公开(公告)号：US5496436A

公开(公告)日：1996-03-05

申请号：US259989

申请日：1994-06-15

Applicant: Jonathan J. Bernstein ,  Marc S. Weinberg

Inventor： Jonathan J. Bernstein ,  Marc S. Weinberg

IPC: G01C19/5719 ,  G01P15/08 ,  H03H9/02 ,  H01L21/3065 ,  H01L21/00

CPC classification number: G01C19/5719 ,  G01P15/0802 ,  G01R33/0286 ,  H03H9/02259 ,  G01P2015/0814 ,  H03H2009/02354 ,  H03H2009/02496

Abstract: A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

Abstract translation: 一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。 振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。 附加的质量形成在振动元件上以提高传感器的灵敏度。 用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。 驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。 在支撑电极和感测电极之间提供激励。 由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。 可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

公开(公告)号：US4705659A

公开(公告)日：1987-11-10

申请号：US882864

申请日：1986-07-07

Applicant: Jonathan J. Bernstein ,  T. Bruce Koger ,  Charles S. Chanley

Inventor： Jonathan J. Bernstein ,  T. Bruce Koger ,  Charles S. Chanley

IPC: C23C16/01 ,  G01P15/08 ,  H01L31/0368 ,  B29C41/22

CPC classification number: H01L31/03682 ,  C23C16/01 ,  G01P15/0802 ,  Y02E10/546

Abstract: A process is disclosed for fabricating a free-standing thin or thick film structure. One embodiment of the process includes the steps of providing a substrate of a first refractory material, forming a layer of carbon on the substrate, and depositing a film of a second refractory material on top of the layer of carbon. This sandwich structure is heated in an oxidizing ambient to cause the oxidation of the carbon layer leaving the second refractory material as a free-standing film.

Abstract translation: 公开了用于制造独立的薄膜或厚膜结构的方法。 该方法的一个实施方案包括以下步骤：提供第一耐火材料的基材，在基材上形成一层碳，并在第二层碳上沉积第二耐火材料的薄膜。 这种夹层结构在氧化环境中被加热，导致作为自立式膜离开第二耐火材料的碳层的氧化。