Method of producing exchange coupled magnetic thin films with
post-deposition annealing
    32.
    发明授权
    Method of producing exchange coupled magnetic thin films with post-deposition annealing 失效
    具有后沉积退火的交换耦合磁性薄膜的制备方法

    公开(公告)号:US5529814A

    公开(公告)日:1996-06-25

    申请号:US547694

    申请日:1995-10-19

    IPC分类号: G11B5/66 G11B5/84 B05D1/02

    CPC分类号: G11B5/66 G11B5/84

    摘要: Exchange coupled magnetic thin films are produced by depositing an antiferromagnetic layer, followed by deposition of a layer of ferromagnetic material on the antiferromagnetic layer. The composite antiferromagnetic/ferromagnetic structure is then annealed at an elevated temperature for a predetermined length of time. This process results in considerably higher exchange coupling fields than obtainable before. Alternatively, the antiferromagnetic layer may be annealed prior to deposition of the ferromagnetic layer.

    摘要翻译: 交换耦合的磁性薄膜是通过沉积反铁磁性层,随后在反铁磁性层上沉积一层铁磁材料制成的。 然后将复合反铁磁/铁磁结构在升高的温度下退火预定的时间长度。 该过程导致比以前可获得的交换耦合场相当高的交换耦合场。 或者,反铁磁层可以在沉积铁磁层之前退火。