公开(公告)号：US06972406B2

公开(公告)日：2005-12-06

申请号：US10503516

申请日：2003-01-27

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/10 ,  H01J49/00

CPC classification number: H01J49/147 ,  H01J49/0018 ,  H01J49/08 ,  H01J49/4215

Abstract: A method of fabricating miniature quadrupole electrostatic mass filter has been previously described. The electrodes are metallised cylinders, mounted in grooves etched in oxidised silicon substrates, which are held apart at the correct spacing by cylindrical spacer rods. This invention concerns an ion source mounted on extensions of the spacer rods, which project beyond the mass filter. The ion source consists of a cold-cathode electron emitter, which emits electrons with energies sufficient to cause impact ionisation, and electrostatic optics suitable for coupling the ion flux into the mass filter. Methods of constructing a single self-aligned electron source and a similar dual source are described. Arrangements for mounting the electron source and the ion coupling lens so that the electron and ion beams travel at right angles to one another for efficient separation are described. A method of fabricating a self-aligned one-dimensional einzel electrostatic lens from metallised cylinders mounted in the silicon substrates using etched grooves is described. A method of fabricating a-self-aligned two-dimensional einzel lens from metal plates is also described.

Abstract translation: 以前已经描述了制造微型四极静电质量过滤器的方法。 电极是金属化的气缸，安装在蚀刻在氧化硅衬底中的槽中，它们通过圆柱形间隔棒以正确的间隔分开。 本发明涉及一种安装在间隔棒的延伸部上的离子源，其突出超过质量过滤器。 离子源由冷阴极电子发射器组成，其发射能量足以引起冲击电离的电子，以及适于将离子通量耦合到质量过滤器中的静电光学器件。 描述了构建单个自对准电子源和类似双源的方法。 描述了用于安装电子源和离子耦合透镜以使电子和离子束彼此成直角行进以进行有效分离的布置。 描述了使用蚀刻槽从安装在硅衬底中的金属化气缸制造自对准的一维立体静电透镜的方法。 还描述了从金属板制造自对准二维单面透镜的方法。

公开(公告)号：US20050227508A1

公开(公告)日：2005-10-13

申请号：US10503536

申请日：2003-01-27

Applicant: Richard Syms

Inventor： Richard Syms

IPC: B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  H05K1/00

CPC classification number: H01R43/16 ,  H01L2224/81141 ,  H01R13/035 ,  Y10T29/4921

Abstract: A miniature, multi-element electrical connector fabricated using micro-electro-mechanical systems technology is described. Shaped elastic cantilever elements (12) are formed on the female part (11) by deposition of conducting material on a surface that has been previously shaped to define a localised contact area and a sloped entrance face. The cantilevers (12) are then undercut. A similar process is used to construct a sloping face on the male part (10) for easy insertion. An etching process is used to fabricate an interlocking alignment system (20, 21, 22) on the two parts. Erosion of a convex corner is used to form a tapered entrance (22) to this alignment system.

Abstract translation: 描述了使用微机电系统技术制造的微型多元件电连接器。 成形的弹性悬臂元件（12）通过在预先成形以限定局部接触区域和倾斜入口面的表面上沉积导电材料而在阴部件（11）上形成。 然后将悬臂（12）底切。 类似的方法用于在阳部件（10）上构造倾斜面以便于插入。 蚀刻工艺用于制造两部分上的互锁对准系统（20,21,22）。 使用凸角的侵蚀来形成到该对准系统的锥形入口（22）。

公开(公告)号：US20050167508A1

公开(公告)日：2005-08-04

申请号：US10516811

申请日：2003-06-02

Applicant: Richard Syms ,  Andrew Holmes

Inventor： Richard Syms ,  Andrew Holmes

IPC: G02B6/35 ,  G06K7/10

CPC classification number: G06K7/10653 ,  G02B6/3502 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/358 ,  G02B6/3584

Abstract: A microengineered optical scanner based on a moving cantilevered dielectric waveguide is described. The waveguide is excited into resonant mechanical motion by a drive located at its root. Stress sensors detect the bending of the waveguide, allowing closed loop control of the motion. A moving image of the light emitted from the moving tip of the waveguide is created by a lens. The moving image acts as a scan line. Light back-scattered from a rough surface placed at the image plane is collected back into the waveguide by confocal imaging. The light collected in the cladding of the waveguide has higher numerical aperture than the light collected in the core. The cladding light is detected by a mode-stripping detector. Techniques for combining a cantilevered waveguide, a drive, motion sensors and a mode-stripping detector using microelectromechanical systems (MEMS) technology are described.

Abstract translation: 描述了一种基于移动悬臂式电介质波导的微型工程光学扫描仪。 波导通过位于其根部的驱动器被激发成共振机械运动。 应力传感器检测波导的弯曲，允许闭环控制运动。 通过透镜产生从波导的移动末端发射的光的运动图像。 运动图像作为扫描线。 从放置在图像平面处的粗糙表面反向散射的光通过共聚焦成像被收集回到波导中。 收集在波导的包层中的光比在芯中收集的光具有更高的数值孔径。 包层光由模式剥离检测器检测。 描述了使用微机电系统（MEMS）技术组合悬臂波导，驱动器，运动传感器和模式剥离检测器的技术。

公开(公告)号：US06924158B2

公开(公告)日：2005-08-02

申请号：US10242908

申请日：2002-09-13

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01L21/00

CPC classification number: H01J1/304 ,  H01J3/022 ,  H01J9/025

Abstract: A method of forming vertical knife-edge cold-cathode field emission electron sources with self-aligned gate electrodes and sub-micron electrode separations. The method exploits the enhancement of ion-beam erosion rates obtained in metals at oblique ion incidence, which allows the preferential removal of a metal layer at the convex edge of a mesa 2 to create a well-defined separation between the horizontal and vertical surfaces of the metal. The horizontal surface may be used as the gate and the vertical surface as the cathode in a vacuum triode structure. Electrical isolation is obtained by forming the mesa 2 in an insulating layer or substrate 1. Isolation may be improved by removing the insulating material in the vicinity of the metal edges. Field-induced electron emission from the cathode may be obtained at low voltage based on the enhancement of the electric field at the sharp tip of the cathode.

Abstract translation: 形成具有自对准栅极和亚微米电极间隔的垂直刀刃冷阴极场发射电子源的方法。 该方法利用在倾斜离子入射下在金属中获得的离子束侵蚀速率的增强，这允许在台面2的凸边缘处优先移除金属层，以在水平和垂直表面之间形成明确的分隔 金属。 水平表面可以用作真空三极管结构中的栅极和垂直表面作为阴极。 通过在绝缘层或基板1中形成台面2而获得电隔离。 可以通过去除金属边缘附近的绝缘材料来改善隔离。 基于阴极尖端电场的增强，可以在低电压下获得来自阴极的场致电子发射。