substrate 3, a piezoelectric vibrating reed 4, a pair of external electrodes 38 and 39, a pair of through electrodes 32 and 33, and routing electrodes 36 and 37. The lid substrate 3 includes a recess 3a for a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reed 4 is bonded to the upper surface of the base substrate in a cavity that is formed between both the substrates. The pair of external electrodes 38 and 39 is formed on the lower surface of the base substrate. The pair of through electrodes 32 and 33 is formed so as to pass through the base substrate and is electrically connected to the pair of external electrodes, respectively. The routing electrodes 36 and 37 are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The through electrodes include electrode films 32a and 33a that are formed on the inner surfaces of the through holes 30 and 31, and glass bodies 32b and 33b that are fixed to the inner surfaces of the through holes with the electrode films interposed therebetween so as to close the through holes.

Abstract translation: 提供了一种压电振动器1，其包括基底基板2，盖基板3，压电振动片4，一对外部电极38和39，一对贯通电极32和33以及布线电极36和37。 盖基板3包括用于空腔的凹部3a，并且与基底基板接合，使得凹部面向基底。 压电振动片4在形成在两个基板之间的空腔中结合到基底基板的上表面。 一对外部电极38和39形成在基底基板的下表面上。 一对贯通电极32,33形成为通过基底基板，分别与一对外部电极电连接。 布线电极36和37形成在基底基板的上表面上，并将一对通孔电连接到压电振动片。 贯通电极包括形成在通孔30和31的内表面上的电极膜32a和33a以及固定到通孔的内表面的玻璃体32b和33b，其间插入有电极膜，以便 关闭通孔。