公开(公告)号：US07088556B1

公开(公告)日：2006-08-08

申请号：US10611419

申请日：2003-06-30

申请人： Yee-Chung Fu ,  Ken Chang ,  Ross Pace

发明人： Yee-Chung Fu ,  Ken Chang ,  Ross Pace

IPC分类号： G11B21/08

CPC分类号： G11B5/5569

摘要： A disk drive includes a storage disk, a data transducer, an actuator assembly and a positioner. The actuator assembly supports the data transducer over the storage disk. The actuator assembly includes a rotatable actuator hub and a longitudinal axis. The positioner moves the actuator assembly to position the data transducer relative to the storage disk. During movement of the actuator assembly, the actuator hub is subject to a resultant force that causes track misregistration of the data transducer. The positioner includes a magnet assembly that generates a magnetic field, a first conductor region and a second conductor region. In one embodiment, the conductor regions cooperate with the magnet assembly to generate a first force and a second force that are each directed at an angle having an absolute value that is greater than zero degrees and less than approximately 45 degrees relative to the longitudinal axis of the actuator assembly. In another embodiment, the conductor regions are each positioned at an angle having an absolute value of greater than approximately 45 degrees and less than 90 degrees relative to the longitudinal axis of the actuator assembly.

摘要翻译： 磁盘驱动器包括存储盘，数据传感器，致动器组件和定位器。 执行器组件在存储盘上支撑数据传感器。 致动器组件包括可旋转的致动器毂和纵向轴线。 定位器移动致动器组件以相对于存储盘定位数据传感器。 在致动器组件的运动期间，致动器毂受到导致数据传感器的轨迹重合失调的合力。 定位器包括产生磁场的磁体组件，第一导体区域和第二导体区域。 在一个实施例中，导体区域与磁体组件配合以产生第一力和第二力，每一个力和第二力均以相对于纵向轴线的纵向轴线的绝对值大于零度且小于大约45度的角度定向 致动器组件。 在另一个实施例中，导体区域各自以相对于致动器组件的纵向轴线的绝对值大于大约45度且小于90度的角度定位。

公开(公告)号：US20060023295A1

公开(公告)日：2006-02-02

申请号：US11201672

申请日：2005-08-10

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

摘要翻译： 微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。 致动器具有从主体延伸的主体和一组旋转齿。 锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。

公开(公告)号：US20050184351A1

公开(公告)日：2005-08-25

申请号：US10779952

申请日：2004-02-13

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/08 ,  G02B26/10 ,  H01L27/14

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

摘要翻译： 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。 梳齿可以具有锥形形状。

公开(公告)号：US06914710B1

公开(公告)日：2005-07-05

申请号：US10032198

申请日：2001-12-20

申请人： Vlad J. Novotny ,  Yee-Chung Fu

发明人： Vlad J. Novotny ,  Yee-Chung Fu

IPC分类号： G02B6/32 ,  G02B6/35 ,  G02B26/00 ,  G01C19/00 ,  G02B26/08

CPC分类号： G02B6/359 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584

摘要： A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb electrodes to position optical elements along multiple axes. In one embodiment, an actuator assembly includes an actuator support, typically a silicon wafer, supporting a fixed comb with a plurality of teeth. A frame flexibly connected to the actuator support includes a complementary set of movable comb electrodes, the teeth of which are arranged interdigitally with the teeth of the fixed combs. The frame can be tilted with respect to the actuator support along a first fulcrum axis by applying a potential difference between the fixed and movable combs. Each actuator assembly also includes an actuated member, a mirror mount in one embodiment, flexibly connected to the frame. The actuated member and the frame include electrical isolated, interdigitated, combs. The actuated member can be moved relative to the frame along a second fulcrum axis by applying a potential between these interdigitated combs. A bonding process for fabrication of an array of actuators is described.

摘要翻译： 微机电系统（MEMS）致动器采用静电梳电极来沿着多个轴定位光学元件。 在一个实施例中，致动器组件包括致动器支撑件，通常为硅晶片，其支撑具有多个齿的固定梳齿。 柔性地连接到致动器支撑件的框架包括互补的一组可移动梳状电极，其齿与固定梳齿的齿指叉配置。 通过施加固定和可动梳子之间的电位差，框架可以相对于致动器支撑件沿着第一支点轴线倾斜。 每个致动器组件还包括致动构件，在一个实施例中的反射镜安装件，柔性地连接到框架。 致动构件和框架包括电隔离的叉指梳状物。 致动构件可以通过在这些叉指梳之间施加电位而沿着第二支点轴相对于框架移动。 描述了用于制造致动器阵列的接合工艺。

公开(公告)号：US06751395B1

公开(公告)日：2004-06-15

申请号：US10010786

申请日：2001-11-09

申请人： Vlad Novotny ,  Yee-Chung Fu ,  Zuo Wang

发明人： Vlad Novotny ,  Yee-Chung Fu ,  Zuo Wang

IPC分类号： G02B626

CPC分类号： G02B6/353 ,  G02B6/266 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594

摘要： Variable optical attenuators that use a blade in a gap between two fibers to control the optical attenuation without having coupling optics in the gap, where the blade has at least one blade surface at an angle with respect to an end facet of one fiber.

