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    CMOS compatible dew point sensor device and method of determining a dew point
    38.
    发明授权
    CMOS compatible dew point sensor device and method of determining a dew point 有权

    公开(公告)号：US11525793B2

    公开(公告)日：2022-12-13

    申请号：US17225670

    申请日：2021-04-08

    申请人： Sciosense B.V.

    发明人： Dimitri Soccol ,  Viet Nguyen Hoang ,  David Van Steenwinckel ,  Roel Daamen ,  Pascal Bancken

    IPC分类号： G01N25/68

    摘要： In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

    CMOS Compatible Dew Point Sensor Device and Method of Determining a Dew Point
    39.
    发明申请
    CMOS Compatible Dew Point Sensor Device and Method of Determining a Dew Point 有权

    公开(公告)号：US20210223193A1

    公开(公告)日：2021-07-22

    申请号：US17225670

    申请日：2021-04-08

    申请人： Sciosense B.V.

    发明人： Dimitri Soccol ,  Viet Nguyen Hoang ,  David Van Steenwinckel ,  Roel Daamen ,  Pascal Bancken

    IPC分类号： G01N25/68

    摘要： In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

    INSPECTION DEVICE AND METHOD FOR OPERATING INSPECTION DEVICE
    40.
    发明申请
    INSPECTION DEVICE AND METHOD FOR OPERATING INSPECTION DEVICE 有权

    公开(公告)号：US20210132135A1

    公开(公告)日：2021-05-06

    申请号：US16975506

    申请日：2019-02-13

    申请人： Tokyo Electron Limited

    发明人： Yasuhiro OSUGA ,  Koju YAMAMOTO

    IPC分类号： G01R31/26 ,  G01N25/68

    摘要： An inspection device according to an embodiment can conduct high temperature inspection and low temperature inspection on an object to be inspected. The inspection device includes an inspection chamber in which inspection is conducted on the object; a dry air supply section that is connected to the inspection chamber via a first valve and that is configured to supply dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that is configured to measure a dew point in the inspection chamber; and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve.