DEPOSITION DEVICE, AND COLLECTION DEVICE
    31.
    发明申请
    DEPOSITION DEVICE, AND COLLECTION DEVICE 有权
    沉积装置和收集装置

    公开(公告)号:US20140299058A1

    公开(公告)日:2014-10-09

    申请号:US14298844

    申请日:2014-06-06

    Abstract: A Film (7) is provided on at least a part of a surface of each of a vapor deposition preventing plate (3) and a shutter (4) of a vacuum chamber (5) on which surface vapor deposition particles are vapor-deposited, the film (7) being provided so as to be peeled off from the each of the vapor deposition preventing plate (3) and the shutter (4), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film (7) is made.

    Abstract translation: 在气相沉积颗粒被蒸镀的真空室(5)的气相沉积防止板(3)和快门(4)的每一个的表面的至少一部分上提供膜(7) 薄膜(7)设置成从每个防蒸镀板(3)和活门(4)上剥离,并且该薄膜由不同于熔点, 升华点,在给定溶剂中的溶解度,微生物生物降解性和由形成在膜(7)上的气相沉积膜的材料的光可降解性)。

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