摘要:
Disclosed is a glass body cutting method for cutting a glass body along a planned cutting line, the method including: a groove forming process of forming a groove on one surface of the glass body along the planned cutting line by irradiation of a laser light along the planned cutting line; an attachment process of attaching an adhesive sheet to the one surface to cover at least the groove, after the groove forming process; and a cutting process of cutting the glass body along the planned cutting line by applying a tear stress along the planned cutting line while pressing a cutting blade against the other surface of the glass body in a state where the glass body is disposed on a supporting section through the adhesive sheet, after the attachment process.
摘要:
To provide a wafer in which out-gas emitted between wafers during bonding of the wafers can be easily discharged to the outside and the bonded wafers can be favorably cut to improve the yields, and a method of manufacturing a package product using the wafer. A groove portion is formed in a wafer for lid substrate along a plurality of imaginary straight lines passing through a center in a diameter direction of the wafer for lid substrate and extending in the diameter direction. The groove portion is divided into a plurality of groove portions in the diameter direction placed such that the groove portions are not in contact with each other.
摘要:
An anodic bonding method for anodically bonding a first substrate and a second substrate includes: a substrate placement step in which the first substrate and the second substrate are stacked and placed on a flat surface of a base with a surface of one of the first substrate and the second substrate to be cathode in contact with the flat surface of the base; a jig placement step, following the substrate placement step, in which the anodic bonding jig is placed so as to be in contact with a surface of one of the first substrate and the second substrate to be anode, the anodic bonding jig having a visual checking area formed of a material that allows visible light to pass through; an alignment step in which the relative positional relation between the first substrate and the second substrate is adjusted based on visible light passing through the visual checking area so that pairs of marks provided on the first substrate and the second substrate will be in a predetermined positional relation; a pressurizing step in which the base and the anodic bonding jig are pressurized in the direction to move the base and the anodic bonding jig close to each other, and the first substrate and the second substrate are sandwiched; and an application step in which a DC voltage is applied between the first substrate and the second substrate.
摘要:
There is provided a method of manufacturing piezoelectric vibrators 1. The method includes a process for through holes 35 and 36, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the recesses for cavities C; a process for patterning a bonding layer 30, pairs of mounting layers, and pairs of extraction electrode layers 33 and 34 on the upper surface of the base substrate wafer with the same conductive material; and a process for electrically isolating the extraction electrode layers 34 in the middle by irradiating a part (area S2) of the extraction electrode layers 34, which are formed between the bonding layer and openings of through holes 36, with laser light after both the wafers are anodically bonded to each other. The bonding layer 30 surrounds the recesses, the pairs of mounting layers are in the recesses, and the pairs of extraction electrode layers 33 and 34 electrically connect the pairs of mounting layers to the bonding layer.
摘要:
There is There is provided a method of manufacturing a package 1 having a base substrate 10 and a lid substrate 20 bonded to each other and both formed of a glass base material; and a cavity C formed between the both substrates for storing an encapsulated object 2 in a state of being hermetically encapsulated, including: a depression forming step for forming a depression C1 for a cavity which defines the cavity when the both substrates are superimposed to each other on at least one of the both substrates; and a bonding step for superimposing the both substrates so as to store the encapsulated object in the depression and then bonding the both substrates to encapsulate the encapsulated object in the cavity, characterized in that in the depression forming step, printed layers 12 are laminated on an upper surface of a flat plate-shaped glass base material 11 in a frame shape in plan view by screen printing, and then the printed layers and the glass base material are baked at the same time to form the depression.
摘要:
To achieve small-sized formation of a piezoelectric vibrator while preventing exciting electrodes provided at both faces of the piezoelectric vibrating piece from being shortcircuited to each other and enabling to fabricate the piezoelectric vibrating piece easily, there is provided a piezoelectric vibrator 1 including a case 3 in a shape of a bottomed cylinder having an opening portion 3a and having a conductivity, a ring 12 substantially in a cylindrical shape press-fitted to the opening portion 3a of the case 3 and having a conductivity, one piece of a lead 13 inserted to the ring 12 and having an inner lead portion 15 and an outer lead portion 16, a filling member 14 having an insulting property for sealing an interval between the lead 13 and the ring 12 in airtight, and a piezoelectric vibrating piece 2 which is constituted by substantially a plate-like shape arranged at inside of the case 3 and includes exciting electrodes 8, 9 at both faces thereof and in which the exciting electrode 8 is supported by the inner lead portion 15 by being subjected to bump connection with the inner lead portion 15 of the lead 13 and the exciting electrode 9 is subjected to wire bonding with the ring 12.
摘要:
A communication system includes: an image forming unit connected to a communication line through a communication control unit; and a management unit for managing data of resources of the image forming unit, the management unit being connected to the communication line, the image forming unit including: at least one component part; a first storage part for storing a control program for the component part, so that the component part is controlled in accordance with the control program; and a first control part for transmitting a first code to the management unit via the communication line in response to an update request signal, the first code indicating a model of the image forming unit and indicating a type of the component part, the management unit including: a second storage part for storing a plurality of control programs for different types of the component part of the image forming unit; and a second control part for reading out a first control program from the second storage part in accordance with the first code received from the first control part, and for transmitting the first control program to the image forming unit via the communication line, so that the first control program is stored in the first storage part.
摘要:
A communication control device connected between an image forming apparatus and a communication line in an image forming apparatus supervising system which connects the image forming apparatus and a host machine by the communication line. Assume that particular data of an image forming apparatus and which is updated day by day should be read periodically. Then, even when the power supply to the image forming apparatus is shut off, a host machine can access the apparatus to read the data which should be read periodically, and receive it. In addition, the data can be preserved until the next time for reading. The data is stored in a first memory until the data is ready for transfer to the host machine, at which time the data is transferred to a second memory and then to the host machine.
摘要:
An anodic bonding method for anodically bonding a first substrate and a second substrate includes: a substrate placement step in which the first substrate and the second substrate are stacked and placed on a flat surface of a base with a surface of one of the first substrate and the second substrate to be cathode in contact with the flat surface of the base; a jig placement step, following the substrate placement step, in which the anodic bonding jig is placed so as to be in contact with a surface of one of the first substrate and the second substrate to be anode, the anodic bonding jig having a visual checking area formed of a material that allows visible light to pass through; an alignment step in which the relative positional relation between the first substrate and the second substrate is adjusted based on visible light passing through the visual checking area so that pairs of marks provided on the first substrate and the second substrate will be in a predetermined positional relation; a pressurizing step in which the base and the anodic bonding jig are pressurized in the direction to move the base and the anodic bonding jig close to each other, and the first substrate and the second substrate are sandwiched; and an application step in which a DC voltage is applied between the first substrate and the second substrate.
摘要:
Disclosed is a bonded glass cutting method including: a first focus adjustment process of focusing laser light; a second focus adjustment process of moving the focus of the laser light toward one surface side of the bonded glass along a thickness direction of the bonded glass, after the first focus adjustment process; a detection target portion forming process of forming a detection target portion on one surface by irradiation of the laser light, after the second focus adjustment process; a third focus adjustment process of refocusing the laser light on the detection target portion; a groove forming process of forming a groove on one surface by irradiation of the laser light along the planned cutting line, after the third focus adjustment process.