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公开(公告)号：US07215459B2
公开(公告)日：2007-05-08
申请号：US11056732
申请日：2005-02-11
申请人： Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B27/1033 , Y10S359/904
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
摘要翻译： 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。
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公开(公告)号：US07483198B2
公开(公告)日：2009-01-27
申请号：US11056752
申请日：2005-02-11
申请人： Jonathan Doan , Andrew Huibers , Satyadev Patel , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Jonathan Doan , Andrew Huibers , Satyadev Patel , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： B82Y30/00
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
摘要翻译： 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。
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公开(公告)号：US20070241417A1
公开(公告)日：2007-10-18
申请号：US11734442
申请日：2007-04-12
申请人： Andrew Huibers , Hongqin Shi , James Dunphy , Satyadev Patel
发明人： Andrew Huibers , Hongqin Shi , James Dunphy , Satyadev Patel
IPC分类号： H01L31/0232
CPC分类号： G02B26/0841 , H01L27/14625 , H01L31/02327
摘要： A method for making a micromirror device comprises is disclosed herein.
摘要翻译： 本文公开了一种制造微反射镜装置的方法。
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公开(公告)号：US20060056006A1
公开(公告)日：2006-03-16
申请号：US11056732
申请日：2005-02-11
申请人： Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Andrew Huibers , Satyadev Patel , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B27/1033 , Y10S359/904
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
摘要翻译： 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。
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公开(公告)号：US20060056005A1
公开(公告)日：2006-03-16
申请号：US11056727
申请日：2005-02-11
申请人： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B27/1026 , Y10S359/904
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
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公开(公告)号：US20050157375A1
公开(公告)日：2005-07-21
申请号：US11056752
申请日：2005-02-11
申请人： Jonathan Doan , Andrew Huibers , Satyadev Patel , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Jonathan Doan , Andrew Huibers , Satyadev Patel , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： B82Y30/00
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
摘要翻译： 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。
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公开(公告)号：US07119944B2
公开(公告)日：2006-10-10
申请号：US11056727
申请日：2005-02-11
申请人： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
发明人： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B27/1026 , Y10S359/904
摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
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公开(公告)号：US07362494B2
公开(公告)日：2008-04-22
申请号：US11734442
申请日：2007-04-12
申请人： Andrew Huibers , Hongqin Shi , James C. Dunphy , Satyadev Patel
发明人： Andrew Huibers , Hongqin Shi , James C. Dunphy , Satyadev Patel
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , H01L27/14625 , H01L31/02327
摘要： A method for making a micromirror device comprises is disclosed herein.
摘要翻译： 本文公开了一种制造微反射镜装置的方法。
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公开(公告)号：US20050020089A1
公开(公告)日：2005-01-27
申请号：US10666002
申请日：2003-09-17
申请人： Hongqin Shi , Gregory Schaadt , Andrew Huibers , Satyadev Patel
发明人： Hongqin Shi , Gregory Schaadt , Andrew Huibers , Satyadev Patel
IPC分类号： G02B26/08 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01L21/67069 , B81C1/00595 , B81C2201/0132 , G02B26/0841
摘要： The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.
摘要翻译： 本发明公开了一种使用具有自发气相化学蚀刻剂的气相蚀刻剂配方去除微结构制造中的牺牲材料的方法和装置。 气相蚀刻剂配方具有对应于微结构的结构层之间的牺牲层的最小厚度的平均自由程。 该方法在去除微结构结构层下面的牺牲层时尤其重要。
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10.发明申请Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates 审中-公开微晶基片上微机电器件的沉积，释放和封装方法公开(公告)号：US20080096313A1
公开(公告)日：2008-04-24
申请号：US11954076
申请日：2007-12-11
申请人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun
发明人： Satayadev Patel , Andrew Huibers , Steve Chiang , Robert Duboc , Thomas Grobelny , Hung Nan Chen , Dietrich Dehlinger , Peter Richards , Hongqin Shi , Anthony Sun
IPC分类号： H01L21/48
CPC分类号： B81B7/0077 , B81B2201/042 , B81C1/00269 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , G02B26/0833 , G02B26/0841 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01049 , H01L2924/01054 , H01L2924/01072 , H01L2924/01074 , H01L2924/01076 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12036 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00
摘要： A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
摘要翻译： 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气剂材料和/或固体或液体润滑剂之后，两个基底可以在晶片级粘结。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。
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