公开(公告)号：US20180306615A1

公开(公告)日：2018-10-25

申请号：US16020415

申请日：2018-06-27

Applicant: MKS INSTRUMENTS, INC.

Inventor： Junhua Ding

IPC: G01F1/36 ,  G05D7/06 ,  G01F15/04 ,  G01F1/86 ,  G01F15/02 ,  G01F25/00 ,  G01F1/88

CPC classification number: G01F1/363 ,  G01F1/86 ,  G01F1/88 ,  G01F15/022 ,  G01F15/024 ,  G01F15/043 ,  G01F15/046 ,  G01F25/0007 ,  G05D7/0647 ,  Y10T137/0379 ,  Y10T137/7761

Abstract: A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.

公开(公告)号：US20180172491A1

公开(公告)日：2018-06-21

申请号：US15380682

申请日：2016-12-15

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/00

Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.

公开(公告)号：US20170060143A1

公开(公告)日：2017-03-02

申请号：US15244264

申请日：2016-08-23

Applicant: MKS INSTRUMENTS, INC.

Inventor： Junhua Ding ,  Michael L'Bassi

IPC: G05D7/06 ,  G05B6/02 ,  G01F1/50 ,  G01F1/36 ,  G01F1/42

CPC classification number: G05D7/0635 ,  G01F1/363 ,  G01F1/50 ,  G01F15/005

Abstract: Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pd based on the received upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pu and the computed downstream pressure value Pd. The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions.

Abstract translation: 提供了基于压力的流量测量的方法，系统和装置。 处理器从基于压力的质量流量控制器（MFC）接收上游压力值Pu。 基于压力质量流量控制器（MFC），处理器基于接收到的上游压力值Pu计算下游压力值Pd。 对于基于压力的质量流量控制器（MFC），处理器基于接收到的上游压力值Pu和计算出的下游压力值Pd来计算流量Q。 处理器基于计算的流量Q控制通过基于压力的质量流量控制器（MFC）的流量。方法，系统和装置可用于非关键或非扼流流量条件下的流量测量。

公开(公告)号：US20240201713A1

公开(公告)日：2024-06-20

申请号：US18471278

申请日：2023-09-20

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding

IPC: G05D7/06 ,  G01F1/86

CPC classification number: G05D7/0635 ,  G01F1/86

Abstract: Mass flow controller (MFC) devices capable of self-verification and methods of providing for self-verifying mass flow control are provided. An MFC includes a chamber configured to receive a fluid, an upstream valve disposed upstream of the chamber, and a downstream control valve disposed downstream of the chamber. The MFC further includes a pressure drop element disposed downstream of the downstream control valve and first and second pressure sensors. A controller of the MFC is configured to control actuation of the downstream control valve by toggling between flow-based feedback control and pressure-based feedback control. In flow-based feedback control, a flow is monitored based on a rate of decay of pressure in the chamber as detected by the first pressure sensor upon closure of the upstream control valve. In pressure-based feedback control, a pressure upstream of the pressure drop element, as detected by the second pressure sensor, is monitored.

公开(公告)号：US11940307B2

公开(公告)日：2024-03-26

申请号：US17342341

申请日：2021-06-08

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding

IPC: G01F1/86 ,  G01F1/37 ,  G05D7/06

CPC classification number: G01F1/372 ,  G01F1/86 ,  G05D7/0652

Abstract: A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

公开(公告)号：US11573583B2

公开(公告)日：2023-02-07

申请号：US17452953

申请日：2021-10-29

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Mark J. Quaratiello

IPC: G05D16/20 ,  G01F15/00 ,  G05D7/06

Abstract: A gas delivery system and associated method includes a flow channel, a control valve, a downstream pressure sensor, and a controller. The control valve controls flow of gas in the flow channel. The downstream pressure sensor, located downstream of the control valve, measures gas pressure in the flow channel. The controller has an external trigger input to receive a trigger signal applied to a shutoff valve downstream from the control valve. The controller operates in separate modes based on a state of the trigger signal. In a non-triggered mode, the controller controls pressure at the pressure sensor via the control valve in accordance with a first gain schedule. In the triggered mode, the controller controls the pressure at the pressure sensor via the control valve in accordance with a second gain schedule that is distinct from the first gain schedule.

公开(公告)号：US20230031118A1

公开(公告)日：2023-02-02

申请号：US17757902

申请日：2021-01-11

Applicant: MKS Instruments, Inc.

Inventor： Jim Ye ,  Vidi Saptari ,  Junhua Ding

IPC: G01N33/00 ,  G01F1/76 ,  G05D11/13

Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.

公开(公告)号：US20220390261A1

公开(公告)日：2022-12-08

申请号：US17342341

申请日：2021-06-08

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding

IPC: G01F1/37 ,  G01F1/86 ,  G05D7/06

Abstract: A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

公开(公告)号：US11187561B2

公开(公告)日：2021-11-30

申请号：US16800363

申请日：2020-02-25

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding

IPC: G01F1/42 ,  G05D7/06

Abstract: A system and method for dividing a single mass flow into secondary flows of a desired ratio. The system and method include paths for the secondary flows that include a laminar flow element and two pressure sensors. The nonlinear relationship between flow and pressure upstream and downstream of the laminar flow elements can be transformed into a function comprised of the upstream and downstream pressure that has a linear relationship with the flow. This transformation allows for flow ratio control applications using signals from pressure sensors even if there is no information the fluid species and the flow rate into the flow ratio controller.

公开(公告)号：US10969799B2

公开(公告)日：2021-04-06

申请号：US16168812

申请日：2018-10-23

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Tseng-Chung Lee

IPC: G05D7/06

Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.