Surface inspection tool
    31.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号:US06624884B1

    公开(公告)日:2003-09-23

    申请号:US08840351

    申请日:1997-04-28

    IPC分类号: G01N2188

    CPC分类号: G01N21/88

    摘要: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.

    摘要翻译: 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中,从表面以从垂直方向稍微偏离的角度反射的光通过远心透镜被路由到检测器,该检测器将反射光束的强度转换为模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 中值滤波器和导数分析可以应用于像素数据,以检测指示缺陷的偏差。 可选的校准系统周期性地将扫描光束反射回检测器以形成用于绝对反射率测量的参考信号。

    Surface inspection tool
    32.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号:US5917589A

    公开(公告)日:1999-06-29

    申请号:US840339

    申请日:1997-04-28

    IPC分类号: G01N21/94 G01N21/88

    CPC分类号: G01N21/94

    摘要: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects.

    摘要翻译: 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器,其将盘移动通过激光扫描线(即垂直于扫描线),以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器,其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时,为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域,同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据,以检测指示缺陷的偏差。

    Surface inspection tool
    33.
    发明授权
    Surface inspection tool 失效
    表面检测工具

    公开(公告)号:US5867261A

    公开(公告)日:1999-02-02

    申请号:US840352

    申请日:1997-04-28

    IPC分类号: G01N21/95 G01N21/88

    CPC分类号: G01N21/9506

    摘要: A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration mirror is taught which is positioned to reflect substantially all of the incident beam during a segment of the scan line as the reflected calibration beam which is converted to an analog signal, sampled and digitized similarly to the reflected beam from the surface being inspected. By comparing the intensity of the calibration beam to the reflected beam the reflectivity of the surface can be measured.

    摘要翻译: 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器,其将盘移动通过激光扫描线(即垂直于扫描线),以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器,其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时,为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域,同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据,以检测指示缺陷的偏差。 可选的校准反射镜被定位成在扫描线的一段期间基本上反射所有入射光束,作为被反射的校准光束,该反射校准光束被转换成模拟信号,与来自被检测表面的反射光束类似地进行采样和数字化 。 通过比较校准光束与反射光束的强度,可以测量表面的反射率。

    Multiple data layer optical disk drive system with fixed aberration
correction and optimum interlayer spacing
    34.
    发明授权
    Multiple data layer optical disk drive system with fixed aberration correction and optimum interlayer spacing 失效
    具有固定像差校正和最佳层间距的多数据层光盘驱动系统

    公开(公告)号:US5625609A

    公开(公告)日:1997-04-29

    申请号:US403166

    申请日:1995-03-13

    摘要: A multiple data layer optical disk drive system has fixed aberration correction and uses a disk with maximum interlayer spacing for reduced interlayer crosstalk. In one embodiment the multiple data layer disk has a substrate with a thickness that is reduced by approximately one-half the thickness of the spacer layer that separates the first and last data layers. The disk is designed to operate with a lens that has spherical aberration correction to compensate for the thickness of a conventional single data layer disk. This allows the disk drive to handle multiple data layer disks as well as to be backward compatible and thus handle conventional single data layer disks. The thickness of the substrate material plus one-half the thickness of the spacer layer material (which may have a different index of refraction than the substrate material) is equivalent, for purposes of spherical aberration correction, to the thickness of the substrate material used in the conventional single data layer disk. The focused spot with minimum spherical aberration is thus located at the middle of the spacer layer rather than on the first data layer. The spacer layer thickness is selected so that when the focused spot is located on either the first or last data layer there is some deliberately designed spherical aberration, although an amount that is acceptable. As a result the thickness of the spacer layer can be significantly increased to thereby reduce interlayer crosstalk. In another embodiment that substrate thickness and spacer layer thickness are selected and then the lens is corrected for spherical aberration corresponding to the thickness of substrate material plus one-half the thickness of spacer layer material.

    摘要翻译: 多数据层光盘驱动系统具有固定的像差校正,并且使用具有最大层间距的盘来减少层间串扰。 在一个实施例中,多数据层盘具有基板,其厚度减小了分隔第一和最后数据层的间隔层的厚度的大约二分之一。 该盘被设计成与具有球面像差校正的透镜一起工作以补偿常规单个数据层盘的厚度。 这允许磁盘驱动器处理多个数据层磁盘以及向后兼容,从而处理传统的单个数据层磁盘。 衬底材料的厚度加上间隔层材料的厚度的一半(与衬底材料相比可能具有不同的折射率)相当于用于球面像差校正的基底材料的厚度 传统的单数据层磁盘。 因此,具有最小球面像差的聚焦点位于间隔层的中间而不是位于第一数据层上。 选择间隔层厚度,使得当聚焦点位于第一或最后数据层上时,存在一些故意设计的球面像差,尽管可接受的量。 结果,间隔层的厚度可以显着增加,从而减少层间串扰。 在另一个实施例中,选择衬底厚度和间隔层厚度,然后针对与衬底材料的厚度加上间隔层材料的厚度的一半的球面像差校正透镜。