Geometric pattern data quality verification for maskless lithography
    41.
    发明授权
    Geometric pattern data quality verification for maskless lithography 有权
    无掩模光刻的几何图形数据质量验证

    公开(公告)号:US08601407B2

    公开(公告)日:2013-12-03

    申请号:US13217345

    申请日:2011-08-25

    CPC classification number: G03F7/2059

    Abstract: Provided is a method of performing a maskless lithography process. The method includes providing a proximity correction pattern. The method includes generating a deformed pattern based on the proximity correction pattern. The method includes performing a first convolution process to the proximity correction pattern to generate a first proximity correction pattern contour. The method includes processing the first proximity correction pattern contour to generate a second proximity correction pattern contour. The method includes performing a second convolution process to the deformed pattern to generate a first deformed pattern contour. The method includes processing the first deformed pattern contour to generate a second deformed pattern contour. The method includes identifying mismatches between the second proximity correction pattern contour and the second deformed pattern contour. The method includes determining whether the deformed pattern is lithography-ready in response to the identifying.

    Abstract translation: 提供了进行无掩模光刻处理的方法。 该方法包括提供接近校正模式。 该方法包括基于接近校正图案生成变形图案。 该方法包括对接近校正图案执行第一卷积处理以产生第一邻近校正图案轮廓。 该方法包括处理第一接近校正图案轮廓以产生第二邻近校正图案轮廓。 该方法包括对变形图案执行第二卷积处理以产生第一变形图案轮廓。 该方法包括处理第一变形图案轮廓以产生第二变形图案轮廓。 该方法包括识别第二接近校正图案轮廓和第二变形图案轮廓之间的不匹配。 该方法包括响应于识别确定变形图案是否是光刻刻画的。

    Display Panel and Method for Reparing Signal Line of Display Panel
    42.
    发明申请
    Display Panel and Method for Reparing Signal Line of Display Panel 审中-公开
    显示面板和显示面板信号线显示方法

    公开(公告)号:US20130278856A1

    公开(公告)日:2013-10-24

    申请号:US13518855

    申请日:2012-04-25

    Inventor: Cheng-hung Chen

    CPC classification number: G02F1/136259 G02F2001/136263

    Abstract: The present invention provides a method of repairing a display panel and signal lines of the display panel. The method comprises: arranging a repairing line in a different layer with the signal line; arranging a transparent conductive layer above an intersectionally-overlapped area of the repairing line and the signal line, a melting point of the transparent conductive layer is lower than that of the signal line and the repairing line, and using laser beams to melt the transparent conductive layer to connect the signal line and the repairing line when repairing the broken signal line. The present invention arranges an additional transparent conductive layer with a lower melting point on an overlapped area of a repairing line and a signal line and uses the laser beams to melt the transparent conductive layer to connect the repairing line and the signal line, thereby increasing repairing possibility as repairing the signal line.

    Abstract translation: 本发明提供一种修复显示面板的显示面板和信号线的方法。 该方法包括:在与信号线不同的层中布置修理线; 在修复线和信号线的交叉重叠区域上方布置透明导电层,透明导电层的熔点低于信号线和修复线的熔点,并且使用激光束来熔化透明导电 在修复断开的信号线时,连接信号线和修理线。 本发明在修补线和信号线的重叠区域上布置具有较低熔点的附加透明导电层,并且使用激光束熔化透明导电层以连接修复线和信号线,从而增加修复 修复信号线的可能性。

    Detection circuit and manufacturing method for LCD panel
    43.
    发明授权
    Detection circuit and manufacturing method for LCD panel 有权
    液晶面板检测电路及制造方法

    公开(公告)号:US08529307B1

    公开(公告)日:2013-09-10

    申请号:US13641108

    申请日:2012-08-09

    Inventor: Cheng-hung Chen

    CPC classification number: G09G3/006 G02F2001/136254 G09G3/36

    Abstract: The present invention discloses a detection circuit in the assembly process of an LCD panel. Through the testing pad collection and the switch collection, the signal line of each of the panel units connects to the corresponding testing signal pad of the testing pad collection respectively through the input terminal and the output terminal of the control switch of the switch collection, and the control terminal of the control switch electrically connects to the control signal pad in order to selectively apply an individual testing to one of the panel units. The present invention also provides a manufacturing method for an LCD panel. Accordingly, the present invention can simplify the detection circuit and reduce the load of the detection circuit.

