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公开(公告)号：US20050186356A1
公开(公告)日：2005-08-25
申请号：US11050769
申请日：2005-02-07
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.
摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部 材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。
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公开(公告)号：US20050175791A1
公开(公告)日：2005-08-11
申请号：US11048728
申请日：2005-02-03
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.
摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括形成为凹凸图案的记录层并且具有良好的记录和再现特性的磁记录介质。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以填充凹凸图案的凹部， 磁性材料; 以及通过干蚀刻去除记录层上方的非磁性材料的多余部分以平坦化非磁性材料和记录层的表面的平整步骤。 扁平化步骤包括前一个平整步骤和后整理步骤。
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公开(公告)号：US20050045581A1
公开(公告)日：2005-03-03
申请号：US10924803
申请日：2004-08-25
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
摘要： A method for manufacturing a magnetic recording medium is provided, by which the magnetic recording medium having a recording layer formed into a predetermined concavo-convex pattern and an adequately flat surface can be efficiently and certainly manufactured. Particles of a non-magnetic material are applied to a member to be processed from a direction relatively inclined with respect to a normal to the surface of the member to be processed. Also, the member to be processed is rotated around a central axis which is inclined with respect to an application direction of the particles of the non-magnetic material, to fill recessed portions of the concavo-convex pattern with the non-magnetic material.
摘要翻译： 提供了一种用于制造磁记录介质的方法，通过该方法可以有效且可靠地制造具有形成预定凹凸图案和足够平坦表面的记录层的磁记录介质。 非磁性材料的颗粒从相对于待加工构件的表面的法线相对倾斜的方向施加到待加工构件。 此外，待处理的构件围绕相对于非磁性材料的颗粒的施加方向倾斜的中心轴旋转，以用非磁性材料填充凹凸图案的凹部。
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44.发明授权公开(公告)号：US07682713B2
公开(公告)日：2010-03-23
申请号：US11222761
申请日：2005-09-12
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855
摘要： The magnetic recording medium includes: recording elements formed as the convex portions of the recording layer formed in the predetermined concavo-convex pattern over a substrate; and a filling elements with which a concave portions between the recording elements are filled. A surface concave portion is formed in a surface of the magnetic recording medium above the recording element. The surface concave portion has a cross-sectional shape of which a portion corresponding to a center of the recording element lying thereunder in a width direction thereof is recessed deepest toward the substrate, and has a width monotonically increasing with increase of a distance from the substrate.
摘要翻译： 磁记录介质包括：在衬底上形成为以预定凹凸图案形成的记录层的凸部的记录元件; 以及填充元件，通过该填充元件填充记录元件之间的凹部。 表面凹部形成在记录元件上方的磁记录介质的表面上。 表面凹部具有截面形状，其与位于其下方的记录元件的沿其宽度方向的中心相对应的部分最深地朝向衬底凹入，并且随着距离衬底的距离的增加而具有单调增加的宽度 。
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45.发明申请公开(公告)号：US20090310255A1
公开(公告)日：2009-12-17
申请号：US12457194
申请日：2009-06-03
IPC分类号： G11B5/127
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译： 提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。 磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。 填料部分包括金属基填料和氧气。 氧气在填料部分中不均匀分布，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在 填充部分的下部。
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46.发明授权公开(公告)号：US07616404B2
公开(公告)日：2009-11-10
申请号：US12004074
申请日：2007-12-20
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
IPC分类号： G11B5/82
摘要： The magnetic recording medium includes a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, and the recording layer includes recording elements each formed as a convex portion of the recording layer. Surface steps are formed in an inner area including a radially innermost portion of a recording area. Each surface step is formed in such a manner that a portion over a concave portion between the recording elements is recessed toward a substrate to a level below a portion over the recording element. The surface steps are formed such that the recording area can be sectioned into an annular area adjoining the inner area and the inner area where height of the surface steps is larger than that in the annular area.
摘要翻译： 磁记录介质包括在基板上形成为预定的凹凸图案的基板和记录层，记录层包括各自形成为记录层的凸部的记录元件。 在包括记录区域的径向最内部的内部区域中形成表面台阶。 每个表面台阶形成为使得记录元件之间的凹部上方的部分朝向基板凹陷到记录元件上方的一级以下。 表面台阶形成为使得记录区域可以被分割成与内部区域相邻的环形区域和表面台阶的高度大于环形区域中的高度的内部区域。
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公开(公告)号：US20090242508A1
公开(公告)日：2009-10-01
申请号：US12382653
申请日：2009-03-20
IPC分类号： B44C1/22
摘要： A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).