摘要翻译： 可变光衰减器，其在两个光纤之间的间隙中使用叶片来控制光学衰减，而不在间隙中具有耦合光学器件，其中刀片具有相对于一个光纤的端面具有一角度的至少一个叶片表面。

公开(公告)号：US08723837B1

公开(公告)日：2014-05-13

申请号：US13080044

申请日：2011-04-05

申请人： Yee-Chung Fu ,  Chen-Chi Lin

发明人： Yee-Chung Fu ,  Chen-Chi Lin

IPC分类号： G09G5/00

CPC分类号： G06F3/0423

摘要： A touch panel system includes a panel, first and second scanning mirrors located about first and second panel corners, a photodetector array along a first panel edge between the first and the second panel corners, and a stationary plane mirror along a second panel edge adjacent to the first panel edge. The first scanning mirror sweeps a light beam across the panel. The second mirror sweeps another light beam across the panel, a part of which reflects from the stationary plane mirror to back into the panel to sweep the panel from a different angle. The light beams, including the reflected part from the stationary plane mirror, strike objects on the panel and reflect towards the photodetector array. Angular positions of the first and the second scanning mirrors at the times the photodetector array detects the reflected light are correlated to object locations.

摘要翻译： 触摸面板系统包括面板，围绕第一和第二面板角落定位的第一和第二扫描镜，沿着第一和第二面板角部之间的第一面板边缘的光电检测器阵列，以及沿着与第二面板边缘相邻的第二面板边缘的固定平面镜 第一个面板边缘。 第一扫描镜扫过面板上的光束。 第二个镜子扫过另一个光束穿过面板，其一部分从固定平面镜反射回到面板中，从不同的角度扫过面板。 包括来自固定平面镜的反射部分的光束撞击面板上的物体并朝向光电检测器阵列反射。 光电检测器阵列检测反射光时第一和第二扫描镜的角位置与物体位置相关。

公开(公告)号：US08519809B1

公开(公告)日：2013-08-27

申请号：US13042333

申请日：2011-03-07

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H1/0036 ,  H01H2001/0078 ,  H01P1/127

摘要： A micro-electromechanical (MEMS) switch includes a substrate, stationary actuator comb teeth extending from a stationary actuator pad supported above the substrate, stationary contact comb teeth extending from a stationary contact pad supported above the substrate, and a body suspended over the substrate for rotation about an axis perpendicular to the substrate. The body includes movable actuator comb teeth interdigitated in-plane with the stationary actuator comb teeth where the shortest distance between adjacent movable and stationary actuator comb teeth has a first value. The body further includes movable contact comb teeth interdigitated in-plane with the stationary contact comb teeth where the shortest distance between adjacent movable and stationary contact comb teeth has a second value smaller than the first value.

摘要翻译： 微机电（MEMS）开关包括基板，从支撑在基板上方的固定致动器垫延伸的固定致动器梳齿，从支撑在基板上方的固定接触垫延伸的固定接触梳齿，以及悬挂在基板上的主体， 围绕垂直于衬底的轴旋转。 主体包括与固定致动器梳齿平面内的可移动致动器梳齿，其中相邻的可动和静止致动器梳齿之间的最短距离具有第一值。 主体还包括与固定接触梳齿平面地交叉指向的可动接触梳齿，其中相邻的可动和固定接触梳齿之间的最短距离具有小于第一值的第二值。

公开(公告)号：US07426066B2

公开(公告)日：2008-09-16

申请号：US11273772

申请日：2005-11-14

申请人： Yee-Chung Fu ,  Ting-Tung Kuo

发明人： Yee-Chung Fu ,  Ting-Tung Kuo

IPC分类号： G02B26/10

CPC分类号： G02B26/0841

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

摘要翻译： 在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。 第一电极耦合到第一电压源。 第二电极耦合到第二电压源。 移动元件包括耦合到第三电压源的第三电极。 使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。 使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。 在一个实施例中，移动单元是镜子。

公开(公告)号：US07402255B2

公开(公告)日：2008-07-22

申请号：US11370417

申请日：2006-03-07

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： B29D11/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

摘要翻译： 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 镜子可以包括顶部凸缘和由腹板连接的底部凸缘，其中顶部和底部凸缘分别形成顶部和底部表面。 旋转梳齿可具有锥形形状。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。

公开(公告)号：US20070242342A1

公开(公告)日：2007-10-18

申请号：US11263795

申请日：2005-10-31

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.

摘要翻译： 微电子机械系统（MEMS）镜装置包括（1）反射镜，（2）耦合到反射镜的一半的第一组弹簧元件，（3）耦合到第一组弹簧元件的第一光束 ，（4）耦合到所述第一梁的第一弹簧，以及（5）联接到所述第一弹簧的第一固定垫。 该装置还包括（6）平行于反射镜的另一半耦合的第二组弹簧元件，（7）耦合到第二组弹簧元件的第二光束，（8）耦合到第二光束的第二弹簧， （9）和耦合到第二弹簧的第二固定垫。 该装置还包括第三梁，其将第一和第二梁刚性互连，使得它们一致地旋转反射镜。