Micro electro mechanical system device
    1.
    发明授权
    Micro electro mechanical system device 失效
    微机电系统装置

    公开(公告)号:US07750767B2

    公开(公告)日:2010-07-06

    申请号:US11711057

    申请日:2007-02-27

    IPC分类号: H01H51/22

    摘要: A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

    摘要翻译: 提供了微机电系统(MEMS)装置。 MEMS器件包括:以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括:从该台延伸的感测臂; 驱动梳子,其从感测臂延伸并与舞台一起旋转; 固定梳子,其被固定地支撑以与驱动梳状物接合,固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部,其检测驱动梳和固定梳的电容变化。 因此,MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

    Actuator and two-dimensional scanner
    2.
    发明申请
    Actuator and two-dimensional scanner 审中-公开
    执行器和二维扫描仪

    公开(公告)号:US20070268099A1

    公开(公告)日:2007-11-22

    申请号:US11654582

    申请日:2007-01-18

    IPC分类号: H01H51/22

    摘要: An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.

    摘要翻译: 执行器和二维扫描仪。 致动器和二维扫描仪包括基板,围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板,形成磁力的磁场产生部分,其作用在 与第二轴平行的方向,在第一轴的位置具有最小尺寸,与第一轴和第二轴的至少一个同轴设置的支撑构件,连接基板和可动板,并形成 可移动板的枢转轴线和驱动线圈部分,可动板的驱动力被施加到可动板上,以便相对于第一轴线和第二轴线的交叉点具有点对称形状 轴。

    Electromagnetic micro actuator and method of manufacturing the same
    3.
    发明授权
    Electromagnetic micro actuator and method of manufacturing the same 失效
    电磁微型致动器及其制造方法

    公开(公告)号:US07616365B2

    公开(公告)日:2009-11-10

    申请号:US11710432

    申请日:2007-02-26

    IPC分类号: G02B26/10 B81B3/00 B81B1/00

    CPC分类号: G02B26/085 G02B26/101

    摘要: A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

    摘要翻译: 微型致动器和微型致动器的制造方法。 微型致动器包括基架,第一可移动部件,第二可动部件,至少一对永磁体,线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形,以减少第一和第二可动部的变形。

    Electromagnetic micro actuator and method of manufacturing the same
    4.
    发明申请
    Electromagnetic micro actuator and method of manufacturing the same 失效
    电磁微型致动器及其制造方法

    公开(公告)号:US20080054732A1

    公开(公告)日:2008-03-06

    申请号:US11710432

    申请日:2007-02-26

    IPC分类号: H02K33/00 G02B26/08

    CPC分类号: G02B26/085 G02B26/101

    摘要: A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

    摘要翻译: 微型致动器和微型致动器的制造方法。 微型致动器包括基架,第一可移动部件,第二可动部件,至少一对永磁体,线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形,以减少第一和第二可动部的变形。

    MEMS device
    5.
    发明申请
    MEMS device 审中-公开
    MEMS器件

    公开(公告)号:US20070296532A1

    公开(公告)日:2007-12-27

    申请号:US11709854

    申请日:2007-02-23

    IPC分类号: H01F7/00

    摘要: A two-axis micro-electro mechanical system (MEMS) device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets.

    摘要翻译: 双轴微电子机械系统(MEMS)装置包括移动板,台,驱动线圈,一对磁体和轭磁体。 移动板同轴地支撑在第一轴线上,以围绕第一轴线可枢转地运动。 舞台在移动板的内部区域中同轴地支撑在第二轴上。 驱动线圈包括沿着驱动板的第一轴线布置并在台架的中心被分割的同轴线圈部分,以及第一连接线圈部分和第二连接线圈部分。 轭磁体设置在磁体上方或下方的区域中的一对磁体之间,并且由能够被磁体磁化的材料形成,以便根据一对磁体之间的距离突然改变磁通密度 。

    2-axis driving electromagnetic scanner
    6.
    发明授权
    2-axis driving electromagnetic scanner 失效
    2轴驱动电磁扫描仪

