摘要:
A glass composite for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass composite includes a first silica-titania glass section. The glass composite further includes a second doped silica-titania glass section mechanically bonded to a surface of the first silica-titania glass section, wherein the second doped silica-titania glass section has a thickness of greater than about 1.0 inch.
摘要:
An optical fiber containing an alkali metal and capable of reducing Rayleigh scattering loss is provided. An optical fiber has a core and a cladding made of silica glass and enclosing the core. The cladding contains fluorine and has a refractive index lower than the refractive index of the core. The core contains first group dopants selected from the group of Na element, K element, or a compound thereof at an average concentration of 0.2 ppm or more and 10 ppm or less. The core also contains second group dopants for reducing the viscosity of silica glass and having a diffusion coefficient of 1×10−12 cm2/s or more and smaller than the diffusion coefficient of the first group dopants, by an average concentration of 0.2 ppm or more at a temperature of 2000° C. to 2300° C.
摘要:
A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.
摘要:
The invention concerns a method for making an optical fiber (18) including the following steps: producing a preform (10) containing nanoparticles provided with an active element including at least one recess (14) proximate at least part of the nanoparticles; fiber drawing of the preform (10) by introducing a non-oxidizing gas in the recess (14), thereby limiting the risks of oxidizing the nanoparticles of the preform (10). The preform (10) designed to the manufacture of an optical fiber (18) by the inventive method comprises nanoparticles provided with an active element in a doped zone (12) and at least one recess (14) proximate the doped zone (12).
摘要:
An apparatus and process for making glass soot sheet and sintered glass sheet. Glass soot particles are deposited on a curved deposition surface of a rotating drum to form a soot sheet. The soot sheet is then released from the deposition surface. The soot sheet can be sintered into a consolidated glass. The soot sheet and the sintered glass can be sufficiently long and flexible to be reeled into a roll.
摘要:
The invention is directed to the production of optical fibers from optical fiber preforms using flow physics. The present methods provide for the nulldrawingnull of an optical fiber preform using focusing of the preform by a surrounding fluid, e.g. a heated gas.
摘要:
The invention relates to a method for producing a doped SiO2 slurry in which an SiO2 suspension is brought into interaction with at least one doping solution, wherein the SiO2 suspension and/or the doping solution act on one another in the form of an atomized spray, the average droplet diameter of which is in the range between 10 μm and 100 μm. The invention further relates to the use of an SiO2 slurry doped by the atomized spray method for the production of doped quartz glass, particularly for the production of laser-active quartz glass.
摘要:
An optical fiber containing an alkali metal and capable of reducing Rayleigh scattering loss is provided. An optical fiber has a core and a cladding made of silica glass and enclosing the core. The cladding contains fluorine and has a refractive index lower than the refractive index of the core. The core contains first group dopants selected from the group of Na element, K element, or a compound thereof at an average concentration of 0.2 ppm or more and 10 ppm or less. The core also contains second group dopants for reducing the viscosity of silica glass and having a diffusion coefficient of 1×10−12 cm2/s or more and smaller than the diffusion coefficient of the first group dopants, by an average concentration of 0.2 ppm or more at a temperature of 2000° C. to 2300° C.
摘要:
A method and apparatus for making a substantially void-free preform for a microstructured optical fiber using a one-step process is provided. A preform is prepared from specialty glasses using a direct extrusion method. A die for use with the direct extrusion method is also provided, and a method for drawing the preform into a HC-PBG fiber for use in transmitting infra-red wavelength light is also provided. The preform comprises an outer jacket made of solid glass, a cladding having a plurality of air holes arranged in a desired pattern within the jacket, and a core which is hollow.
摘要:
A method for forming a silica glass blank includes generating soot using an array of soot producing burners, directing the soot along a first direction onto a bait, collecting the soot on the bait, imparting relative oscillatory motion having a repeat period between the array of soot producing burners and the bait along a second direction orthogonal to the first direction while collecting the soot, and offsetting the relative oscillatory motion by a selected distance along the second direction after each repeat period.