CAPACITIVE ACCELEROMETER
    31.
    发明申请
    CAPACITIVE ACCELEROMETER 有权
    电容式加速度计

    公开(公告)号:US20100050771A1

    公开(公告)日:2010-03-04

    申请号:US12517068

    申请日:2007-12-05

    IPC分类号: G01P15/125

    CPC分类号: G01P15/125 G01P15/0802

    摘要: A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.

    摘要翻译: 常规的电容加速度计在减小感测电极和参考电极之间的距离方面具有局限性,并且需要一种复杂的过程和用于校正由过程误差引起的间隙差异的单独方法。 然而,本发明的电容加速度计具有高的灵敏度,可以通过在参考电极和感测电极之间保持非常窄的距离来简单地制造,并且可以使得不需要通过去除或大幅度地减少功能性来单独校正每个制造的加速度计 差异由于过程错误。