    公开(公告)号:US07724411B2

    公开(公告)日:2010-05-25

    申请号:US12045722

    申请日:2008-03-11

    IPC分类号: G02B26/08

    CPC分类号: G02B26/085 G02B26/101

    摘要: A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

    摘要翻译: 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括:能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元,其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中,通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

    2-AXIS DRIVING ELECTROMAGNETIC SCANNER
    7.
    发明申请
    2-AXIS DRIVING ELECTROMAGNETIC SCANNER 失效
    双轴驱动电磁扫描仪

    公开(公告)号:US20090080049A1

    公开(公告)日:2009-03-26

    申请号:US12045722

    申请日:2008-03-11

    IPC分类号: G02B26/08

    CPC分类号: G02B26/085 G02B26/101

    摘要: A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

    摘要翻译: 提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。 电磁扫描器包括:能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元,其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。 在电磁扫描器中,通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

    Micro electro mechanical system device
    8.
    发明申请
    Micro electro mechanical system device 失效
    微机电系统装置

    公开(公告)号:US20080007376A1

    公开(公告)日:2008-01-10

    申请号:US11711057

    申请日:2007-02-27

    IPC分类号: H01F7/08 G01R27/26

    摘要: A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

    摘要翻译: 提供了微机电系统(MEMS)装置。 MEMS器件包括:以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。 该电容传感器包括:从该台延伸的感测臂; 驱动梳子,其从感测臂延伸并与舞台一起旋转; 固定梳子,其被固定地支撑以与驱动梳状物接合,固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部,其检测驱动梳和固定梳的电容变化。 因此,MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

    Torsion spring for MEMS structure
    9.
    发明申请
    Torsion spring for MEMS structure 审中-公开
    用于MEMS结构的扭转弹簧

    公开(公告)号:US20070120207A1

    公开(公告)日:2007-05-31

    申请号:US11582481

    申请日:2006-10-18

    IPC分类号: H01L29/84

    CPC分类号: B81B3/0067 B81B2203/058

    摘要: A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.

    摘要翻译: 提供了用于微电子机械系统(MEMS)结构的扭转弹簧。 扭转弹簧连接在枢转构件和固定构件之间并且支撑枢转构件,使得枢转构件能够围绕扭转弹簧枢转。 扭簧包括:水平梁; 在水平梁上形成的至少一个垂直梁; 以及形成在水平梁上并平行于垂直梁的多个辅助光束。

    Image fusing apparatus using carbon nano-tube heater
    10.
    发明授权
    Image fusing apparatus using carbon nano-tube heater 有权
    图像融合装置采用碳纳米管加热器

    公开(公告)号:US08995894B2

    公开(公告)日:2015-03-31

    申请号:US13599165

    申请日:2012-08-30

    IPC分类号: G03G15/20

    摘要: An image fusing apparatus includes a heating belt including a resistance heating layer, an insulating layer formed on an inner surface of the resistance heating layer, and a release layer formed on an outer surface of the resistance heating layer; a heating supporting roller disposed (positioned) inside the heating belt and rotating with the heating belt; a pressing roller disposed (positioned) parallel to the heating supporting roller and in contact with the outer surface of the heating belt to form a nip; and an electricity supplying member to supply electricity to the resistance heating layer of the heating belt. A thickness of paper non-contact areas of opposite side end portions of the resistance heating layer of the heating belt is the same as or thicker than the thickness of a paper contact area of a middle portion of the resistance heating layer thereof.

    摘要翻译: 图像定影装置包括加热带,其包括电阻加热层,形成在电阻加热层的内表面上的绝缘层和形成在电阻加热层的外表面上的剥离层; 在加热带内设置(定位)并与加热带一起旋转的加热支撑辊; 设置(定位)平行于加热支撑辊并与加热带的外表面接触以形成辊隙的加压辊; 以及向加热带的电阻加热层供电的供电部件。 加热带的电阻加热层的相对侧端部的纸张非接触区域的厚度与其电阻加热层的中间部分的纸张接触面积的厚度相同或更厚。