    Abstract translation: 本发明公开了一种LCD面板组装过程中的检测电路。 通过测试板采集和开关采集,每个面板单元的信号线分别通过开关集合的控制开关的输入端子和输出端子连接到测试板集合的相应测试信号焊盘,以及 控制开关的控制端子电连接到控制信号焊盘,以选择性地将单独的测试应用于面板单元中的一个。 本发明还提供一种LCD面板的制造方法。 因此,本发明可以简化检测电路并减少检测电路的负载。

    Thin-Film Transistor Liquid Crystal Display Device, Substrate,and Manufacturing Method
    44.
    发明申请
    Thin-Film Transistor Liquid Crystal Display Device, Substrate,and Manufacturing Method 有权
    薄膜晶体管液晶显示装置,基板和制造方法

    公开(公告)号:US20130162509A1

    公开(公告)日:2013-06-27

    申请号:US13503374

    申请日:2012-01-16

    Inventor: Cheng-Hung Chen

    CPC classification number: H01L29/41733 G09G3/3648 G09G2300/0465 H01L27/124

    Abstract: The present invention discloses a thin-film transistor liquid crystal display device, a substrate, and a manufacturing method. The thin-film transistor liquid crystal display device includes: a substrate and a signal line, a scan line, a pixel electrode, and a thin-film transistor that are formed on the substrate. The signal line and the scan line are arranged to intersect each other. The pixel electrode is located in a pixel display zone enclosed by the intersected signal line and scan line. The thin-film transistor includes a gate terminal, a source terminal, and a drain terminal. The gate terminal is electrically connected to the scan line. The drain terminal is electrically connected to the signal line. The source terminal is arranged at a position corresponding to the intersection of the signal line and the scan line and is electrically connected to the pixel electrode. With the above arrangement, the present invention can significantly reduce the amount of area of the pixel electrode occupied, increases the opening ratio of the pixel, and greatly reduces the influence on the alignment of the liquid crystal molecules thereby reducing asymmetry of the pixel quadrant and improving image quality.

    Abstract translation: 本发明公开了一种薄膜晶体管液晶显示装置,基板及其制造方法。 薄膜晶体管液晶显示装置包括:基板和形成在基板上的信号线,扫描线,像素电极和薄膜晶体管。 信号线和扫描线被布置成彼此相交。 像素电极位于由交叉的信号线和扫描线包围的像素显示区域中。 薄膜晶体管包括栅极端子,源极端子和漏极端子。 栅极端子与扫描线电连接。 漏极端子与信号线电连接。 源极端子配置在与信号线和扫描线的交叉点对应的位置,与电极连接。 通过上述结构,本发明能够显着地减少像素电极的占用面积,提高像素的开口率,大大降低对液晶分子取向的影响,减少像素象限的不对称性, 提高图像质量。

    DISPLAY APPARATUS AND METHOD FOR DRIVING DISPLAY PANEL THEREOF
    45.
    发明申请
    DISPLAY APPARATUS AND METHOD FOR DRIVING DISPLAY PANEL THEREOF 审中-公开
    显示装置及其驱动显示面板的方法

    公开(公告)号:US20110157243A1

    公开(公告)日:2011-06-30

    申请号:US12892480

    申请日:2010-09-28

    Abstract: A display apparatus and a method for driving a display panel thereof are provided. The display apparatus comprises a display panel and a gate driver. The display panel comprises two gate lines, two source lines, a pixel and two transistors. The pixel is electrically coupled to the two gate lines and the two source lines through the two transistors respectively. The gate driver is for providing a first pulse to one of the gate lines according to a predetermined frequency and providing a second pulse to another one according to the predetermined frequency. An enabling period of the second pulse is behind an enabling period of the first pulse, and a predetermined time interval is existed between a rising edge of the second pulse and a rising edge of the first pulse. The predetermined time interval is longer than a time length of the enabling period of the first pulse.

