Micromachined field asymmetric ion mobility filter and detection system

    公开(公告)号:US07030372B2

    公开(公告)日:2006-04-18

    申请号:US10866645

    申请日:2004-06-10

    IPC分类号: H01J49/40

    CPC分类号: G01N27/624

    摘要: A micromechanical field asymmetric ion mobility filter for a detection system includes a pair of spaced substrates defining between them a flow path between a sample inlet and an outlet; an ion filter disposed in the path and including a pair of spaced filter electrodes, one electrode associated with each substrate; and an electrical controller for applying a bias voltage and an asymmetric periodic voltage across the ion filter electrodes for controlling the paths of ions through the filter.