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公开(公告)号：US09621775B2
公开(公告)日：2017-04-11
申请号：US14819413
申请日：2015-08-05
Applicant: MEMS DRIVE, INC.
Inventor： Matthew Ng , Roman Gutierrez , Guiqin Wang
CPC classification number: H04N5/2328 , B81B3/0021 , B81B3/007 , B81B2203/0163 , B81B2207/07 , H02N1/008 , H04N5/225 , H04N5/2254 , H04N5/335 , Y10T29/49107
Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.
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公开(公告)号：US09617142B1
公开(公告)日：2017-04-11
申请号：US14872123
申请日：2015-09-30
Applicant: MEMS DRIVE, INC.
Inventor： Roman Gutierrez , Tony Tang , Xiaolei Liu , Guiqin Wang , Matthew Ng
CPC classification number: H01L21/76816 , B81B3/0045 , B81B7/0029 , B81B2203/0353 , B81C1/00674 , B81C1/00682 , B81C2201/0112 , B81C2201/0135 , H01L21/768 , H01L21/76898 , H01L23/485 , H01L2924/00 , H01L2924/00014 , H01L2924/0002 , H01L2924/1461 , H01L2924/181
Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
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