公开(公告)号：US08084933B2

公开(公告)日：2011-12-27

申请号：US12508027

申请日：2009-07-23

申请人： Shang-hyeun Park ,  Min-jong Bae ,  Tae-won Jeong ,  Young-chul Ko

发明人： Shang-hyeun Park ,  Min-jong Bae ,  Tae-won Jeong ,  Young-chul Ko

IPC分类号： H05B33/26

CPC分类号： H05B33/22

摘要： An inorganic electroluminescence (“EL”) device includes a lower electrode; a dielectric layer disposed on the lower electrode; an inorganic emission layer disposed on the dielectric layer; an upper electrode disposed on the inorganic emission layer; a waveguide layer disposed on the upper electrode; and a reflection film partially coating the waveguide layer and including an emission portion through which light is emitted.

摘要翻译： 无机电致发光（“EL”）器件包括下电极; 设置在下电极上的电介质层; 设置在电介质层上的无机发射层; 设置在无机发射层上的上电极; 布置在上电极上的波导层; 以及部分地涂覆波导层并且包括发射光的发射部分的反射膜。

公开(公告)号：US07642576B2

公开(公告)日：2010-01-05

申请号：US11858183

申请日：2007-09-20

申请人： Young-chul Ko ,  Jin-woo Cho ,  U-hyuk Choi ,  Seong-ho Shin

发明人： Young-chul Ko ,  Jin-woo Cho ,  U-hyuk Choi ,  Seong-ho Shin

IPC分类号： H01C7/10

CPC分类号： G01D5/18 ,  G02B6/359 ,  G02B26/0841

摘要： A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.

摘要翻译： 提供了具有压电阻传感器的旋转微机电系统（MEMS）。 旋转MEMS装置包括一对扭转弹簧，其支撑一级，四个电阻器，至少一个电阻器沿扭转弹簧的中心轴线形成，以及连接到四个电阻器的电信号电缆，其中至少一个 在具有（100）面的n型硅衬底上沿<100>方向形成扭转弹簧，并且形成在至少一个扭转弹簧上的电阻器形成为<110>组方向。

公开(公告)号：US20070128757A1

公开(公告)日：2007-06-07

申请号：US11588298

申请日：2006-10-27

申请人： Young-chul Ko ,  Hyun-ku Jeong ,  Seok-whan Chung

发明人： Young-chul Ko ,  Hyun-ku Jeong ,  Seok-whan Chung

IPC分类号： H01L21/00

CPC分类号： B81C1/00626 ,  B81B2203/0136 ,  B81C1/00396

摘要： A method of forming comb electrodes using self alignment etching is provided. A method of forming a stationary comb electrode and a movable comb electrode in first and second silicon layers of a SOI (Silicon-on-Insulator) substrate, respectively, using etching. The method involves sequentially etching the first silicon layer, the insulating layer, and the second silicon layer using an alignment mark formed in the first silicon layer. According to the method, the stationary comb electrode and the movable comb electrode are self-aligned for etching by patterning the first silicon layer.

摘要翻译： 提供了使用自对准蚀刻形成梳状电极的方法。 分别使用蚀刻在SOI（绝缘体上硅）衬底的第一和第二硅层中形成固定梳状电极和可动梳状电极的方法。 该方法包括使用形成在第一硅层中的对准标记来顺序蚀刻第一硅层，绝缘层和第二硅层。 根据该方法，通过图案化第一硅层，固定梳状电极和可动梳状电极自对准蚀刻。

公开(公告)号：US20060232840A1

公开(公告)日：2006-10-19

申请号：US11354014

申请日：2006-02-15

申请人： Hyun-ku Jeong ,  Won-joo Kim ,  Young-chul Ko

发明人： Hyun-ku Jeong ,  Won-joo Kim ,  Young-chul Ko

IPC分类号： G02B26/10

CPC分类号： G02B26/0841

摘要： A metal line structure of an optical scanner and a method of fabricating the same are provided. The metal line structure of the optical scanner includes: a glass substrate having a metal line region etched to a predetermined depth; a metal line formed in the metal line region; a diffusion barrier layer that is formed on the glass substrate and covers the metal line; and an optical scanner structure combined with the glass substrate.

