公开(公告)号：US20080297874A1

公开(公告)日：2008-12-04

申请号：US12110056

申请日：2008-04-25

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/0833

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

Abstract translation: 通过将高有效反射区域填充率和非衍射微镜阵列与高静电效率和低表面粘附控制基板耦合来制造用于显示和印刷的高对比度空间光调制器。

公开(公告)号：US20080231938A1

公开(公告)日：2008-09-25

申请号：US11690776

申请日：2007-03-23

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/08 ,  B29D11/00 ,  G02F1/00

CPC classification number: G02B26/0833

Abstract: Devices and methods for forming a spatial light modulator with high contrast are described. Light absorbing materials are used within a chamber that houses a spatial light modulator. The light absorbing materials absorb reflected light that is not intended for forming a part of a display image. The light absorbing material can form an aperture layer, wherein light to form the display image is transmitted through an opening in the aperture layer. An array of spatial light modulators can be within the housing and dummy spatial light modulators may be formed to enable easy alignment of the array with the opening in the aperture layer.

Abstract translation: 描述了用于形成具有高对比度的空间光调制器的装置和方法。 在容纳空间光调制器的室内使用吸光材料。 吸光材料吸收不用于形成显示图像的一部分的反射光。 光吸收材料可以形成开口层，其中形成显示图像的光通过孔层中的开口传输。 空间光调制器的阵列可以在壳体内，并且虚拟空间光调制器可以被形成为使得阵列能够容易地对准孔径层中的开口。

公开(公告)号：US20080220552A1

公开(公告)日：2008-09-11

申请号：US12126832

申请日：2008-05-23

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L21/02

CPC classification number: G02B26/0841 ,  G02B26/0833

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

Abstract translation: 通过将高有效反射区域填充率和非衍射微镜阵列与高静电效率和低表面粘附控制基板耦合来制造用于显示和印刷的高对比度空间光调制器。

公开(公告)号：US07388708B2

公开(公告)日：2008-06-17

申请号：US11470568

申请日：2006-09-06

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00 ,  G02B7/182 ,  G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0005 ,  B81B3/0051 ,  B81B3/0086 ,  B81B2201/047 ,  B81B2203/0109 ,  B81C2201/112

Abstract: A spatial light modulator having a multi-layer mirror is described.

Abstract translation: 描述了具有多层反射镜的空间光调制器。

公开(公告)号：US20080123206A1

公开(公告)日：2008-05-29

申请号：US11564040

申请日：2006-11-28

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B7/182

CPC classification number: G02B26/0841 ,  B81B2201/042 ,  B81C1/00174

Abstract: A micro mirror includes a hinge support post on the substrate, a hinge connection post on the hinge support post, wherein the hinge connection post comprises a bottom layer connected to the hinge support post and a side layer surrounding a cavity in the center of the hinge connection post, a hinge component connected to the side layer of the hinge connection post; and a mirror plate configured to tilt around the hinge component.

Abstract translation: 微反射镜包括在基板上的铰链支撑柱，在铰链支撑柱上的铰链连接柱，其中铰链连接柱包括连接到铰链支撑柱的底层和围绕铰链中心的空腔的侧层 连接柱，连接到铰链连接柱的侧层的铰链部件; 以及配置成围绕铰链部件倾斜的镜板。

公开(公告)号：US20080074725A1

公开(公告)日：2008-03-27

申请号：US11467507

申请日：2006-08-25

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0005 ,  B81C2201/112

Abstract: A method for fabricating a micro structure includes forming a first structure portion on a substrate; disposing a sacrificial material over the first structure portion; depositing a layer of a first structural material over the sacrificial material and the substrate; removing at least a portion of the sacrificial material to form a second structure portion in the layer of the first structural material, and forming a carbon layer on a surface of the second structure portion or on a surface of the first structure portion to prevent stiction between the second structure portion and the first structure portion. The second structure portion is connected with the substrate and is movable between a first position in which the second structural portion is separated from the first structure portion and a second position in which the second structure portion is in contact with the first structure portion.

