摘要:
An exposure apparatus 1 comprises a collecting mirror 104 configured to collect emitted light from plasma 101, an illumination optical system which includes illumination system mirrors 201 to 204 and is configured to illuminate a reticle 301 light collected by the collecting mirror 104 using the second reflective optical element 201 to 204, and a projection optical system configured to project a pattern of the reticle 301 onto a wafer 308. At a predetermined temperature, a first wavelength where a reflectance of light entering the collecting mirror 104 or the illumination system mirrors 201 to 204 at a predetermined angle is peaked is shorter than a second wavelength where a reflectance of light in the projection optical system is peaked.
摘要:
This invention generally relates to an exposure apparatus and an exposure method using EUV light. In one preferred form of the present invention, the exposure apparatus is arranged to expose a substrate to a pattern of an original by use of extreme ultraviolet light, and it includes a blaze type diffraction grating disposed so that light from a plasma light source is incident thereon, and an optical system for directing extreme ultraviolet light from the blaze type diffraction grating to at least one of the original and the substrate.
摘要:
Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.
摘要:
This invention relates to an anti-dementia agent which uses a BEC 1 potassium channel inhibitor as the active ingredient.It was proved that the BEC 1 potassium channel inhibitor has an action to improve learning disorder and is useful as a preventive or therapeutic agent for diseases, preferably dementia, in which the BEC 1 potassium channel is considered to be concerned.Illustratively, it was confirmed by an in vivo test that the BEC 1 potassium channel inhibitor has an action to improve learning disorder.Also, it was found that a compound having 2,4,6-triamino-1,3,5-triazine has a BEC 1 potassium channel inhibitory action.
摘要:
A lighting apparatus includes a substrate, a plurality of light-emitting chips and a light-emitting member. The substrate has a layer including a base material and a medium. The base material is formed of an inorganic material and includes a plurality of cells. The medium is provided in the cells and has a refractive index lower than that of the inorganic material. The light-emitting chips are made of a semiconductor material and mounted on the substrate. The light-emitting member includes a fluorescent material and is provided above the light-emitting chips.
摘要:
An active carbon produced from an infusible carbonaceous material as a raw material, which active carbon when used for prevention of automobile fuel evaporation, etc., would not cause any trouble attributed to dust generation, exhibiting reduced pressure loss; and a process for producing the same. There is provided a spherical active carbon produced from an infusible solid carbon material as a raw material, wherein providing that x represents an average particle diameter (mm) and y an MS hardness (%), when x is in the range of 0.5 to 20, y is ≧100×(1-0.8×1.45(0.3-x)). This spherical active carbon can be produced by a process comprising mixing a carbon material with a carbonizable binder; extruding the mixture into a strand form; carrying out rolling granulation so as to obtain a spherical form; rendering the same infusible under appropriate conditions corresponding to the particle size; and performing carbonization and thereafter activation under conditions appropriately restricting the contact with activation gas.
摘要:
A multilayer mirror used for EUV light includes a substrate, a reflection layer for reflecting the EUV light, a stress compensation layer, formed between the substrate and the reflection layer, for compensating a deformation of the substrate by the reflection layer, wherein the substrate has a first area, in which the stress compensation layer is layered but no reflection layer is layered.
摘要:
A novel polypeptide which is useful in searching for a therapeutic agent for diabetes, a polynucleotide encoding the polypeptide, an expression vector comprising the polynucleotide, a cell transfected with the expression vector, an antibody binding to the polypeptide, and a method of screening a therapeutic agent for diabetes are disclosed.The polypeptide is a novel background potassium channel expressed in the pancreas.
摘要:
An illumination optical system illuminates a surface to be illuminated. The illumination optical system includes a mirror having a surface effective to shape X-rays from a source into X-rays having an arcuate sectional shape, and an optical system for illuminating the surface to be illuminated, with the X-rays having an arcuate sectional shape from the mirror and in an oblique direction with respect to that surface.
摘要:
There is provided a method of screening for substance that inhibits cell death induced by activation of PARP, particularly a substance that is useful as a therapeutic and/or preventive agent for rheumatoid arthritis, neuronal death at the time of cerebral ischemia, cell death of the heart after myocardial infarction reperfusion, autoimmune destruction of β-cells of pancreatic islets of Langerhans, cell death after shock, or inflammatory reaction by immunocyte death. Also provided are a novel protein and a novel gene encoding the same. The aforementioned screening method comprises a step of allowing a test substance to contact a cell expressing an LTRPC2 protein under a conditions such that the LTRPC2 protein can be activated, and a step of analyzing inhibition of LTRPC2 protein activation. The aforementioned novel protein is a rat or mouse LTRPC2 protein, and the aforementioned novel gene is a rat or mouse LTRPC2 gene.