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公开(公告)号:US20110278586A1
公开(公告)日:2011-11-17
申请号:US13124873
申请日:2009-10-16
申请人: Yuji Ando , Hironobu Miyamoto , Tatsuo Nakayama , Yasuhiro Okamoto , Takashi Inoue , Kazuki Ota
发明人: Yuji Ando , Hironobu Miyamoto , Tatsuo Nakayama , Yasuhiro Okamoto , Takashi Inoue , Kazuki Ota
IPC分类号: H01L29/20
CPC分类号: H01L29/7371 , H01L29/0649 , H01L29/0817 , H01L29/0821 , H01L29/2003 , H01L29/205 , H01L29/475 , H01L29/66318
摘要: A bipolar transistor is provided with an emitter layer, a base layer and a collector layer. The emitter layer is formed above a substrate and is an n-type conductive layer including a first nitride semiconductor. The base layer is formed on the emitter layer and is a p-type conductive including a second nitride semiconductor. The collector layer is formed on the base layer and includes a third nitride semiconductor. The collector layer, the base layer and the emitter layer are formed such that a crystal growth direction to the substrate surface is parallel to a substrate direction of [000-1]. The third nitride semiconductor contains InycAlxcGa1-xc-ycN (0•xc•1, 0•yc•1, 0
摘要翻译: 双极晶体管设置有发射极层,基极层和集电极层。 发射极层形成在衬底之上,并且是包括第一氮化物半导体的n型导电层。 基极层形成在发射极层上,是包含第二氮化物半导体的p型导体。 集电极层形成在基极层上并且包括第三氮化物半导体。 形成集电体层,基极层和发射极层,使得到基板表面的晶体生长方向平行于[000-1]的基板方向。 第三氮化物半导体含有InycAlxcGa1-xc-ycN(0·xc·1,0,0·yc·1,0,0cc·yc·1)。 第三氮化物半导体中的表面侧的a轴长度比基板侧的a轴长短。
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公开(公告)号:US20100276732A1
公开(公告)日:2010-11-04
申请号:US12810096
申请日:2008-12-25
申请人: Yuji Ando , Yasuhiro Okamoto , Kazuki Ota , Takashi Inoue , Tatsuo Nakayama , Hironobu Miyamoto
发明人: Yuji Ando , Yasuhiro Okamoto , Kazuki Ota , Takashi Inoue , Tatsuo Nakayama , Hironobu Miyamoto
IPC分类号: H01L29/78
CPC分类号: H01L29/66462 , H01L27/0605 , H01L29/0891 , H01L29/2003 , H01L29/4232 , H01L29/7781
摘要: A semiconductor device includes a lower barrier layer 12 composed of a layer of AlxGa1-xN (0≦x≦1) in a state of strain relaxation, and a channel layer 13, which is composed of a layer of InyGa1-yN (0≦y≦1) disposed on the lower barrier layer 12, has band gap that is smaller than band gap of the lower barrier layer 12, and exhibits compressive strain. A gate electrode 1G is formed over the channel layer 13 via an insulating film 15 and a source electrode 1S and a drain electrode 1D serving as ohmic electrodes are formed over the channel layer 13. The insulating film 15 is constituted of polycrystalline or amorphous member.
