Moving apparatus, exposure apparatus, and device manufacturing method
    41.
    发明授权
    Moving apparatus, exposure apparatus, and device manufacturing method 有权
    移动装置,曝光装置和装置制造方法

    公开(公告)号:US07586218B2

    公开(公告)日:2009-09-08

    申请号:US11947024

    申请日:2007-11-29

    申请人: Hiroyuki Koide

    发明人: Hiroyuki Koide

    IPC分类号: H02K41/00

    摘要: A moving apparatus including a movable portion which is supported so as to move in a first direction, a first actuator having a movable element and a stator, the movable element being connected to the movable portion, a reference structure which has a guide surface parallel to the first direction and which supports the stator in the first direction, a second actuator configured to drive the stator in a rotation direction around an axis which is perpendicular to the guide surface, and a control unit configured to control the second actuator so as to suppress the rotation of the stator accompanied by the movement of the movable portion.

    摘要翻译: 一种移动装置,包括被支撑为沿第一方向移动的可移动部分,具有可移动元件和定子的第一致动器,所述可移动元件连接到所述可动部分,参考结构具有与 所述第一方向并且在所述第一方向上支撑所述定子;第二致动器,被配置为围绕垂直于所述引导表面的轴线沿旋转方向驱动所述定子;以及控制单元,被配置为控制所述第二致动器以抑制 定子的旋转伴随着可动部分的移动。

    Traveling system for mobile bodies and control method therefor
    42.
    发明申请
    Traveling system for mobile bodies and control method therefor 有权
    移动体旅行系统及其控制方法

    公开(公告)号:US20080055103A1

    公开(公告)日:2008-03-06

    申请号:US11899134

    申请日:2007-09-04

    申请人: Hiroyuki Koide

    发明人: Hiroyuki Koide

    IPC分类号: G08B21/00

    摘要: A traveling system for mobile bodies includes a control device for controlling traveling operation of a first and a second mobile bodies based on detection information provided by a relative distance detecting device mounted on only one of the first and second mobile bodies for detecting a distance to the other of the first and second mobile bodies, a first distance detecting device for detecting a distance between the first mobile body and a first reference position, and a second distance detecting device for detecting a distance between the second mobile body and a second reference position. The control device determines, based on distance information between the first reference position and second reference position, whether the detection information provided by each of the first and second distance detecting devices and detection information provided by the relative distance detecting device satisfy a proper determination condition, and stops movement of the first and second mobile bodies when it is determined that the proper determination condition is not satisfied.

    摘要翻译: 用于移动体的移动系统包括:控制装置,用于根据仅安装在第一和第二移动体中的一个上的相对距离检测装置提供的检测信息来控制第一和第二移动体的行进操作, 第一和第二移动体中的另一个,用于检测第一移动体与第一基准位置之间的距离的第一距离检测装置和用于检测第二移动体与第二参考位置之间的距离的第二距离检测装置。 控制装置基于第一基准位置与第二基准位置之间的距离信息,判定由第一和第二距离检测装置提供的检测信息以及由相对距离检测装置提供的检测信息是否满足适当的判定条件, 并且当确定不满足适当的确定条件时,停止第一和第二移动体的移动。

    Apparatus for sintering a porous glass base material and a method therefor
    47.
    发明授权
    Apparatus for sintering a porous glass base material and a method therefor 有权
    用于烧结多孔玻璃基材的设备及其方法

    公开(公告)号:US06442978B1

    公开(公告)日:2002-09-03

    申请号:US09520966

    申请日:2000-03-08

    IPC分类号: C03B3707

    摘要: Apparatus (700) for sintering a glass base material (2) which is a base material for an optical fiber. The sintering apparatus (700) includes: a control unit which varies a condition for sintering the glass base material; and a furnace (12) which sinters the glass base material by heating the glass base material in an atmosphere of dehydration gas and inert gas. The control unit includes a drive source (3) which supplies the glass base material to the furnace at various speeds. The control unit includes a temperature control unit which controls the temperature of a heating source provided in the furnace.

    摘要翻译: 用于烧结作为光纤基材的玻璃基材(2)的设备(700)。 烧结装置(700)包括:控制单元,其改变用于烧结玻璃基材的状态; 以及通过在脱水气体和惰性气体的气氛中加热玻璃基材来烧结玻璃基材的炉(12)。 控制单元包括以各种速度将玻璃基材供应到炉的驱动源(3)。 控制单元包括控制设置在炉中的加热源的温度的温度控制单元。