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136 条记录 (耗时 0.043 秒)

    Performance analyses of micromirror devices
    41.
    发明授权
    Performance analyses of micromirror devices 有权
    微镜器件的性能分析

    公开(公告)号：US07483126B2

    公开(公告)日：2009-01-27

    申请号：US10875760

    申请日：2004-06-23

    申请人： Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    发明人： Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    IPC分类号： G01N21/88 ,  G02B26/00

    CPC分类号： G01N21/55 ,  G01N21/95

    摘要： The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.

    摘要翻译： 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。

    Micromirror and post arrangements on substrates
    43.
    发明授权
    Micromirror and post arrangements on substrates 有权

    公开(公告)号：US07042622B2

    公开(公告)日：2006-05-09

    申请号：US10698563

    申请日：2003-10-30

    申请人： Andrew Huibers ,  Satyadev Patel

    发明人： Andrew Huibers ,  Satyadev Patel

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

    LIGHT BLOCKING LAYERS IN MEMS PACKAGES
    44.
    发明申请
    LIGHT BLOCKING LAYERS IN MEMS PACKAGES 有权
    MEMS封装中的闭锁层

    公开(公告)号：US20060082859A1

    公开(公告)日：2006-04-20

    申请号：US10969258

    申请日：2004-10-19

    申请人： Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

    发明人： Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0833

    摘要： Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.

    摘要翻译： 本文公开了一种微镜阵列器件封装，其具有设置在封装内的光吸收材料，用于减少不期望的光散射。 光吸收材料可以作为薄膜（或条，框架，段或其组合）沉积，或者作为微镜阵列器件和封装的覆盖衬底之间的垂直壁插入物沉积。

    Micromirror and post arrangements on substrates
    47.
    发明申请
    Micromirror and post arrangements on substrates 有权

    公开(公告)号：US20060018003A1

    公开(公告)日：2006-01-26

    申请号：US11216930

    申请日：2005-08-30

    申请人： Andrew Huibers ,  Satyadev Patel

    发明人： Andrew Huibers ,  Satyadev Patel

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
    48.
    发明授权
    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array 有权
    微镜阵列在微镜阵列的相邻微镜之间具有减小的间隙

    公开(公告)号：US06985277B2

    公开(公告)日：2006-01-10

    申请号：US11034318

    申请日：2005-01-11

    申请人： Andrew Huibers ,  Satyadev Patel

    发明人： Andrew Huibers ,  Satyadev Patel

    IPC分类号： G02B26/00

    CPC分类号： B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

    摘要： A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors.In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    摘要翻译： 公开了一种空间光调制器，以及用于制造这样的调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心的距离和相邻的微反射镜装置之间的间隙，以优化光学效率和性能质量。 微反射镜装置包括形成在基底上的铰链支撑件和由铰链支撑件保持的铰链。 镜板通过触点连接到铰链，并且根据镜板的期望的最大旋转角度，相邻微镜之间的最佳间隙和间距来确定镜板和铰链之间的距离。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底上，随后形成镜板，并且另一牺牲层沉积在镜板上，随后形成铰链支架。 通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除两个牺牲层。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

    Micromirrors with novel mirror plates
    49.
    发明授权
    Micromirrors with novel mirror plates 有权
    微镜与新型镜面板

    公开(公告)号：US06980349B1

    公开(公告)日：2005-12-27

    申请号：US10927560

    申请日：2004-08-25

    申请人： Andrew Huibers ,  Satyadev Patel

    发明人： Andrew Huibers ,  Satyadev Patel

    IPC分类号： G02B26/00 ,  G02B26/08

    CPC分类号： G02B26/0841

    摘要： A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each of which comprises a deflectable and reflective mirror plate. For enabling the deflection of the mirror plate, incisions are made within the area of the mirror plate with each incision being fully enclosed within the area of the mirror plate. The incisions collectively define a deformable hinge that is on the same plane as the mirror plate at the non-deflected state.

    摘要翻译： 公开了一种空间光调制器以及用于制造这种调制器的方法。 空间光调制器包括微镜阵列，每个微镜包括可偏转和反射的反射镜板。 为了使镜片的偏转能够在镜板的区域内形成切口，每个切口被完全封闭在镜板的区域内。 切口共同地限定了在非偏转状态下与镜板在同一平面上的可变形铰链。

    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
    50.
    发明授权
    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array 有权

    公开(公告)号：US06965468B2

    公开(公告)日：2005-11-15

    申请号：US10627302

    申请日：2003-07-24

    申请人： Andrew Huibers ,  Satyadev Patel

    发明人： Andrew Huibers ,  Satyadev Patel

    IPC分类号： B81C20060101 ,  G02B26/00 ,  G02B26/08 ,  G02F1/29 ,  H04N5/74

    CPC分类号： B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

    摘要： A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.