摘要翻译: 半导体器件包括在应变松弛的状态下由Al x Ga 1-x N(0& nlE; x≦̸ 1)层构成的下阻挡层12,以及由In y Ga 1-y N(0< nlE; 1)层组成的沟道层13。 y); 1)设置在下阻挡层12上,具有小于下阻挡层12的带隙的带隙,并且表现出压缩应变。 在沟道层13上经由绝缘膜15形成栅极电极1G,在沟道层13上形成有用作欧姆电极的源电极1S和漏电极1D。绝缘膜15由多晶或非晶构成。
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公开(公告)号:US20090230430A1
公开(公告)日:2009-09-17
申请号:US11921857
申请日:2006-06-12
申请人: Hironobu Miyamoto , Yuji Ando , Yasuhiro Okamoto , Tatsuo Nakayama , Takashi Inoue , Kazuki Ota , Aklo Wakejima , Kensuke Kasahara , Yasuhiro Murase , Kohji Matsunaga , Katsumi Yamanoguchi , Hidenori Shimawaki
发明人: Hironobu Miyamoto , Yuji Ando , Yasuhiro Okamoto , Tatsuo Nakayama , Takashi Inoue , Kazuki Ota , Aklo Wakejima , Kensuke Kasahara , Yasuhiro Murase , Kohji Matsunaga , Katsumi Yamanoguchi , Hidenori Shimawaki
IPC分类号: H01L29/78
CPC分类号: H01L29/404 , H01L29/7783 , H01L29/7787 , H01L29/802 , H01L29/812
摘要: A field effect transistor includes a layer structure made of compound semiconductor (111) provided on a semiconductor substrate (110) made of GaAs or InP, as an operation layer, and employs a first field plate electrode (116) and a second field plate electrode (118). The second field plate electrode includes a shielding part (119) located in the region between the first field plate electrode and a drain electrode (114), and serves to shield the first field plate electrode from the drain electrode. When, in the cross sectional view in the gate length direction, the length in the gate length direction of an overlap region, in which the second field plate electrode overlaps the upper part of a structure composed of the first field plate electrode and a gate electrode (113), is designated as Lol, and the gate length is Lg, the relation expressed as 0≦Lol/Lg≦1 holds.
摘要翻译: 场效应晶体管包括由设置在由GaAs或InP制成的半导体衬底(110)上的化合物半导体(111)作为操作层的层结构,并且采用第一场极板电极(116)和第二场极板电极 (118)。 第二场板电极包括位于第一场极板电极和漏电极(114)之间的区域中的屏蔽部分(119),用于屏蔽第一场极板电极与漏极电极。 当在栅极长度方向的截面图中,重叠区域的栅极长度方向上的长度,其中第二场极板电极与由第一场极板电极和栅电极构成的结构的上部重叠 (113)表示为Lol,栅极长度为Lg,表示为0 <= Lol / Lg <= 1的关系成立。
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公开(公告)号:US20090230429A1
公开(公告)日:2009-09-17
申请号:US11921854
申请日:2006-06-12
申请人: Hironobu Miyamoto , Yuji Ando , Yasuhiro Okamoto , Tasuo Nakayama , Takashi Inoue , Kazuki Ota , Akio Wakejima , Kensuke Kasahara , Yasuhiro Murase , Kohji Matsunaga , Katsumi Yamanoguchi , Hidenori Shimawaki
发明人: Hironobu Miyamoto , Yuji Ando , Yasuhiro Okamoto , Tasuo Nakayama , Takashi Inoue , Kazuki Ota , Akio Wakejima , Kensuke Kasahara , Yasuhiro Murase , Kohji Matsunaga , Katsumi Yamanoguchi , Hidenori Shimawaki
IPC分类号: H01L29/80
CPC分类号: H01L29/7787 , H01L29/2003 , H01L29/402 , H01L29/404 , H01L29/802 , H01L29/812
摘要: A field effect transistor (100) exhibiting good performance at high voltage operation and high frequency includes a first field plate electrode (116) and a second field plate electrode (118). The second field plate electrode includes a shielding part (119) located in the region between the first field plate electrode and a drain electrode (114), and serves to shield the first field plate electrode from the drain electrode. When in the cross sectional view in the gate length direction, the length in the gate length direction of an overlap region where the second field plate electrode (118) overlap the upper part of a structure including the first field plate electrode and a gate electrode (113) is designated as Lol, and the gate length is Lg, the relation expressed as 0≦Lol/Lg≦1 holds.