Abstract translation: 微结构的制造方法包括在基板上形成第一结构部分; 在所述第一结构部分上设置牺牲材料; 在所述牺牲材料和所述基底上沉积第一结构材料层; 去除所述牺牲材料的至少一部分以在所述第一结构材料的层中形成第二结构部分，以及在所述第二结构部分的表面上或所述第一结构部分的表面上形成碳层，以防止所述第二结构部分之间的粘结 第二结构部分和第一结构部分。 第二结构部与基板连接，并且能够在第二结构部分与第一结构部分分离的第一位置和第二结构部分与第一结构部分接触的第二位置之间移动。

公开(公告)号：US20080062502A1

公开(公告)日：2008-03-13

申请号：US11467367

申请日：2006-08-25

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap.

Abstract translation: 空间光调制器包括以基板上的蜂窝图案设置的六角镜板的二维阵列。 每个六角镜板由一个或多个结构构件支撑。 相邻的六角镜板之间有间隙。 结构件不在间隙内。

公开(公告)号：US07307777B2

公开(公告)日：2007-12-11

申请号：US11346661

申请日：2006-02-03

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.

Abstract translation: 用于提供高分辨率空间光调制器的方法和装置。 空间光调制器包括：单元，其包括：基板部; 第一支撑柱和第二支撑柱，每个具有顶面; 和微镜。 微反射镜包括底层，其包括具有纵向轴线的铰链构件，横向于纵向轴线的宽度，纵向轴线上的第一端部和纵向轴线上的第二端部。 第一端部和第二端分别固定到第一支撑柱和第二支撑柱。 铰链构件具有与底层相同的厚度，其中铰链构件的宽度大于底层的厚度。

公开(公告)号：US6129807A

公开(公告)日：2000-10-10

申请号：US944240

申请日：1997-10-06

Applicant: Michael Grimbergen ,  Shaoher X. Pan

Inventor： Michael Grimbergen ,  Shaoher X. Pan

IPC: H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23F1/02

CPC classification number: H01J37/32458 ,  H01J37/32935

Abstract: Apparatus for in-situ monitoring of a process in a semiconductor wafer processing system consists of a process chamber having a dome, an enclosure disposed above the chamber, a process monitoring assembly positioned proximate the dome, an opening in the dome, and a window covering the opening. A portion of the apparatus supports the process monitoring assembly to establish a line-of-sight propagation path of monitoring beams from above the dome, through the window to the substrate to facilitate etch depth measurement without encountering interference from high power energy sources proximate the chamber. A method of fabricating a process monitoring apparatus consists of the steps of boring an opening into a dome, positioning the process monitoring assembly in proximity to the dome so as to allow a line-of-sight propagation path of monitoring beams from the process monitoring assembly to a wafer, and covering the opening with a window. The window is permanent or removable dependent upon the type of process monitoring assembly being used in the system.

Abstract translation: 用于在半导体晶片处理系统中对工艺进行现场监测的装置包括具有圆顶的处理室，设置在室上方的外壳，位于圆顶附近定位的过程监控组件，穹顶中的开口，以及窗盖 开幕。 该装置的一部分支持过程监控组件，以建立监视来自穹顶上方的通过窗口到基板的光束的视线传播路径，以便于蚀刻深度测量，以便不会受到靠近腔室的高功率能源的干扰 。 一种制造过程监控装置的方法包括将开口钻入圆顶的步骤，将过程监控组件定位在靠近圆顶的位置，以便允许来自过程监控组件的监视光束的视距传播路径 到晶片，并用窗口覆盖开口。 窗口是永久的或可移动的，取决于系统中使用的过程监视组件的类型。

公开(公告)号：US20100311192A1

公开(公告)日：2010-12-09

申请号：US12856981

申请日：2010-08-16

Applicant: Shaoher X. Pan ,  Vlad Novotny

Inventor： Shaoher X. Pan ,  Vlad Novotny

IPC: H01L21/66

CPC classification number: G02B26/101 ,  G02B26/0833

Abstract: A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.

Abstract translation: 包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。 晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。 这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。 通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。