公开(公告)号：US06311557B1

公开(公告)日：2001-11-06

申请号：US09405461

申请日：1999-09-24

申请人： J. Kenneth Davis ,  Thomas G. Thundat ,  Eric A. Wachter

发明人： J. Kenneth Davis ,  Thomas G. Thundat ,  Eric A. Wachter

IPC分类号： G01P1508

CPC分类号： G01H1/14 ,  B06B1/0603 ,  G01H3/08 ,  G01H9/00

摘要： Methods and apparatus for detecting particular frequencies of vibration utilize a magnetically-tunable beam element having a stress-sensitive coating and means for providing magnetic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the magnetically-tunable beam element to the vibration to which the beam is exposed whether or not a particular frequency or frequencies of vibration are detected.

摘要翻译： 用于检测特定振动频率的方法和装置利用具有应力敏感涂层的磁可调波束元件，以及用于提供磁力以可控地偏转梁元件从而改变其刚度及其共振频率的装置。 然后，根据磁力可调波束元件对波束曝光的振动的响应，确定是否检测到特定频率或振动频率。

公开(公告)号：US06212939B1

公开(公告)日：2001-04-10

申请号：US09405473

申请日：1999-09-24

申请人： Thomas G. Thundat

发明人： Thomas G. Thundat

IPC分类号： G01N3700

CPC分类号： G01N33/0031 ,  G01N21/63

摘要： A method and device are provided for chemical sensing using cantilevers that do not use chemically deposited, chemically specific layers. This novel device utilizes the adsorption-induced variation in the surfaces states on a cantilever. The methodology involves exciting charge carriers into or out of the surface states with photons having increasing discrete levels of energy. The excitation energy is provided as discrete levels of photon energy by scanning the wavelength of an exciting source that is illuminating the cantilever surface. When the charge carriers are excited into or out of the surface states, the cantilever bending changes due to changes in surface stress. The amount of cantilever bending with respect to an identical cantilever as a function of excitation energy is used to determine the energy levels associated with adsorbates.

摘要翻译： 提供了使用不使用化学沉积的化学特定层的悬臂进行化学感测的方法和装置。 这种新颖的装置利用悬臂梁上表面状态的吸附诱导变化。 该方法涉及使具有增加的离散能量水平的光子激发电荷载流子进入或离开表面状态。 通过扫描照射悬臂表面的激发源的波长，激发能量被提供为离子水平的光子能量。 当载流子被激发进入或离开表面状态时，悬臂弯曲由于表面应力的变化而变化。 使用相对于作为激发能的函数的相同悬臂的悬臂弯曲量来确定与吸附物相关的能级。

公开(公告)号：US5719324A

公开(公告)日：1998-02-17

申请号：US491203

申请日：1995-06-16

申请人： Thomas G. Thundat ,  Eric A. Wachter

发明人： Thomas G. Thundat ,  Eric A. Wachter

IPC分类号： B81B3/00 ,  G01N27/00 ,  G01Q20/02

CPC分类号： G01N29/022 ,  B82Y35/00 ,  G01N2291/0256

摘要： An improved microcantilever sensor is fabricated with at least one microcantilever attached to a piezoelectric transducer. The microcantilever is partially surface treated with a compound selective substance having substantially exclusive affinity for a targeted compound in a monitored atmosphere. The microcantilever sensor is also provided with a frequency detection means and a bending detection means. The frequency detection means is capable of detecting changes in the resonance frequency of the vibrated microcantilever in the monitored atmosphere. The bending detection means is capable of detecting changes in the bending of the vibrated microcantilever in the monitored atmosphere coactively with the frequency detection means. The piezoelectric transducer is excited by an oscillator means which provides a signal driving the transducer at a resonance frequency inducing a predetermined order of resonance on the partially treated microcantilever. Upon insertion into a monitored atmosphere, molecules of the targeted chemical attach to the treated regions of the microcantilever resulting in a change in oscillating mass as well as a change in microcantilever spring constant thereby influencing the resonant frequency of the microcantilever oscillation. Furthermore, the molecular attachment of the target chemical to the treated regions induce areas of mechanical strain in the microcantilever consistent with the treated regions thereby influencing microcantilever bending. The rate at which the treated microcantilever accumulates the target chemical is a function of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change and bending is related to the concentration of target chemical within the monitored atmosphere.

摘要翻译： 制造改进的微悬臂梁传感器，其具有连接到压电换能器的至少一个微悬臂梁。 微型悬臂梁在被监测的气氛中对目标化合物具有基本上独特亲和性的化合物选择性物质进行部分表面处理。 微悬臂传感器还具有频率检测装置和弯曲检测装置。 频率检测装置能够检测所监视的气氛中的振动微悬臂梁的共振频率的变化。 弯曲检测装置能够与频率检测装置一起检测被监视气氛中的振动微悬臂梁的弯曲变化。 压电换能器由振荡器装置激励，该振荡器装置提供以共振频率驱动换能器的信号，该谐振频率在部分处理的微悬臂梁上引起预定的谐振次数。 当插入到监测的气氛中时，目标化学物质的分子附着到微悬臂梁的处理区域，导致振荡质量的变化以及微悬臂弹簧常数的变化，从而影响微悬臂梁振荡的谐振频率。 此外，目标化学物质与处理区域的分子连接在微悬臂梁中引起与处理区域一致的机械应变区域，从而影响微悬臂梁弯曲。 处理过的微量悬浮液累积目标化学物质的速率是目标化学物质浓度的函数。 因此，微悬臂梁振荡频率变化和弯曲的程度与被监测气氛中目标化学物质的浓度有关。