TRANSFER CHAMBER FOR FLAT DISPLAY DEVICE MANUFACTURING APPARATUS
    44.
    发明申请
    TRANSFER CHAMBER FOR FLAT DISPLAY DEVICE MANUFACTURING APPARATUS 失效
    平板显示设备制造设备的传送室

    公开(公告)号:US20080292431A1

    公开(公告)日:2008-11-27

    申请号:US12129010

    申请日:2008-05-29

    IPC分类号: B65G1/00

    摘要: The present invention relates to a transfer chamber for a flat display device manufacturing apparatus, and more particularly, to a transfer chamber for a flat display device manufacturing apparatus, having a combination of functions of transfer and load-lock chambers, in which a robot is provided aside from a center of the transfer chamber, a buffer is provided to be driven without interference of the robot, and a aligner is provided to adjust a position of a substrate mounted on the buffer. In order to achieve the aforementioned objects, there is provided a transfer chamber for a flat display device manufacturing apparatus, wherein a robot is provided aside from a center of the transfer chamber. In addition, in order to drive the robot, a sealing member is provided to seal a hole formed at a predetermined portion of the transfer chamber, and an aligner for adjusting the substrate in the transfer chamber and a buffer where the substrate is mounted on are provided.

    摘要翻译: 本发明涉及一种用于平板显示装置制造装置的传送室,更具体地说,涉及一种平面显示装置制造装置的传送室,其具有传送和装载锁定室的功能的组合,其中机器人是 除了传送室的中心之外,提供缓冲器以在机器人的干扰的情况下被驱动,并且提供对准器以调整安装在缓冲器上的基板的位置。 为了实现上述目的,提供了一种用于平板显示装置制造装置的传送室,其中机器人设置在传送室的中心的旁边。 此外,为了驱动机器人,设置密封构件以密封形成在传送室的预定部分处的孔,并且用于调节传送室中的基板的对准器和安装有基板的缓冲器 提供。