公开(公告)号：US11588140B2

公开(公告)日：2023-02-21

申请号：US16245554

申请日：2019-01-11

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Matthew King ,  Benjamin Swedlove ,  Tomasz Trojacki

IPC: C23C16/455 ,  C23C16/44 ,  H01L51/56 ,  H01L51/00

Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.

公开(公告)号：US11552159B2

公开(公告)日：2023-01-10

申请号：US16431813

申请日：2019-06-05

Applicant: Universal Display Corporation

Inventor： Xin Xu ,  Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Jason Paynter ,  Julia J. Brown

IPC: H01L27/32 ,  H01L51/00 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions of the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.

公开(公告)号：US10916704B2

公开(公告)日：2021-02-09

申请号：US16292422

申请日：2019-03-05

Applicant: Universal Display Corporation

Inventor： Michael Hack ,  William E. Quinn ,  Gregory McGraw ,  William T. Mayweather, III ,  Julia J. Brown

IPC: H01L51/00 ,  C23C16/30 ,  H01L51/50 ,  H01L51/52

Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

公开(公告)号：US10756141B2

公开(公告)日：2020-08-25

申请号：US15658752

申请日：2017-07-25

Applicant: Universal Display Corporation

Inventor： Michael Hack ,  Michael Stuart Weaver ,  William E. Quinn ,  Julia J. Brown

IPC: H01L27/32 ,  H01L51/52 ,  H01L51/56

Abstract: A full-color display and techniques for fabrication thereof are provided. The display includes first and second continuous independently addressable organic emissive layers disposed over a single substrate or between two substrates or portions of a flexible substrate. The use of continuous emissive layers of a limited number of colors allows for a relatively high resolution display to be achieved without the use of fine metal masks or similar components.

公开(公告)号：US10704144B2

公开(公告)日：2020-07-07

申请号：US15290101

申请日：2016-10-11

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Siddharth Harikrishna Mohan ,  Matthew King

IPC: C23C16/44 ,  C23C16/455 ,  C23C14/12 ,  H01L51/00 ,  C23C14/24 ,  B41J2/00

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US10654272B2

公开(公告)日：2020-05-19

申请号：US16243393

申请日：2019-01-09

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Matthew King ,  William E. Quinn

IPC: B41J2/14 ,  B41J2/16 ,  H01L51/00 ,  B05B1/16 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.

公开(公告)号：US20190115535A1

公开(公告)日：2019-04-18

申请号：US16202579

申请日：2018-11-28

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H01L51/00 ,  H01L51/56 ,  B41M3/00 ,  B41J2/14

CPC classification number: H01L51/0003 ,  B41J2/14 ,  B41M3/006 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54 ,  H01L51/0013 ,  H01L51/5004 ,  H01L51/56 ,  H01L2251/552

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US10128468B2

公开(公告)日：2018-11-13

申请号：US15441331

申请日：2017-02-24

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Matthew King ,  Elliot H. Hartford, Jr.

IPC: H01L51/00 ,  H01L51/56 ,  B05B15/02 ,  C23C14/12 ,  C23C14/22 ,  B05B15/555

CPC classification number: H01L51/56 ,  B05B12/18 ,  B05B15/555 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14475 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  C23C14/24 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.

公开(公告)号：US20170117503A1

公开(公告)日：2017-04-27

申请号：US15331065

申请日：2016-10-21

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  James Robert Kantor

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5253 ,  H01L2251/303

Abstract: A buffer layer is provided that can be fabricated over an OLED without the use of any oxygen-containing gas. The buffer layer reduces the possibility of damage to the underlying OLED due to use of oxygen-containing materials during deposition of subsequent barrier layers, and thereby allows for deposition of barrier layers without reducing the flexibility of the device.

公开(公告)号：US20160254487A1

公开(公告)日：2016-09-01

申请号：US15031088

申请日：2014-10-24

Applicant: UNIVERSAL DISPLAY CORPORATION ,  THE TRUSTEES OF PRINCETON UNIVERSITY

Inventor： Siddharth Harikrishna Mohan ,  Ruiqing Ma ,  William E. Quinn ,  Bhadrinarayana Lalgudi Visweswaran ,  Sigurd Wagner

IPC: H01L51/52 ,  B32B15/04 ,  B32B7/02 ,  H01L51/00

CPC classification number: H01L51/5253 ,  B32B7/02 ,  B32B15/04 ,  B32B2307/726 ,  C23C14/06 ,  C23C16/30 ,  C23C28/02 ,  C23C28/04 ,  C23C28/30 ,  C23C30/00 ,  H01L51/0034 ,  H01L51/0094 ,  H01L2251/301 ,  H01L2251/303 ,  H01L2251/558

Abstract: Disclosed is a novel moisture permeation barrier system for substrates and devices and method of making the same. The permeation barrier system includes two barrier layers. The first barrier layer is disposed over the substrate or an electronic device. The second barrier layer is then disposed over the first barrier layer. This system has relatively low permeability to moisture and is flexible. It may cover particles and provide moisture protection with a relatively small width edge seal.

Abstract translation: 公开了一种用于基板和装置的新型水分渗透阻挡系统及其制造方法。 渗透屏障系统包括两个阻挡层。 第一阻挡层设置在基板或电子装置上。 然后将第二阻挡层设置在第一阻挡层上。 该系统具有较低的水分渗透性和柔韧性。 它可以覆盖颗粒并提供具有较小宽度边缘密封的防潮保护。