摘要翻译: 在高电压运行和高频下表现出良好性能的场效应晶体管(100)包括第一场极板电极(116)和第二场板电极(118)。 第二场板电极包括位于第一场极板电极和漏电极(114)之间的区域中的屏蔽部分(119),用于屏蔽第一场极板电极与漏极电极。 当在栅极长度方向的横截面视图中,第二场板电极(118)与包括第一场极板电极和栅电极的结构的上部重叠的重叠区域的栅极长度方向上的长度( 113)被指定为Lol,栅极长度为Lg,表示为0 <= Lol / Lg <= 1的关系成立。
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公开(公告)号:US20140084300A1
公开(公告)日:2014-03-27
申请号:US14117763
申请日:2012-05-15
申请人: Yasuhiro Okamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Kazuki Ota
发明人: Yasuhiro Okamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Kazuki Ota
IPC分类号: H01L29/778 , H01L29/20
CPC分类号: H01L29/7787 , H01L29/2003 , H01L29/201 , H01L29/205 , H01L29/4236 , H01L29/517 , H01L29/66462 , H01L29/7783 , H01L29/7786
摘要: A field effect transistor includes a substrate and a semiconductor layer provided on the substrate, wherein the semiconductor layer includes a lower barrier layer provided on the substrate, Ga-face grown, lattice relaxed, and having a composition In1-zAlzN (0≦z≦1), a channel layer having a composition of: AlxGa1-xN (0≦x≦1) or InyGa1-yN (0≦y≦1). Or GaN provided on and lattice-matched to the lower barrier layer, a source electrode and a drain electrode having ohmic contact to an upper part of the semiconductor layers, disposed spaced to each other, and a gate electrode arranged via a gate insulating film in a region lying between the source electrode and the drain electrode.
摘要翻译: 场效应晶体管包括衬底和设置在衬底上的半导体层,其中半导体层包括设置在衬底上的下阻挡层,生长Ga面,晶格弛豫并具有组成In 1-z Al z N(0&nl; z&nl E; 1),具有以下组成的沟道层:Al x Ga 1-x N(0&amp; nlE; x&nlE; 1)或In y Ga 1-y N(0&nlE; y&nlE; 1)。 或提供在栅极绝缘膜上并与栅极绝缘膜配置的栅电极,栅极配置在栅极绝缘膜上,栅电极配置在栅极绝缘膜上, 位于源电极和漏电极之间的区域。
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公开(公告)号:US08525229B2
公开(公告)日:2013-09-03
申请号:US12299542
申请日:2007-05-07
IPC分类号: H01L29/205 , H01L29/778
CPC分类号: H01L29/7787 , H01L29/2003 , H01L29/42316
摘要: A semiconductor device includes a channel layer, an electron-supplying layer provided on the channel layer, a cap layer provided on the electron-supplying layer and creating lattice match with the channel layer, and ohmic electrodes provided on the cap layer. The cap layer has a composition of (InyAl1-y)zGa1-zN (0≦y≦1, 0≦z≦1). The z for such cap layer monotonically decreases as being farther away from the electron-supplying layer.
摘要翻译: 半导体器件包括沟道层,设置在沟道层上的电子供给层,设置在电子供给层上并与沟道层形成晶格匹配的盖层以及设置在盖层上的欧姆电极。 盖层具有(In y Al 1-y)z Ga 1-z N(0 @ y @ 1,0 @ z @ 1)的组成。 这种盖层的z随着远离电子供应层而单调减小。
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公开(公告)号:US07256432B2
公开(公告)日:2007-08-14
申请号:US10541583
申请日:2003-12-15
申请人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Masaaki Kuzuhara
发明人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Masaaki Kuzuhara
IPC分类号: H01L29/205 , H01L29/78
CPC分类号: H01L29/402 , H01L29/2003 , H01L29/7787
摘要: An electric-field control electrode (5) is formed between a gate electrode (2) and a drain electrode (3). A multilayered film including a SiN film (21) and a SiO2 film (22) is formed below the electric-field control electrode (5). The SiN film (21) is formed so that a surface of an AlGaN electron supply layer (13) is covered with the SiN film (21).
