公开(公告)号：US07000463B1

公开(公告)日：2006-02-21

申请号：US10987719

申请日：2004-11-12

申请人： Ali Shajii ,  Paul Meneghini

发明人： Ali Shajii ,  Paul Meneghini

IPC分类号： G01F1/68

CPC分类号： G01F15/046 ,  G01F1/6847 ,  G01F1/6965 ,  G01F5/00

摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.

摘要翻译： 基于所有旁路误差是雷诺数的函数的事实，质量流量传感器使用雷诺数校正功能来补偿所有气体的传感器的旁路比的误差。 传感器包括传感器管和旁路管分流，其中传感器的旁路比等于通过传感器的总流量除以仅通过传感器管的流量。 加热元件加热传感器管的上游部分和下游部分，并且电路连接到加热器元件，用于基于加热器元件之间的电阻差产生电压。 基于参考气体的已知流速校准电压，并且通过传感器的流量基于校准电压乘以多气体校正功能和雷诺数校正功能。

公开(公告)号：US20050218361A1

公开(公告)日：2005-10-06

申请号：US10814973

申请日：2004-03-30

申请人： Ali Shajii ,  Ronald Collins ,  Matthew Besen

发明人： Ali Shajii ,  Ronald Collins ,  Matthew Besen

IPC分类号： F16K31/02 ,  F16K31/06 ,  F16K37/00

CPC分类号： F16K31/0665 ,  F16K31/0675 ,  F16K37/0041 ,  Y10S251/905

摘要： A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxially surrounding the porous tube and including an inlet port, and a valve member made of non-porous material received for sliding movement within the porous tube. Sliding movement of the valve member within the tube and towards the open end of the tube reduces the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly, while sliding movement of the valve member within the tube and away from the open end of the tube increases the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly.

摘要翻译： 一种用于控制预定流体流动的阀组件，包括具有形成出口的开口端的管，并且其中管由相对于预定流体多孔的材料制成，外壁形成流体室 同轴地围绕多孔管并且包括入口端口，以及由多孔材料制成的阀构件，用于在多孔管内滑动运动。 阀构件在管内并且朝向管的开口端的滑动运动通过多孔管和通过阀组件的出口减少了预定流体从流体室的流动，同时阀构件的滑动运动 管并且远离管的开口端增加了预定流体从流体室通过多孔管并通过阀组件的出口的流动。

公开(公告)号：US20050199287A1

公开(公告)日：2005-09-15

申请号：US10796723

申请日：2004-03-09

申请人： Ali Shajii ,  Siddharth Nagarkatti

发明人： Ali Shajii ,  Siddharth Nagarkatti

IPC分类号： F16K31/12 ,  F16K31/36 ,  G05D7/06

CPC分类号： G05D16/206 ,  G05D16/2053 ,  Y10T137/0396 ,  Y10T137/7761

摘要： A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for controlling the valves, and a zone pressure estimator. The zone pressure estimator is connected to the pressure transducers and is programmed to calculate an estimated pressure in each the i zones and provide the estimated pressures to the control device.

摘要翻译： 用于控制通过i线的流体流动的系统，其中i线分别通过管道连接到i区域，并且其中i = 1,2。 。 。 该系统包括在i行中的每一个中的至少一个阀和压力传感器，用于控制阀的控制装置和区域压力估计器。 区域压力估计器连接到压力传感器，并被编程为计算每个i区域中的估计压力，并将估计的压力提供给控制装置。

公开(公告)号：US06766260B2

公开(公告)日：2004-07-20

申请号：US10037882

申请日：2002-01-04

申请人： Jesse Ambrosina ,  Nicholas E. Kottenstette ,  Ali Shajii

发明人： Jesse Ambrosina ,  Nicholas E. Kottenstette ,  Ali Shajii

IPC分类号： G06F1900

CPC分类号： G01F1/68 ,  Y10T137/0363 ,  Y10T137/2529 ,  Y10T137/2657 ,  Y10T137/7761 ,  Y10T137/87877

摘要： A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.

摘要翻译： 一种用于分割单个质量流的系统，包括适于接收单个质量流的入口和连接到入口的至少两条流动管线。 每个流动管线包括流量计和阀。 该系统还包括被编程为接收通过用户界面的期望流量比的控制器，接收指示来自流量计的测量流量的信号，基于所测量的流量计算通过流动管线的流量的实际比率，并将实际 与所需比例的比值。 如果实际比例不等于期望的比率，则控制器还被编程为计算通过至少一个流线的期望流量，并且向至少一个阀提供指示期望流量的信号。

公开(公告)号：US06375348B1

公开(公告)日：2002-04-23

申请号：US09711646

申请日：2000-11-13

申请人： Jeffrey P. Hebb ,  Ali Shajii

发明人： Jeffrey P. Hebb ,  Ali Shajii

IPC分类号： G01N2500

CPC分类号： H01L22/26 ,  G01J5/0003 ,  H01L2924/0002 ,  H01L2924/00

摘要： A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the thermal processing apparatus, and then determines the reflectivity of the workpiece during processing within the heating chamber of the thermal processing apparatus by correlating the ex situ wafer reflectivity with the intensity of the radiation reflected from the wafer within the heating chamber.

