公开(公告)号：US20190238114A1

公开(公告)日：2019-08-01

申请号：US16375871

申请日：2019-04-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Tetsuya KIMURA

IPC: H03H9/145 ,  H03H9/02 ,  H03H9/64

CPC classification number: H03H9/145 ,  H03H9/02007 ,  H03H9/25 ,  H03H9/64

Abstract: An elastic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction. The piezoelectric substrate includes a groove extending along the elastic wave propagation direction. The groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the electrode fingers are located.

公开(公告)号：US20180152171A1

公开(公告)日：2018-05-31

申请号：US15879467

申请日：2018-01-25

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Masashi OMURA ,  Tetsuya KIMURA

IPC: H03H9/145 ,  H03H9/25 ,  H03H9/02 ,  H03H9/05

CPC classification number: H03H9/145 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/02574 ,  H03H9/05 ,  H03H9/173 ,  H03H9/175 ,  H03H9/25 ,  H03H2003/025

Abstract: An elastic wave device includes an interdigital transducer electrode including electrode fingers provided on a first principal surface of a piezoelectric thin film. A conductive layer is provided on a second principal surface of the piezoelectric thin film. An elastic wave propagates in the piezoelectric thin film in an S0 mode of a plate wave, and a piezoelectric thin film portion in a region below spaces between the electrode fingers of the interdigital transducer electrode is displaced by a greater amount than each electrode finger and a piezoelectric thin film portion in a region below each electrode finger.

公开(公告)号：US20170179925A1

公开(公告)日：2017-06-22

申请号：US15448633

申请日：2017-03-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO

IPC: H03H9/17 ,  H03H3/02

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H9/0222 ,  H03H9/173 ,  H03H9/175 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/025

Abstract: In a method of manufacturing a piezoelectric device in which a piezoelectric thin film on which functional conductors are formed is fixed to a support substrate by a fixing layer, an alignment mark is formed on one main surface of a light-transmitting piezoelectric substrate. A sacrificial layer is formed on a main surface of the piezoelectric substrate with reference to the alignment mark and the fixing layer is formed so as to cover the sacrificial layer and is bonded to the support substrate. The piezoelectric thin film is formed by being separated from the piezoelectric substrate and the functional conductors are formed on the surface of the piezoelectric thin film with reference to the alignment mark. The piezoelectric device is able to be manufactured while positions of formation regions of conductors are adjusted efficiently.