公开(公告)号：US07992976B2

公开(公告)日：2011-08-09

申请号：US11925627

申请日：2007-10-26

申请人： Hirotsuna Miura ,  Toshiyuki Kobayashi

发明人： Hirotsuna Miura ,  Toshiyuki Kobayashi

IPC分类号： B41J2/175 ,  B41J29/377

CPC分类号： B41J2/14274 ,  B41J2/175 ,  B41J29/38 ,  H05K3/1241

摘要： A method is for heating a functional liquid of a droplet discharging device that has a storage which houses a container storing a functional liquid containing a functional material; a droplet discharge head discharging the functional liquid in a droplet; a cooling means included to the storage and cooling the functional liquid; and a supply tube supplying the functional liquid that is cooled in the storage to the droplet discharge head. The method includes: heating the functional liquid in the supply tube with waste heat that is generated correspondingly to cooling of the cooling means.

摘要翻译： 一种用于加热液滴排出装置的功能液体的方法，所述液滴排放装置具有容纳容纳有包含功能材料的功能性液体的容器的储存器; 液滴排出头，其在液滴中排出功能液; 包括用于储存和冷却功能液体的冷却装置; 以及将在储存器中冷却的功能液体供给到液滴喷出头的供给管。 该方法包括：用对应于冷却装置的冷却产生的废热来加热供应管中的功能液体。

公开(公告)号：US07938526B2

公开(公告)日：2011-05-10

申请号：US11739623

申请日：2007-04-24

申请人： Hirotsuna Miura

发明人： Hirotsuna Miura

IPC分类号： B41J2/01 ,  B41J2/435 ,  B41J27/00

CPC分类号： B41J11/002 ,  H01L2224/48091 ,  H01L2224/48227 ,  H05K3/125 ,  H05K3/1283 ,  H05K2201/2054 ,  H05K2203/013 ,  H05K2203/107 ,  H01L2924/00014

摘要： A method of forming a pattern including: discharging a droplet of a pattern forming material onto a substrate; drying the droplet that has landed on the substrate; and forming a pattern on the substrate, the drying comprising: irradiating a region of the droplet with a laser beam launched by a laser source; and reflectively irradiating the region of the droplet again with the portions of the laser beam that have been either reflected or scattered from the region of the droplet.

摘要翻译： 一种形成图案的方法，包括：将图案形成材料的液滴排放到基板上; 干燥落在基板上的液滴; 并且在所述基板上形成图案，所述干燥包括：用激光源发射的激光束照射所述液滴的区域; 并且与激光束的已经从液滴的区域反射或散射的部分再次反射地照射液滴的区域。

公开(公告)号：US07776492B2

公开(公告)日：2010-08-17

申请号：US11367372

申请日：2006-03-06

申请人： Hirotsuna Miura

发明人： Hirotsuna Miura

IPC分类号： G03F1/00 ,  B41J2/01

CPC分类号： G03F1/56 ,  B41J2/01 ,  G03F1/54 ,  G03F1/68

摘要： A method of manufacturing a photomask includes: ejecting droplets of a liquid containing a light-shielding material at predetermined positions on a substrate using a droplet ejection method, and drying the liquid to form a light-shielding pattern on the substrate, the light-shielding pattern containing the light-shielding material.

摘要翻译： 制造光掩模的方法包括：使用液滴喷射法在基板上的预定位置喷射含有遮光材料的液滴，并干燥该液体以在该基板上形成遮光图案，该遮光层 包含遮光材料的图案。

公开(公告)号：US07484839B2

公开(公告)日：2009-02-03

申请号：US11366718

申请日：2006-03-02

申请人： Hirotsuna Miura

发明人： Hirotsuna Miura

IPC分类号： B41J2/01 ,  B41J2/15 ,  B41J2/135 ,  B41J2/05

CPC分类号： B41J2/16552 ,  B41J11/002 ,  G02F2001/133374

摘要： A moving distance is determined based on the time required by a deposited fine droplet to reach a target dot diameter and the velocity at which a movable stage is moved. An aperture is located at a position spaced from a nozzle, which ejects a droplet, by a distance equal to the moving distance. A light-transmissive liquid filling the aperture functions as a liquid lens for focusing a laser beam on a blot of a droplet. The light-transmissive liquid discharged from the aperture is used to clean a nozzle surface of an ejection head.