摘要翻译： 一种用于在热处理装置的加热室中确定加工过程中工件的反射率的系统和方法。 该系统首先直接确定热处理装置的加热室外的工件的反射率，然后通过将非原位晶片的反射率与强度相关联来确定在热处理装置的加热室内的加工过程中工件的反射率 在加热室内从晶片反射的辐射。

公开(公告)号：US20140216560A1

公开(公告)日：2014-08-07

申请号：US14171433

申请日：2014-02-03

申请人： Jesse E. Ambrosina ,  Benjamin G. Powers ,  Ali Shajii

发明人： Jesse E. Ambrosina ,  Benjamin G. Powers ,  Ali Shajii

IPC分类号： G05D16/20

CPC分类号： A61M5/16886 ,  A61M5/1408 ,  A61M5/14224 ,  A61M5/14593 ,  A61M5/16809 ,  A61M5/16827 ,  A61M5/172 ,  A61M5/44 ,  A61M2005/14513 ,  A61M2205/3331 ,  A61M2205/3334 ,  A61M2205/3368 ,  A61M2205/50 ,  Y10T137/0379

摘要： In accordance with one embodiment, a controller in a fluid delivery system controls magnitudes of pressure in a first volume and a second volume. The first volume is of a known magnitude. The second volume is of an unknown magnitude and varies. The controller estimates a temperature of gas in the first volume and a temperature of gas in the second volume based on measurements of pressure in the first volume and measurements of pressure in the second volume. The controller then calculates a magnitude of the second volume based on measured pressures of the gases and estimated temperatures of gases in the first volume and the second volume.

摘要翻译： 根据一个实施例，流体输送系统中的控制器控制第一体积和第二体积中的压力的​​大小。 第一卷是已知的大小。 第二卷是一个未知数量并且变化。 控制器基于第一体积中的压力的​​测量和第二体积中的压力的​​测量来估计第一体积中的气体的温度和第二体积中的气体的温度。 然后，控制器基于测量的气体压力和第一体积和第二体积中的气体的估计温度来计算第二体积的大小。

公开(公告)号：US08003936B2

公开(公告)日：2011-08-23

申请号：US11869980

申请日：2007-10-10

申请人： Timothy Roger Robinson ,  Mark Attwood ,  Xing Chen ,  William M. Holber ,  Mark Philip Longson ,  Jonathan Henry Palk ,  Ali Shajii ,  John A. Smith

发明人： Timothy Roger Robinson ,  Mark Attwood ,  Xing Chen ,  William M. Holber ,  Mark Philip Longson ,  Jonathan Henry Palk ,  Ali Shajii ,  John A. Smith

IPC分类号： H01J49/26

CPC分类号： H01J49/145

摘要： A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.

摘要翻译： 描述了用于飞行时间质谱的系统及其组件和方法。 微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。 试剂离子进入室并与流体样品相互作用以形成产物离子。 试剂离子和产物离子被引导到飞行时间质谱仪模块，用于检测和确定离子的质量值。 飞行时间质谱模块可以包括用于根据指定图案聚焦，中断或改变试剂和产物离子流的光学系统和离子束调节器。 飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术，例如使用诸如最大似然信号处理的统计信号处理。

公开(公告)号：US08003935B2

公开(公告)日：2011-08-23

申请号：US11869978

申请日：2007-10-10

申请人： Timothy Roger Robinson ,  Mark Attwood ,  Xing Chen ,  William M. Holber ,  Mark Philip Longson ,  Jonathan Henry Palk ,  Ali Shajii ,  John A. Smith

发明人： Timothy Roger Robinson ,  Mark Attwood ,  Xing Chen ,  William M. Holber ,  Mark Philip Longson ,  Jonathan Henry Palk ,  Ali Shajii ,  John A. Smith

IPC分类号： H01J49/26

CPC分类号： H01J49/145

摘要： A system and methods are described for generating reagent ions and product ions for use in a quadruple mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a quadruple mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass values for ion species during spectrometry and faults within the system.

摘要翻译： 描述了用于产生用于四重质谱系统的试剂离子和产物离子的系统和方法。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室，由四重质谱仪模块进行检测。 该系统包括各种控制模块，用于设置系统参数值和分析模块，用于在光谱测定和系统内故障时检测离子物质的质量值。

公开(公告)号：US07552015B2

公开(公告)日：2009-06-23

申请号：US10178586

申请日：2002-06-24

申请人： Ali Shajii ,  Nicholas Kottenstette ,  Jesse Ambrosina

发明人： Ali Shajii ,  Nicholas Kottenstette ,  Jesse Ambrosina

IPC分类号： G01F7/00

CPC分类号： G01F25/0007 ,  G01F1/6847 ,  G01F5/00 ,  G05D7/0635 ,  Y10T137/0379 ,  Y10T137/7761

摘要： A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.

摘要翻译： 质量流量控制器包括感测质量流量控制器内的压力并显示压力的压力传感器。 压力显示可以是本地的，直接安装到质量流量控制器，或者它可以通过链接连接到质量流量控制器用于远程显示。

公开(公告)号：US20080091306A1

公开(公告)日：2008-04-17

申请号：US11950966

申请日：2007-12-05

申请人： Ali Shajii ,  Nicholas Kottenstette ,  Jesse Ambrosina

发明人： Ali Shajii ,  Nicholas Kottenstette ,  Jesse Ambrosina

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/776

摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

摘要翻译： 质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏​​感的质量流量控制器。 压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。 电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。