摘要翻译： 提供了一种光学扫描仪的金属线结构及其制造方法。 光学扫描器的金属线结构包括：具有蚀刻到预定深度的金属线区域的玻璃基板; 形成在金属线区域中的金属线; 扩散阻挡层，其形成在所述玻璃基板上并覆盖所述金属线; 以及与玻璃基板结合的光学扫描器结构。

公开(公告)号：US07724411B2

公开(公告)日：2010-05-25

申请号：US12045722

申请日：2008-03-11

申请人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

发明人： Young-chul Ko ,  Jun-o Kim ,  Jin-woo Cho ,  Hee-moon Jeong ,  Woo-hyek Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

摘要翻译： 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

公开(公告)号：US20070120207A1

公开(公告)日：2007-05-31

申请号：US11582481

申请日：2006-10-18

申请人： Hee-moon Jeong ,  Young-chul Ko

发明人： Hee-moon Jeong ,  Young-chul Ko

IPC分类号： H01L29/84

CPC分类号： B81B3/0067 ,  B81B2203/058

摘要： A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.

摘要翻译： 提供了用于微电子机械系统（MEMS）结构的扭转弹簧。 扭转弹簧连接在枢转构件和固定构件之间并且支撑枢转构件，使得枢转构件能够围绕扭转弹簧枢转。 扭簧包括：水平梁; 在水平梁上形成的至少一个垂直梁; 以及形成在水平梁上并平行于垂直梁的多个辅助光束。

公开(公告)号：US07616365B2

公开(公告)日：2009-11-10

申请号：US11710432

申请日：2007-02-26

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

IPC分类号： G02B26/10 ,  B81B3/00 ,  B81B1/00

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

摘要翻译： 微型致动器和微型致动器的制造方法。 微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

公开(公告)号：US20080054732A1

公开(公告)日：2008-03-06

申请号：US11710432

申请日：2007-02-26

申请人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

发明人： Young-chul Ko ,  Jin-woo Cho ,  Hee-moon Jeong

IPC分类号： H02K33/00 ,  G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

摘要翻译： 微型致动器和微型致动器的制造方法。 微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

公开(公告)号：US20070241415A1

公开(公告)日：2007-10-18

申请号：US11605296

申请日：2006-11-29

申请人： Young-chul Ko ,  Won-kyoung Choi ,  Seok-whan Chung

发明人： Young-chul Ko ,  Won-kyoung Choi ,  Seok-whan Chung

IPC分类号： H01L29/40 ,  H01L21/44

CPC分类号： B81B7/0006

摘要： A micro-electro mechanical system (MEMS) device that uses an SOI wafer, and a method of manufacturing the same. The MEMS device includes an SOI wafer including a first silicon layer, a second silicon layer, and an insulating layer formed between the first and second silicon layers, and a protective substrate that is bonded to the first silicon layer, wherein grounding via holes are formed through the first silicon layer, the insulating layer and the protective substrate, and filled with a conductive material, and ventilation holes to be connected to the grounding via holes are formed in the second silicon layer.

摘要翻译： 使用SOI晶片的微电子机械系统（MEMS）装置及其制造方法。 MEMS器件包括：SOI晶片，包括第一硅层，第二硅层和形成在第一和第二硅层之间的绝缘层;以及保护基板，其结合到第一硅层，其中形成接地通孔 通过第一硅层，绝缘层和保护基板，并填充有导电材料，并且在第二硅层中形成要连接到接地通孔的通风孔。

公开(公告)号：US20060164631A1

公开(公告)日：2006-07-27

申请号：US11315242

申请日：2005-12-23

申请人： Won-kyoung Choi ,  Young-chul Ko

发明人： Won-kyoung Choi ,  Young-chul Ko

IPC分类号： G01N21/00

CPC分类号： G02B7/1821 ,  B81C1/00269 ,  G02B7/008 ,  G02B26/0833 ,  H01L2224/48091 ,  H01L2224/73265 ,  Y10S257/924 ,  H01L2924/00014

摘要： An optical scanner package having a heating dam is provided. The optical scanner package having a heating dam includes: an optical scanner on which a mirror surface is formed; a ceramic package in which the optical scanner is installed at the bottom of a cavity thereof; a glass lid covering a sidewall of the ceramic package; a heating dam formed on the sidewall of the ceramic package; and solder on the heating dam sealing between the glass lid and the sidewall of the ceramic package. The heating dam locally heats the solder to form hermetic sealing.

摘要翻译： 提供了具有加热堤的光学扫描器封装。 具有加热堤的光学扫描器封装包括：形成有镜面的光学扫描器; 陶瓷封装，其中光学扫描器安装在其空腔的底部; 覆盖陶瓷封装的侧壁的玻璃盖; 形成在陶瓷封装的侧壁上的加热槽; 并且在玻璃盖和陶瓷封装的侧壁之间的加热坝上焊接。 加热坝局部加热焊料以形成密封。