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105 条记录 (耗时 0.029 秒)

    Thermal airflow sensor
    32.
    发明授权
    Thermal airflow sensor 有权
    热气流传感器

    公开(公告)号：US06666082B2

    公开(公告)日：2003-12-23

    申请号：US10096570

    申请日：2002-03-14

    申请人： Izumi Watanabe ,  Masamichi Yamada ,  Keiichi Nakada

    发明人： Izumi Watanabe ,  Masamichi Yamada ,  Keiichi Nakada

    IPC分类号： G01F168

    CPC分类号： G01F1/6845 ,  G01F1/684 ,  H01L2224/16225 ,  H01L2224/8592 ,  H01L2924/15192 ,  H01L2924/19105

    摘要： A thermal airflow sensor is made highly resistant to thermal stresses due to cold-heat cycles, highly reliable even in the presence of corrosive gases, and capable of low dispersion of output characteristics. The thermal airflow sensor has a semiconductor sensor element in a dent formed on a ceramic laminated board on which a control circuit and a metallic film are formed. The laminated board area at which the semiconductor sensor element is electrically connected to the laminated board is covered with epoxy resin. The part covered with epoxy resin is placed in the air passage.

    摘要翻译： 热气流传感器由于冷热循环而高度耐热应力，即使在存在腐蚀性气体的情况下也是高度可靠的，并且能够实现低输出特性的分散。 热气流传感器具有形成在其上形成有控制电路和金属膜的陶瓷层压板上的凹陷中的半导体传感器元件。 半导体传感器元件与层压板电连接的层叠板区域被环氧树脂覆盖。 用环氧树脂覆盖的部分放置在空气通道中。

    Thermal type air flow sensor and control device for a vehicle
    33.
    发明授权
    Thermal type air flow sensor and control device for a vehicle 有权
    热式气流传感器和车辆控制装置

    公开(公告)号：US06490915B2

    公开(公告)日：2002-12-10

    申请号：US09759224

    申请日：2001-01-16

    申请人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada

    发明人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada

    IPC分类号： G01N1900

    CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01F1/698

    摘要： A thermal type air flow rate sensor is formed with at least a heating resistor and a temperature measuring resistor on a semiconductor substrate via an electric insulation film, by forming the heating resistor and the temperature measuring resistor with an impurity doped silicon (Si) semiconductor thin film, and by performing high concentration doping process so that an electric resistivity (&rgr;) of the silicon (Si) semiconductor thin film is less than or equal to 8×10−4 &OHgr; cm, with simplified fabrication process for formation of the silicon (Si) semiconductor thin film at the same impurity concentration simultaneously in a lump at low cost.

    摘要翻译： 热电式空气流量传感器通过电绝缘膜在半导体衬底上至少形成有加热电阻器和温度测量电阻器，通过用杂质掺杂硅（Si）半导体薄片形成加热电阻器和温度测量电阻器 并且通过进行高浓度掺杂工艺，使得硅（Si）半导体薄膜的电阻率（rho）小于或等于8×10 -4欧姆·厘米，通过制造硅（Si）的制造工艺简化， 半导体薄膜以相同的杂质浓度同时以一个小块成本。

    Thermal type flow sensor having bridge circuit and adjustment circuit
    34.
    发明授权
    Thermal type flow sensor having bridge circuit and adjustment circuit 有权
    具有桥式电路和调节电路的热式流量传感器

    公开(公告)号：US08779337B2

    公开(公告)日：2014-07-15

    申请号：US13542426

    申请日：2012-07-05

    申请人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe

    发明人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe

    IPC分类号： B23K10/00

    CPC分类号： G01F1/692 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/698

    摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.

    摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。

    THERMAL TYPE FLOW SENSOR
    36.
    发明申请
    THERMAL TYPE FLOW SENSOR 有权
    热流型传感器

    公开(公告)号：US20100170335A1

    公开(公告)日：2010-07-08

    申请号：US12724399

    申请日：2010-03-15

    申请人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe

    发明人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe

    IPC分类号： G01F1/692

    CPC分类号： G01F1/692 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/698

    摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.

    摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。

    Physical quantity sensor
    37.
    发明授权
    Physical quantity sensor 有权
    物理量传感器

    公开(公告)号：US07555944B2

    公开(公告)日：2009-07-07

    申请号：US11353937

    申请日：2006-02-15

    申请人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

    发明人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

    IPC分类号： G01F1/68

    CPC分类号： G01C9/00 ,  G01F1/6845 ,  G01F1/69 ,  G01P15/008

    摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.

    摘要翻译： 一种高精度的物理量传感器，可以确保强度的可靠性，并减少由应力引起的阻力变化。 假设相对于在预定方向（例如，施加最大应力的方向）施加在基板上的应力σ，作为水平方向的平行方向和垂直方向的垂直方向，每个电阻器 传感器具有水平电阻分量R1和垂直电阻分量Rt。 当将施加在基板上的应力所提供的水平电阻分量R1的压阻系数pil与施加到水平电阻分量R1的比率相加到垂直电阻分量Rt的压阻系数凹坑时， 应力被施加到垂直电阻分量Rt，即pil：pit = -n：1（n：整数），垂直电阻分量Rt与水平电阻分量R1的电阻值比基本上等于 压阻系数pil到坑。

    Thermal type flow rate measuring apparatus
    38.
    发明授权
    Thermal type flow rate measuring apparatus 有权

    公开(公告)号：US07104126B2

    公开(公告)日：2006-09-12

    申请号：US11187823

    申请日：2005-07-25

    申请人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

    发明人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692 ,  G01F1/698 ,  G01F1/699

    摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.

    Heating resistance flow rate measuring apparatus
    39.
    发明申请
    Heating resistance flow rate measuring apparatus 失效
    耐热流量测量装置

    公开(公告)号：US20060070436A1

    公开(公告)日：2006-04-06

    申请号：US11283778

    申请日：2005-11-22

    申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

    发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845 ,  F02D41/187 ,  G01F1/692 ,  G01F1/696 ,  G01F1/699

    摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.

    摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。