公开(公告)号：US20190097059A1

公开(公告)日：2019-03-28

申请号：US16143528

申请日：2018-09-27

Applicant: Sharp Kabushiki Kaisha

Inventor： Tetsuo KIKUCHI ,  Tohru DAITOH ,  Hajime IMAI ,  Masahiko SUZUKI ,  Setsuji NISHIMIYA ,  Teruyuki UEDA ,  Kengo HARA

IPC: H01L29/786 ,  H01L27/12 ,  H01L29/24 ,  H01L29/267 ,  G02F1/1368

Abstract: In a semiconductor device, at least one thin-film transistor includes a semiconductor layer, a gate electrode, a gate insulating layer, a source electrode, and a drain electrode. The semiconductor layer has a multilayer structure that includes a plurality of channel formation layers including a first channel formation layer and a second channel formation layer, and at least one middle layer including a first middle layer provided between the first channel formation layer and the second channel formation layer. The first channel formation layer is disposed closer to the gate insulating layer than is the second channel formation layer, and is in contact with the gate insulating layer. The plurality of channel formation layers and the at least one middle layer are all an oxide semiconductor layer. The plurality of channel formation layers each have a mobility higher than that of the at least one middle layer.

公开(公告)号：US20180329242A1

公开(公告)日：2018-11-15

申请号：US15776415

申请日：2017-02-17

Applicant: Sharp Kabushiki Kaisha

Inventor： Hideki KITAGAWA ,  Tohru DAITOH ,  Hajime IMAI ,  Toshikatsu ITOH ,  Hisao OCHI ,  Tetsuo KIKUCHI ,  Masahiko SUZUKI ,  Teruyuki UEDA ,  Ryosuke GUNJI ,  Kengo HARA ,  Setsuji NISHIMIYA

IPC: G02F1/1362 ,  G02F1/1343 ,  G02F1/1339 ,  G02F1/1333 ,  H01L27/12

CPC classification number: G02F1/1362 ,  G02F1/133345 ,  G02F1/1339 ,  G02F1/1343 ,  G02F1/1368 ,  G02F2201/123 ,  H01L27/1214

Abstract: A spacer is fixed while an effect on a surface of an active matrix substrate is prevented. An active matrix substrate (1) includes a thin film transistor (11) which is provided on a substrate (2) and which has a recess made at a surface of the thin film transistor, and a spacer (13) fitted in the recess.