摘要翻译： 不同于第一掩模层（临时涂层材料）的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分，使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后，通过干式蚀刻法除去第一掩模层，该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体，并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率，并且对于记录层（与记录元件上的第一掩模层的下表面接触的下层）的填充材料的蚀刻速率高。
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48.发明授权公开(公告)号：US07494727B2
公开(公告)日：2009-02-24
申请号：US11187912
申请日：2005-07-25
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
CPC分类号： G11B5/855
摘要： A magnetic recording medium in which a recording layer is formed in a predetermined concavo-convex pattern and recording and reproducing apparatus comprising the magnetic recording medium are disclosed. The magnetic recording medium has a high areal density and high reliability since the occurrence of a crash of a magnetic head is suppressed. The magnetic recording medium comprises a recording layer formed over a substrate in a predetermined concavo-convex pattern to form recording elements as a convex portion of the concavo-convex pattern and a non-magnetic filler element filled in a concave portion between the recording elements. In this configuration, the top surface of the filler element is formed in a shape partially recessed toward the substrate side to form a groove having a width smaller than the width of the concave portion on the surface of the magnetic recording medium.
摘要翻译： 公开了一种其中以预定的凹凸图案形成记录层的磁记录介质和包括该磁记录介质的记录和再现装置。 磁记录介质由于磁头碰撞的发生被抑制而具有高的面密度和高的可靠性。 磁记录介质包括以预定的凹凸图案形成在基板上的记录层，以形成作为凹凸图案的凸部的记录元件和填充在记录元件之间的凹部中的非磁性填充元件。 在这种构造中，填充元件的顶表面形成为朝向基板侧部分地凹陷的形状，以形成宽度小于磁记录介质表面上的凹部的宽度的凹槽。
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49.发明授权公开(公告)号：US07474506B2
公开(公告)日：2009-01-06
申请号：US11265260
申请日：2005-11-03
申请人： Yoshikazu Soeno , Takahiro Suwa
发明人： Yoshikazu Soeno , Takahiro Suwa
IPC分类号： G11B5/82
摘要： In a magnetic recording medium including a servo pattern region having a servo pattern formed of a concave/convex pattern having convex portions and concave portions and a data recording region, the region having a data track pattern, the concave portions are formed in an address pattern region of the servo pattern region such that the maximum lengths, which are located in the respective same radius regions of the respective lengths along the rotating direction of a substrate of the projecting end surfaces of the convex portions constituting the concave/convex pattern are set to first lengths that are double the minimum lengths along the rotating direction of the projecting end surfaces of the convex portions in the respective same radius regions. With this arrangement, the magnetic recording medium can securely read a magnetic signal and has a servo pattern having excellent surface smoothness.
摘要翻译： 在包括具有由具有凸部和凹部的凹凸图案形成的伺服图案的伺服图案区域和数据记录区域的磁记录介质中，所述区域具有数据轨道图案，所述凹部以地址图形形成 区域，使得位于构成凹凸图案的凸部的突出端面的基板的旋转方向的各长度的各个相同的半径区域中的最大长度被设定为 第一长度是在相同的半径区域中凸部的突出端面的旋转方向的最小长度的两倍。 通过这种布置，磁记录介质可以安全地读取磁信号并具有具有优异表面平滑度的伺服图案。
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50.发明申请公开(公告)号：US20080212231A1
公开(公告)日：2008-09-04
申请号：US12003919
申请日：2008-01-03
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
摘要： The magnetic recording medium includes a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer. Surface steps are formed in an outer area including a radially outermost portion of a recording area. Each surface step is formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element. The surface steps are formed such that the recording area can be sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps is larger than that in the annular area.
摘要翻译： 磁记录介质包括基板和在基板上以预定的凹凸图案形成的记录层，记录层包括各自形成为记录层的凸部的记录元件。 表面台阶形成在包括记录区域的径向最外侧部分的外部区域中。 每个表面台阶形成为使得记录元件之间的凹部上方的部分朝向基板凹陷到记录元件上方的一个以下的水平。 表面台阶形成为使得记录区域可以被分割成与外部区域相邻的环形区域和表面台阶的高度大于环形区域中的高度的外部区域。
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