摘要翻译: 在栅电极(2)和漏电极(3)之间形成电场控制电极(5)。 在电场控制电极(5)的下方形成包括SiN膜(21)和SiO 2膜(22)的多层膜。 形成SiN膜(21),使得AlGaN电子供给层(13)的表面被SiN膜(21)覆盖。
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公开(公告)号:US20070164305A1
公开(公告)日:2007-07-19
申请号:US10590730
申请日:2005-02-28
申请人: Tatsuo Nakayama , Yuji Ando , Hironobu Miyamoto , Masaaki Kuzuhara , Yasuhiro Okamoto , Takashi Inoue , Koji Hataya
发明人: Tatsuo Nakayama , Yuji Ando , Hironobu Miyamoto , Masaaki Kuzuhara , Yasuhiro Okamoto , Takashi Inoue , Koji Hataya
IPC分类号: H01L33/00
摘要: An ohmic electrode structure of a nitride semiconductor device having a nitride semiconductor. The ohmic electrode structure is provided with a first metal film formed on the nitride semiconductor and a second metal film formed on the first metal film. The first metal film is composed of at least one material selected from a group consisting of V, Mo, Ti, Nb, W, Fe, Hf, Re, Ta and Zr. The second metal film is composed of at least one material different from that of the first metal film (102), selected from a group consisting of V, Mo, Ti, Nb, W, Fe, Hf, Re, Ta, Zr, Pt and Au.
摘要翻译: 具有氮化物半导体的氮化物半导体器件的欧姆电极结构。 欧姆电极结构设置有形成在氮化物半导体上的第一金属膜和形成在第一金属膜上的第二金属膜。 第一金属膜由选自V,Mo,Ti,Nb,W,Fe,Hf,Re,Ta和Zr中的至少一种材料构成。 第二金属膜由与V,Mo,Ti,Nb,W,Fe,Hf,Re,Ta,Zr,Pt中的至少一种不同于第一金属膜(102)的材料构成。 和Au。
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公开(公告)号:US20060102929A1
公开(公告)日:2006-05-18
申请号:US10538739
申请日:2003-12-15
申请人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Massaki Kuzuhara
发明人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Massaki Kuzuhara
IPC分类号: H01L31/109
CPC分类号: H01L29/402 , H01L29/2003 , H01L29/42316 , H01L29/7787
摘要: A field plate portion (5) overhanging a drain side in a visored shape is formed in a gate electrode (2). A multilayered film including a SiN film (21) and a SiO2 film (22) is formed beneath the field plate portion (5). The SiN film (21) is formed so that a surface of an AlGaN electron supply layer (13) is covered therewith.
摘要翻译: 在栅电极(2)中形成有以遮挡形状突出于漏极侧的场板部(5)。 在场板部分(5)的下方形成包括SiN膜(21)和SiO 2膜(22)的多层膜。 形成SiN膜(21),使得AlGaN电子供给层(13)的表面被覆盖。
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公开(公告)号:US07973335B2
公开(公告)日:2011-07-05
申请号:US10538739
申请日:2003-12-15
申请人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Masaaki Kuzuhara
发明人: Yasuhiro Okamoto , Hironobu Miyamoto , Yuji Ando , Tatsuo Nakayama , Takashi Inoue , Masaaki Kuzuhara
IPC分类号: H01L31/072
CPC分类号: H01L29/402 , H01L29/2003 , H01L29/42316 , H01L29/7787
摘要: A field plate portion (5) overhanging a drain side in a visored shape is formed in a gate electrode (2). A multilayered film including a SiN film (21) and a SiO2 film (22) is formed beneath the field plate portion (5). The SiN film (21) is formed so that a surface of an AlGaN electron supply layer (13) is covered therewith.
摘要翻译: 在栅电极(2)中形成有以遮挡形状突出于漏极侧的场板部(5)。 在场板部(5)的下方形成有SiN膜(21)和SiO 2膜(22)的多层膜。 形成SiN膜(21),使得AlGaN电子供给层(13)的表面被覆盖。
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