Roll-to-roll glass material attributes and fingerprint
    32.
    发明授权
    Roll-to-roll glass material attributes and fingerprint 有权
    卷对卷玻璃材质属性和指纹

    公开(公告)号:US08062733B2

    公开(公告)日:2011-11-22

    申请号:US12466939

    申请日:2009-05-15

    IPC分类号: C03C3/04

    摘要: A high-silica glass sheet has an average thickness of less than 150 microns and an average surface roughness over one or both of its two major surfaces of less than 1 nm. The glass sheet is formed using a roll-to-roll glass soot deposition and sintering process. The glass sheet may comprise a plurality of substantially parallel surface protrusions, which are visible only when a major surface of the glass sheet is viewed at an angle sufficiently removed from normal incidence.

    摘要翻译: 高二氧化硅玻璃板的平均厚度小于150微米,其两个主表面的一个或两个上的平均表面粗糙度小于1nm。 使用辊对辊玻璃烟灰沉积和烧结工艺形成玻璃板。 玻璃板可以包括多个基本上平行的表面突起,只有当玻璃板的主表面以从正常入射角度被充分去除的角度观察时才可见。

    IMAGE MASK ASSEMBLY FOR PHOTOLITHOGRAPHY
    33.
    发明申请
    IMAGE MASK ASSEMBLY FOR PHOTOLITHOGRAPHY 审中-公开
    图像掩模组件用于光刻技术

    公开(公告)号:US20100124709A1

    公开(公告)日:2010-05-20

    申请号:US12274832

    申请日:2008-11-20

    IPC分类号: G03F1/00

    CPC分类号: G03F1/64 G03F1/60 G03F1/62

    摘要: An image mask assembly for photolithography. The image mask assembly includes an image mask, a synthetic fused silica pellicle for protecting the image mask, and a frame holding the image mask and pellicle. The image mask includes a synthetic fused silica sheet comprising at least one layer and having a pattern written on a surface of the fused silica sheet. Methods of making the image mask and synthetic fused silica pellicle are also provided.

    摘要翻译: 一种用于光刻的图像掩模组件。 图像掩模组件包括图像掩模,用于保护图像掩模的合成熔融二氧化硅防护薄膜和保持图像掩模和防护薄膜的框架。 图像掩模包括合成熔融石英片,其包含至少一层并且具有写在熔融石英片表面上的图案。 还提供了制作图像掩模和合成熔融石英薄膜的方法。

    Process and apparatus for making glass sheet
    34.
    发明申请
    Process and apparatus for making glass sheet 有权
    制造玻璃板的方法和装置

    公开(公告)号:US20080280057A1

    公开(公告)日:2008-11-13

    申请号:US11800585

    申请日:2007-05-07

    IPC分类号: C23C4/04

    摘要: An apparatus and process for making glass soot sheet and sintered glass sheet. Glass soot particles are deposited on a curved deposition surface of a rotating drum to form a soot sheet. The soot sheet is then released from the deposition surface. The soot sheet can be sintered into a consolidated glass. The soot sheet and the sintered glass can be sufficiently long and flexible to be reeled into a roll.

    摘要翻译: 制造玻璃烟灰片和烧结玻璃板的设备和方法。 玻璃烟灰颗粒沉积在旋转鼓的弯曲沉积表面上以形成烟炱片。 然后将烟灰片从沉积表面释放。 烟炱片可以烧结成固结的玻璃。 烟炱纸和烧结玻璃可以足够长并且柔性以卷成卷。