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公开(公告)号：US11418888B2
公开(公告)日：2022-08-16
申请号：US16749579
申请日：2020-01-22
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Fabrizio Cerini , Enri Duqi , Silvia Adorno , Lorenzo Baldo
Abstract: An actuation structure of a MEMS electroacoustic transducer is formed in a die of semiconductor material having a monolithic body with a front surface and a rear surface extending in a horizontal plane x-y plane and defined in which are: a frame; an actuator element arranged in a central opening defined by the frame; cantilever elements, coupled at the front surface between the actuator element and the frame; and piezoelectric regions arranged on the cantilever elements and configured to be biased to cause a deformation of the cantilever elements by the piezoelectric effect. A first stopper arrangement is integrated in the die and configured to interact with the cantilever elements to limit a movement thereof in a first direction of a vertical axis orthogonal to the horizontal plane, x-y plane towards the underlying central opening.
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42.发明授权公开(公告)号：US11254561B2
公开(公告)日：2022-02-22
申请号：US16730480
申请日：2019-12-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Bruno Murari , Sebastiano Conti
Abstract: A packaged pressure sensor, comprising: a MEMS pressure-sensor chip; and an encapsulating layer of elastomeric material, in particular PDMS, which extends over the MEMS pressure-sensor chip and forms a means for transferring a force, applied on a surface thereof, towards the MEMS pressure-sensor chip.
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公开(公告)号：US10962431B2
公开(公告)日：2021-03-30
申请号：US16220498
申请日：2018-12-14
Applicant: STMicroelectronics S.R.L.
Inventor： Enri Duqi , Sebastiano Conti , Sonia Costantini
Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.
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公开(公告)号：US20200024132A1
公开(公告)日：2020-01-23
申请号：US16207035
申请日：2018-11-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Lorenzo Baldo , Enri Duqi , Flavio Francesco Villa
Abstract: A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
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Patent Agency Ranking
45.发明申请公开(公告)号：US20190219468A1
公开(公告)日：2019-07-18
申请号：US16248415
申请日：2019-01-15
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo
CPC classification number: G01L27/002 , G01L9/0054 , G01L27/007
Abstract: A microelectromechanical pressure sensor includes a monolithic body of semiconductor material having a front surface. A sensing structure is integrated in the monolithic body and has a buried cavity completely contained within the monolithic body at the front surface. A sensing membrane is suspended above the buried cavity and is formed by a surface portion of the monolithic body. Sensing elements of a piezoresistive type are arranged in the sensing membrane to detect a deformation of the sensing membrane as a result of a pressure. The pressure sensor is further provided with a self-test structure integrated within the monolithic body to cause application of a testing deformation of the sensing membrane in order to verify proper operation of the sensing structure.
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公开(公告)号：US10150666B2
公开(公告)日：2018-12-11
申请号：US15602760
申请日：2017-05-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Lorenzo Baldo , Enri Duqi , Flavio Francesco Villa
Abstract: A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.
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公开(公告)号：US10101578B2
公开(公告)日：2018-10-16
申请号：US15368184
申请日：2016-12-02
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Roberto Carminati , Enri Duqi , Sebastiano Conti
Abstract: A micro-electro-mechanical device, wherein a platform is formed in a top substrate and is configured to turn through a rotation angle. The platform has a slit and faces a cavity. A plurality of integrated photodetectors is formed in a bottom substrate so as to detect the light through the slit and generate signals correlated to the light through the slit. The area of the slit varies with the rotation angle of the platform and causes diffraction, more or less marked as a function of the angle. The difference between the signals of two photodetectors arranged at different positions with respect to the slit yields the angle.
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48.发明授权公开(公告)号：US09914639B2
公开(公告)日：2018-03-13
申请号：US15074755
申请日：2016-03-18
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Sebastiano Conti
CPC classification number: B81B7/0054 , B81B3/0051 , B81B7/0048 , B81B7/008 , B81B2201/0264 , B81C1/00325 , H01L2224/48091 , H01L2924/00014
Abstract: A MEMS device is provided with: a supporting base, having a bottom surface in contact with an external environment; a sensor die, which is of semiconductor material and integrates a micromechanical detection structure; a sensor frame, which is arranged around the sensor die and is mechanically coupled to a top surface of the supporting base; and a cap, which is arranged above the sensor die and is mechanically coupled to a top surface of the sensor frame, a top surface of the cap being in contact with an external environment. The sensor die is mechanically decoupled from the sensor frame.
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49.发明申请PRESSURE SENSOR GENERATING A TRANSDUCED SIGNAL WITH REDUCED AMBIENT TEMPERATURE DEPENDENCE, AND MANUFACTURING METHOD THEREOF 审中-公开压力传感器产生具有降低环境温度依赖性的转换信号及其制造方法公开(公告)号：US20160370242A1
公开(公告)日：2016-12-22
申请号：US14980373
申请日：2015-12-28
Applicant: STMicroelectronics S.R.L.
Inventor： Enri Duqi , Sebastiano Conti , Sonia Costantini
Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.
Abstract translation: 设计用于检测压力传感器外部环境环境压力值的压力传感器包括：第一衬底，其具有掩埋腔和悬挂在掩埋腔上的膜; 具有凹部的第二基板，气密地联接到所述第一基板，使得所述凹部限定其内部压力值提供压力参考值的密封空腔; 以及至少部分地形成在所述第一基板中并且被配置为将所述掩埋腔布置成与所述压力传感器外部的环境连通的通道。 膜作为密封腔中的压力参考值与埋入腔中的环境压力值之间的压力差的函数发生偏转。
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