    Abstract translation: 提供了一种用于驱动显示面板的显示装置和方法。 显示装置包括显示面板和门驱动器。 显示面板包括两条栅极线,两条源极线,一个像素和两个晶体管。 像素分别通过两个晶体管电耦合到两个栅极线和两个源极线。 栅极驱动器用于根据预定频率向其中一条栅极线提供第一脉冲,并且根据预定频率向第二脉冲提供第二脉冲。 第二脉冲的使能周期落后于第一脉冲的使能周期,并且在第二脉冲的上升沿和第一脉冲的上升沿之间存在预定的时间间隔。 预定时间间隔比第一脉冲的使能期间的时间长度长。

    Method and system for step-and-align interference lithography
    46.
    发明授权
    Method and system for step-and-align interference lithography 有权
    用于步进和对准干涉光刻的方法和系统

    公开(公告)号:US07969580B2

    公开(公告)日:2011-06-28

    申请号:US12266668

    申请日:2008-11-07

    CPC classification number: G03B27/42 G03F7/70408 G03F7/70475

    Abstract: A method for step-and-align interference lithography is provided in the present invention, by which a displacement error relating to the moving of an interference light beam as the source of the interference light beam is being carried to move by a carrier is measured before interference lithography, and then the displacement error is used as a reference to compensate a positioning error between adjacent interference patterns during step-and-align interference lithography. Besides, the present invention further provides a system for step-and-align interference lithography, which is capable of compensating the positioning error caused by a stepping movement control used for moving a substrate or the light beams in a stepwise manner to form interference-patterned regions by interference lithography and thus the so-generated interference-patterned regions are accurate aligned with one another on a two-dimensional plane for preparing the same to be stitched together to form a two-dimensional large-area periodic structure.

    Abstract translation: 在本发明中提供了一种用于步进和对准干涉光刻的方法,通过该方法,测量与作为干涉光束的源的干涉光束的移动相关的位移误差由载体移动以在载体之前移动 干涉光刻,然后使用位移误差作为参考,以补偿步进和对准干涉光刻期间相邻干涉图案之间的定位误差。 此外,本发明还提供了一种用于步进和对准干涉光刻的系统,其能够以逐步的方式补偿由用于移动衬底或光束的步进移动控制引起的定位误差,以形成干涉图案 通过干涉光刻形成区域,因此如此产生的干涉图案区域在二维平面上彼此准确地对准,以便制造相同的缝合在一起以形成二维大面积周期性结构。

    Optical disk drive with adaptive compensator

    公开(公告)号:US07002880B2

    公开(公告)日:2006-02-21

    申请号:US10708206

    申请日:2004-02-17

    CPC classification number: G11B7/0953

    Abstract: An optical disk drive for accessing data stored on a compact disc has a housing, a sled sliding inside the housing, a driving device for driving the sled, an actuator installed on the sled, a servo device for providing a push force to drive the actuator, a control circuitry for controlling operations of the optical disk drive, an adaptive compensator, and an error signal generation circuit. The actuator can move within a predetermined range on the sled, wherein the predetermined range includes a linear region and a non-linear region. It is desirable to keep the actuator within the linear region of the predetermined range. For this, an adaptive compensator is used to provide a supplementary force to the sled when the actuator is near the non-linear region.

    Optical disk drive with adaptive compensator
    48.
    发明申请
    Optical disk drive with adaptive compensator 有权
    具有自适应补偿器的光盘驱动器

    公开(公告)号:US20050088925A1

    公开(公告)日:2005-04-28

    申请号:US10708206

    申请日:2004-02-17

    CPC classification number: G11B7/0953

    Abstract: An optical disk drive for accessing data stored on a compact disc has a housing, a sled sliding inside the housing, a driving device for driving the sled, an actuator installed on the sled, a servo device for providing a push force to drive the actuator, a control circuitry for controlling operations of the optical disk drive, an adaptive compensator, and an error signal generation circuit. The actuator can move within a predetermined range on the sled, wherein the predetermined range includes a linear region and a non-linear region. It is desirable to keep the actuator within the linear region of the predetermined range. For this, an adaptive compensator is used to provide a supplementary force to the sled when the actuator is near the non-linear region.