摘要翻译： 基于沉积的微细液滴达到目标点直径所需的时间和移动台移动的速度来确定移动距离。 孔位于与喷嘴间隔开的位置，其喷射液滴等于移动距离的距离。 填充孔的透光液体用作将激光束聚焦在液滴的印迹上的液体透镜。 从孔中排出的透光液体用于清洁喷射头的喷嘴表面。

公开(公告)号：US07267427B2

公开(公告)日：2007-09-11

申请号：US10889069

申请日：2004-07-13

申请人： Hirotsuna Miura ,  Nobuko Watanabe

发明人： Hirotsuna Miura ,  Nobuko Watanabe

IPC分类号： B41J2/14

CPC分类号： B41J2/1632 ,  B41J2/14233 ,  B41J2/1433 ,  B41J2/1606 ,  B41J2/162

摘要： The present invention is intended to provide a method of manufacturing an ink jet head having good stable-ejection characteristics, and an ink jet head. The invention is an exemplary method of manufacturing an ink jet head having a cavity that contains liquid and a nozzle that communicates with the cavity, and ejecting the liquid contained in the cavity from an ejection orifice of the nozzle with using a nozzle opening at an opposite side of the cavity as the ejection orifice. The exemplary method includes making an ejection orifice on a side of the nozzle have a taper portion in which the diameter increases progressively toward the ejection orifice side and forming lyophobic films and lyophilic films alternately on the taper portion inside the nozzle so as to form a stack film, and forming a lyophobic film inside nozzle in which annular end surfaces of the lyophobic films and annular end surfaces of the lyophilic films are exposed alternately by grinding the stack film on the taper portion to expose a side section of the stack film.

摘要翻译： 本发明旨在提供一种具有良好稳定喷射特性的喷墨头的制造方法和喷墨头。 本发明是一种制造喷墨头的示例性方法，其具有包含液体的空腔和与空腔连通的喷嘴，并且使用相反的喷嘴开口从喷嘴的喷射孔喷射容纳在空腔中的液体 作为喷射孔的腔的一侧。 该示例性方法包括在喷嘴侧制造喷射口具有锥形部分，其中直径朝向喷射口侧逐渐增加，并且在喷嘴内的锥形部分上交替形成疏液膜和亲液膜，以形成堆叠 膜，并且在喷嘴内形成疏液膜，其中疏液膜的环形端面和亲液膜的环形端面通过研磨锥形部分上的叠层膜而交替地暴露以暴露叠层膜的侧部。

公开(公告)号：US20070077367A1

公开(公告)日：2007-04-05

申请号：US11541938

申请日：2006-10-02

申请人： Hirotsuna Miura

发明人： Hirotsuna Miura

IPC分类号： B05D3/00 ,  B05B7/06 ,  B05B5/00

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J3/407 ,  B41J11/002 ,  H01L51/0005

摘要： A nozzle surface capable of reflecting a laser beam is formed on a surface of a liquid ejection head opposed to a substrate. A reflection preventing film is provided on the nozzle surface. The laser beam reflected by a reflective surface and the nozzle surface is attenuated through interference between light reflected by a surface of the reflection preventing film and light reflected by the nozzle surface.

摘要翻译： 在与基板相对的液体喷射头的表面上形成能够反射激光束的喷嘴表面。 在喷嘴表面上设置防反射膜。 由反射表面和喷嘴表面反射的激光束通过由防反射膜的表面反射的光与由喷嘴表面反射的光之间的干涉而衰减。

公开(公告)号：US20070054060A1

公开(公告)日：2007-03-08

申请号：US11593070

申请日：2006-11-06

申请人： Hirotsuna Miura

发明人： Hirotsuna Miura

IPC分类号： B05D1/02 ,  B05C5/00 ,  B32B9/00

CPC分类号： H01L51/0004 ,  H05K3/1241

摘要： Exemplary embodiments enable formation of a uniform film and a pattern with a minute line width and generate no or substantially no quality defects, such as disconnection. A droplet is discharged from a droplet discharging head to apply in a predetermined region on a surface of a substrate while relatively moving the droplet discharging head and the substrate. The droplet is discharged with respect to the surface of the substrate in a direction intersecting with a vertical direction, and when relatively moving the droplet discharging head and the substrate to discharge the droplet, the droplet is discharged along the relative movement direction.

