BLANK MADE OF TITANIUM-DOPED SILICA GLASS AND METHOD FOR THE PRODUCTION THEREOF
    3.
    发明申请
    BLANK MADE OF TITANIUM-DOPED SILICA GLASS AND METHOD FOR THE PRODUCTION THEREOF 有权
    钛白粉玻璃的制造方法及其生产方法

    公开(公告)号:US20150376048A1

    公开(公告)日:2015-12-31

    申请号:US14748344

    申请日:2015-06-24

    IPC分类号: C03B23/04 C03C3/06 C03B19/06

    摘要: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

    摘要翻译: 提供了一种用于EUV光刻的用于镜面基板的掺钛石英玻璃的空白件。 坯料包括具有反射膜并具有光学用途区域(CA)的表面部分,在该区域上的热膨胀系数(CTE)在坯料的厚度上平均的二维不均匀性(dCTE)分布分布平均 。 小于5ppb / K的最大不均匀性(dCTEmax)定义为CTE最大值和CTE最小值之间的差。 dCTEmax至少为0.5 ppb / K。 CA形成具有质心的非圆形区域。 dCTE分布轮廓不是旋转对称的,并且在CA上定义,使得被归一化为单位长度并延伸穿过该区域的质心的直线剖面产生了形成带宽小于的曲线的dCTE曲线族 0.5×dCTEmax。

    Process and apparatus for making glass sheet
    5.
    发明申请
    Process and apparatus for making glass sheet 有权
    制造玻璃板的方法和装置

    公开(公告)号:US20080280057A1

    公开(公告)日:2008-11-13

    申请号:US11800585

    申请日:2007-05-07

    IPC分类号: C23C4/04

    摘要: An apparatus and process for making glass soot sheet and sintered glass sheet. Glass soot particles are deposited on a curved deposition surface of a rotating drum to form a soot sheet. The soot sheet is then released from the deposition surface. The soot sheet can be sintered into a consolidated glass. The soot sheet and the sintered glass can be sufficiently long and flexible to be reeled into a roll.

    摘要翻译: 制造玻璃烟灰片和烧结玻璃板的设备和方法。 玻璃烟灰颗粒沉积在旋转鼓的弯曲沉积表面上以形成烟炱片。 然后将烟灰片从沉积表面释放。 烟炱片可以烧结成固结的玻璃。 烟炱纸和烧结玻璃可以足够长并且柔性以卷成卷。

    OPTICAL FIBER
    8.
    发明申请
    OPTICAL FIBER 有权
    光纤

    公开(公告)号:US20160147010A1

    公开(公告)日:2016-05-26

    申请号:US14943190

    申请日:2015-11-17

    IPC分类号: G02B6/02

    摘要: An optical fiber containing an alkali metal and capable of reducing Rayleigh scattering loss is provided. An optical fiber has a core and a cladding made of silica glass and enclosing the core. The cladding contains fluorine and has a refractive index lower than the refractive index of the core. The core contains first group dopants selected from the group of Na element, K element, or a compound thereof at an average concentration of 0.2 ppm or more and 10 ppm or less. The core also contains second group dopants for reducing the viscosity of silica glass and having a diffusion coefficient of 1×10−12 cm2/s or more and smaller than the diffusion coefficient of the first group dopants, by an average concentration of 0.2 ppm or more at a temperature of 2000° C. to 2300° C.

    摘要翻译: 提供含有碱金属并能够降低瑞利散射损失的光纤。 光纤具有由石英玻璃制成的芯和包层,并且包围芯。 包层含氟,折射率低于芯的折射率。 核心包含平均浓度为0.2ppm以上且10ppm以下的选自Na元素,K元素或其化合物的第一族掺杂剂。 该芯还含有第二组掺杂剂,用于降低石英玻璃的粘度,并且扩散系数为1×10-12cm2 / s以上且小于第一组掺杂剂的扩散系数,平均浓度为0.2ppm或 更高温度在2000°C至2300°C

    Method for forming fused silica glass using multiple burners
    10.
    发明授权
    Method for forming fused silica glass using multiple burners 有权
    使用多个燃烧器形成熔融石英玻璃的方法

    公开(公告)号:US08230701B2

    公开(公告)日:2012-07-31

    申请号:US12154908

    申请日:2008-05-28

    IPC分类号: C03B37/018

    摘要: A method for forming a silica glass blank includes generating soot using an array of soot producing burners, directing the soot along a first direction onto a bait, collecting the soot on the bait, imparting relative oscillatory motion having a repeat period between the array of soot producing burners and the bait along a second direction orthogonal to the first direction while collecting the soot, and offsetting the relative oscillatory motion by a selected distance along the second direction after each repeat period.

    摘要翻译: 一种用于形成二氧化硅玻璃坯料的方法包括使用产生烟炱的燃烧器阵列产生烟灰,将烟尘沿第一方向引导到诱饵上,将烟炱收集在诱饵上,赋予在烟炱阵列之间具有重复周期的相对振荡运动 在收集烟灰的同时沿着与第一方向正交的第二方向产生燃烧器和诱饵,并且在每个重复周期之后沿着第二方向将相对振荡运动偏移选定的距离。