    Abstract translation: 用于访问存储在光盘上的数据的光盘驱动器具有壳体,在壳体内滑动的滑动件,用于驱动滑板的驱动装置,安装在滑架上的致动器,用于提供推动力以驱动致动器的伺服装置 ,用于控制光盘驱动器的操作的控制电路,自适应补偿器和误差信号发生电路。 致动器可以在滑架上的预定范围内移动,其中预定范围包括线性区域和非线性区域。 希望将致动器保持在预定范围的线性区域内。 为此,当致动器靠近非线性区域时,使用自适应补偿器来向车把提供辅助力。

    Manufacturing method of display panel and repair line structure thereof
    49.
    发明授权
    Manufacturing method of display panel and repair line structure thereof 有权
    显示面板的制造方法及其维修线结构

    公开(公告)号:US09164337B1

    公开(公告)日:2015-10-20

    申请号:US13521679

    申请日:2012-06-01

    Inventor: Cheng-hung Chen

    Abstract: A manufacturing method and repair structure of a display panel are provided. A repair method for a signal wire of the display panel comprises the steps of: connecting a repair wire and a welding pad before a PSVA process, and connecting the repair wire to a short-circuit bus bar of a signal wire of the same category through the welding pad; and welding a weld point between a breakpoint and the connection point of the repair wire and the short-circuit bus bar on a broken wire, hence a signal applied to the display panel by the short-circuit bus bar is transmitted to the breakpoint through the repair wire in the PSVA process. Since the repair wire is connected with the short-circuit bus bar and directly powered up through the short-circuit bus bar in the PSVA process, the wire can not be broken when the signal is transmitted via the short-circuit bus bar, the permanent memory of the broken wire defect of the display panel in the form of a liquid crystal pre-tilt angle on the display panel during the PSVA process can be avoided, and the process yield of the display panel can be increased.

    Abstract translation: 提供了显示面板的制造方法和修理结构。 显示面板的信号线的维修方法包括以下步骤:在PSVA处理之前连接修理线和焊盘,并将修理线连接到相同类别的信号线的短路母线,通过 焊垫; 并且在断线与断线之间的焊接点与修理线和短路母线的连接点之间焊接焊点,因此通过短路母线施加到显示面板的信号通过该断点传送到断点 修复电线在PSVA过程中。 由于维修线与短路母线连接,并通过PSVA过程中的短路母线直接上电,当信号通过短路母线传输时,导线不能断开,永久 可以避免在PSVA处理期间显示面板上的液晶预倾角形式的显示面板的断线缺陷的存储,并且可以提高显示面板的处理成品率。

    Efficient scan for E-beam lithography
    50.
    发明授权
    Efficient scan for E-beam lithography 有权
    电子束光刻的高效扫描

    公开(公告)号:US08987689B2

    公开(公告)日:2015-03-24

    申请号:US13484524

    申请日:2012-05-31

    CPC classification number: H01J37/3174 B82Y10/00 B82Y40/00 H01J2237/31761

    Abstract: The present disclosure provides a method of increasing the wafer throughput by an electron beam lithography system. The method includes scanning a wafer using the maximum scan slit width (MSSW) of the electron beam writer. By constraining the integrated circuit (IC) field size to allow the MSSW to cover a complete field, the MSSW is applied to decrease the scan lanes of a wafer and thereby increase the throughput. When scanning the wafer with the MSSW, the next scan lane data can be rearranged and loaded into a memory buffer. Thus, once one scan lane is finished, the next scan lane data in the memory buffer is read for scanning.

    Abstract translation: 本公开提供了一种通过电子束光刻系统增加晶片通过量的方法。 该方法包括使用电子束写入器的最大扫描狭缝宽度(MSSW)扫描晶片。 通过限制集成电路(IC)场尺寸以允许MSSW覆盖整个场,MSSW被应用于减小晶片的扫描通道,从而增加吞吐量。 当用MSSW扫描晶片时,可以将下一个扫描通道数据重新排列并加载到存储器缓冲器中。 因此,一旦一个扫描通道完成,读取存储器缓冲器中的下一个扫描通道数据进行扫描。

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