摘要翻译： 示例性实施例能够形成均匀的膜和具有微小线宽的图案，并且不产生或基本上没有质量缺陷，例如断开。 从液滴喷射头排出液滴，同时在液滴喷射头和基板的相对移动的同时施加到基板的表面上的规定区域。 液滴相对于基板的表面在与垂直方向相交的方向上排出，当相对移动液滴喷射头和基板排出液滴时，液滴沿相对运动方向排出。

公开(公告)号：US20070052787A1

公开(公告)日：2007-03-08

申请号：US11599271

申请日：2006-11-15

申请人： Hirotsuna Miura ,  Masahiro Furusawa ,  Jun Amako

发明人： Hirotsuna Miura ,  Masahiro Furusawa ,  Jun Amako

IPC分类号： B41J2/01

CPC分类号： H05K3/125 ,  B41M3/006 ,  B41M7/0027 ,  B41M7/0081 ,  H01L21/288 ,  H01L51/0004 ,  H05K3/1283 ,  H05K2203/107

摘要： It is an object of the present invention to provide a method for fixing a functional material with good accuracy in a prescribed position on a fixing surface. In order to attain this object, the present invention provides a method for fixing a functional material, comprising a droplet ejection step of ejecting a droplet of a functional material dispersed in a solvent onto a fixing surface, and a drying step of locally heating the droplet ejected on the fixing surface and gasifying part of the droplet by irradiating the droplet with a laser beam. According to this method, the droplet can be dried rapidly, heating of the entire substrate is suppressed, and loss of alignment or breakage of wiring or the like caused by the expansion of substrate can be avoided.

摘要翻译： 本发明的目的是提供一种在固定表面上将规定位置的功能材料精度良好地固定的方法。 为了实现该目的，本发明提供一种固定功能材料的方法，包括将分散在溶剂中的功能材料的液滴喷射到固定表面上的液滴喷射步骤，以及局部加热液滴的干燥步骤 通过用激光束照射液滴而喷射在液滴的固定表面和气化部分上。 根据该方法，可以快速干燥液滴，抑制整个基板的加热，并且可以避免由于基板的膨胀引起的布线等的失调或断裂。

公开(公告)号：US20070052754A1

公开(公告)日：2007-03-08

申请号：US11594942

申请日：2006-11-09

申请人： Jun Amako ,  Hirotsuna Miura ,  Nobuko Watanabe

发明人： Jun Amako ,  Hirotsuna Miura ,  Nobuko Watanabe

IPC分类号： B41J2/135

CPC分类号： B41J2/1634 ,  B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2002/14475

摘要： To provide an ink jet head having a good stability of ejection and a method of manufacturing the ink jet head, a method of manufacturing an ink jet head that includes a cavity and a nozzle connected to the cavity and ejects fluid contained in the cavity from an ejection opening that is an opening provided on a side of the nozzle opposite to the cavity An inside-nozzle lyophobic film is formed in the vicinity of the ejection opening and on the inside wall of the nozzle, the inside-nozzle lyophobic film providing a large difference between an advancing contact angle and a receding contact angle for the liquid to be ejected.

摘要翻译： 为了提供具有良好的喷射稳定性的喷墨头和制造喷墨头的方法，一种制造喷墨头的方法，该喷墨头包括腔体和连接到腔体的喷嘴，并将包含在空腔中的流体从 喷射口是设置在与喷嘴相对的喷嘴侧的开口。在喷射口附近和喷嘴的内壁上形成内喷嘴疏液膜，内喷嘴疏液膜提供大的 推进接触角与待喷射液体的后退接触角之间的差。

公开(公告)号：US07051773B2

公开(公告)日：2006-05-30

申请号：US10679949

申请日：2003-10-06

申请人： Nobuko Watanabe ,  Takeo Kawase ,  Hirotsuna Miura

发明人： Nobuko Watanabe ,  Takeo Kawase ,  Hirotsuna Miura

IPC分类号： B67C3/26

CPC分类号： B01L3/0268 ,  B01L2200/0642 ,  B01L2200/0684 ,  B01L2400/0439 ,  B01L2400/0487 ,  B41J2/17506 ,  G01N35/1065

摘要： A liquid filling apparatus includes a discharge head having a cavity for storing liquid, a nozzle communicated with the cavity, and a discharge device for discharging liquid stored in the cavity through the nozzle. In addition, the apparatus includes a liquid supply section which supplies the liquid to the nozzle of the discharge head by contacting the liquid with the nozzle, and a suction device connected to a cavity side of the discharge head, which draws liquid supplied from the liquid supply section to inside the cavity, by suction from the nozzle via the cavity.

摘要翻译： 液体填充装置包括具有用于储存液体的空腔，与空腔连通的喷嘴的排出头和用于通过喷嘴排出存储在空腔中的液体的排出装置。 此外，该装置包括：液体供应部，其通过使液体与喷嘴接触而将液体供给到排出头的喷嘴;以及抽吸装置，其连接到排出头的空腔侧，该抽吸装置将从液体供应的液体 供应部分通过空腔从喷嘴吸入腔内。