公开(公告)号：US10302831B2

公开(公告)日：2019-05-28

申请号：US16163194

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Shaun Ogden ,  R. Stewart Nielson ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B5/04 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) 10 can include a reflective layer 15 sandwiched on each side by a pair of transparent layers (11-12 and 13-14). An index of refraction of each outer transparent layer 11 or 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 or 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same, material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP.

公开(公告)号：US10268046B2

公开(公告)日：2019-04-23

申请号：US15357356

申请日：2016-11-21

Applicant: Moxtek, Inc.

Inventor： Austin Huang ,  Dean Probst ,  Bin Wang ,  Hua Li

IPC: G02B5/04 ,  G02B27/28 ,  G02B5/30 ,  G02F1/1335

Abstract: Cube polarizers can be designed for substantially equal optical path lengths of a reflected beam and a transmitted beam. For example, d11 of FIG. 1 can define a distance between a plane (face plane2) of the outer face (outer face2) of a second prism 16 and the first edge (first edge1) of the first prism, and d11 can be less than 400 micrometers. As another example, an optical path length differential between a transmitted beam and a reflected beam (|OPLT−OPLR|) can be

公开(公告)号：US10234613B2

公开(公告)日：2019-03-19

申请号：US15631164

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： Ted Wangensteen ,  Bin Wang ,  Matt George ,  Paul Steven Mills ,  Arash Farhang

IPC: G02B5/30 ,  G02B27/00

Abstract: An embedded, inverse wire-grid polarizer (WGP) includes ribs 13 located over a surface of a transparent substrate 11, gaps 16 between the ribs 13, and a fill-layer 15 substantially filling the gaps 16. The fill-layer has a relatively high index of refraction, such as greater than 1.4. At a wavelength of light incident upon the WGP, E∥ transmission can be greater than E⊥ transmission. E∥ is a polarization of light with an electric field oscillation parallel to a length L of the ribs, and E⊥ is a polarization of light with an electric field oscillation perpendicular to a length L of the ribs. This embedded, inverse WGP is especially useful for polarizing, with high WGP performance, small wavelength (high-energy) regions of the electromagnetic spectrum (e.g. UV) which are difficult to polarize with conventional WGPs (E⊥ transmission>E∥ transmission).

公开(公告)号：US20190049644A1

公开(公告)日：2019-02-14

申请号：US16163111

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Matt Free ,  Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.

公开(公告)号：US20180224590A1

公开(公告)日：2018-08-09

申请号：US15948770

申请日：2018-04-09

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B5/00 ,  G02B5/1857 ,  G02B6/136 ,  G02B17/00 ,  G02B26/00

Abstract: The wire grid polarizer (WGP) comprises an array of parallel, elongated nanostructures located over a surface of a transparent substrate and a plurality of spaces, including a space between adjacent nanostructures. Each of the nanostructures can include (1) a plurality of parallel, elongated wires located on the substrate, including an inner-pair located between an outer-pair; (2) lateral-gaps between each wire of the outer-pair and an adjacent wire of the inner-pair; (3) and a center-gap between the two wires of the inner-pair.

公开(公告)号：US09348076B2

公开(公告)日：2016-05-24

申请号：US14470566

申请日：2014-08-27

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Ted Wangensteen ,  Rumyana Petrova ,  Mike Black ,  Steven Marks ,  Dean Probst

IPC: G02B5/30 ,  G02B1/08 ,  G02B1/12 ,  C23F17/00

CPC classification number: G02B5/3058 ,  C23F17/00 ,  G02B1/08 ,  G02B1/12

Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.

Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。

公开(公告)号：US20140313571A1

公开(公告)日：2014-10-23

申请号：US14198335

申请日：2014-03-05

Applicant: Moxtek, Inc.

Inventor： Eric Gardner ,  Bin Wang ,  Mark Davis ,  John D. Dredge, JR.

IPC: G02B5/30

CPC classification number: G02B5/3075 ,  G02B5/3058 ,  G02B5/3091

Abstract: An inorganic, dielectric grid polarizer device includes a stack of film layers disposed over a substrate. Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer with an array of parallel ribs having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.

Abstract translation: 无机介电栅极偏振器装置包括设置在基板上方的一层薄膜层。 每个膜层由无机和电介质的材料形成。 相邻的膜层各自具有不同的折射率。 至少一个膜层是不连续的，以形成具有周期小于400nm的平行肋排列的双折射层。 与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。