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公开(公告)号:US11069662B2
公开(公告)日:2021-07-20
申请号:US16882517
申请日:2020-05-24
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen
IPC: H01L25/07 , H01L23/00 , H01L23/31 , H01L23/538 , H01L25/00
Abstract: A semiconductor package includes a first chip package including a plurality of first semiconductor dies and a first insulating encapsulant, a second semiconductor die, a third semiconductor die, and a second insulating encapsulant. The plurality of first semiconductor dies are electrically connected to each other, and the first insulating encapsulant encapsulates the plurality of first semiconductor dies. The second semiconductor die and the third semiconductor die are electrically communicated to each other by connecting to the first chip package, wherein the first chip package is stacked on the second semiconductor die and the third semiconductor die. The second insulating encapsulant encapsulates the first chip package, the second semiconductor die, and the third semiconductor die.
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公开(公告)号:US20210151389A1
公开(公告)日:2021-05-20
申请号:US17140734
申请日:2021-01-04
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Ying-Ju Chen , Hsien-Wei Chen
IPC: H01L23/00 , H01L21/48 , H01L21/683 , H01L21/56 , H01L23/31 , H01L23/538
Abstract: A method includes encapsulating a first device die and a second device die in an encapsulating material, forming redistribution lines over and electrically coupling to the first device die and the second device die, and bonding a bridge die over the redistribution lines to form a package, with the package including the first device die, the second device die, and the bridge die. The bridge die electrically inter-couples the first device die and the second device die. The first device die, the second device die, and the bridge die are supported with a dummy support die.
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公开(公告)号:US20210125963A1
公开(公告)日:2021-04-29
申请号:US17140835
申请日:2021-01-04
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Jie Chen
IPC: H01L25/065 , H01L23/538 , H01L21/78 , H01L21/56 , H01L21/768 , H01L23/31 , H01L23/00 , H01L21/48 , H01L25/00
Abstract: A package includes a first molding material, a lower-level device die in the first molding material, a dielectric layer over the lower-level device die and the first molding material, and a plurality of redistribution lines extending into the first dielectric layer to electrically couple to the lower-level device die. The package further includes an upper-level device die over the dielectric layer, and a second molding material molding the upper-level device die therein. A bottom surface of a portion of the second molding material contacts a top surface of the first molding material.
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公开(公告)号:US20210091022A1
公开(公告)日:2021-03-25
申请号:US16919068
申请日:2020-07-01
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Ming-Fa Chen , Hsien-Wei Chen , Jie Chen
Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes an integrated circuit (IC) component, an insulating layer laterally encapsulating sidewalls of the IC component, a redistribution structure disposed on the insulating layer and the IC component, and a warpage control portion coupling to a back side of the IC component opposite to the redistribution structure. The redistribution structure is electrically connected to the IC component. The warpage control portion includes a substrate, a patterned dielectric layer disposed between the substrate and the IC component, and a metal pattern embedded in the patterned dielectric layer and electrically isolated from the IC component.
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公开(公告)号:US20200381379A1
公开(公告)日:2020-12-03
申请号:US16425951
申请日:2019-05-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hsien-Wei Chen , Jie Chen , Ming-Fa Chen , Sung-Feng Yeh
IPC: H01L23/00 , H01L23/528 , H01L23/544 , H01L21/66 , H01L25/065 , H01L25/00
Abstract: Provided is a three-dimensional integrated circuit (3DIC) structure including a first die and a second die bonded together by a hybrid bonding structure. One of the first die and the second die has a pad and a cap layer disposed over the pad. The cap layer exposes a portion of a top surface of the pad, and the portion of the top surface of the pad has a probe mark. A bonding metal layer of the hybrid bonding structure penetrates the cap layer to electrically connect to the pad. A method of fabricating the first die or the second die of 3DIC structure is also provided.
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公开(公告)号:US10811390B2
公开(公告)日:2020-10-20
申请号:US16252727
申请日:2019-01-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen , Ming-Fa Chen
IPC: H01L25/065 , H01L23/00 , H01L25/00 , H01L21/66 , H01L21/768 , H01L21/48 , H01L21/56 , H01L23/31 , H01L23/498
Abstract: Provided is a die stack structure including a first die and a second die. The first die and the second die are bonded together through a hybrid bonding structure. A bonding insulating layer of the hybrid bonding structure extends to contact with one interconnect structure of the first die or the second die.
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公开(公告)号:US10665572B2
公开(公告)日:2020-05-26
申请号:US16103939
申请日:2018-08-15
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen
IPC: H01L25/07 , H01L23/00 , H01L23/31 , H01L23/538 , H01L25/00
Abstract: A semiconductor package includes a first chip package including a plurality of first semiconductor dies and a first insulating encapsulant, a second semiconductor die, a third semiconductor die, and a second insulating encapsulant. The plurality of first semiconductor dies are electrically connected to each other, and the first insulating encapsulant encapsulates the plurality of first semiconductor dies. The second semiconductor die and the third semiconductor die are electrically communicated to each other by connecting to the first chip package, wherein the first chip package is stacked on the second semiconductor die and the third semiconductor die. The second insulating encapsulant encapsulates the first chip package, the second semiconductor die, and the third semiconductor die.
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公开(公告)号:US10504852B1
公开(公告)日:2019-12-10
申请号:US16016658
申请日:2018-06-25
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen , Ying-Ju Chen
IPC: H01L23/544 , H01L23/522 , H01L25/065 , H01L23/528
Abstract: Three-dimensional integrated circuit (3DIC) structures are disclosed. A 3DIC structure includes a first die and a second die bonded to the first die. The first die includes a first integrated circuit region and a first seal ring region around the first integrated circuit region, and has a first alignment mark within the first integrated circuit region. The second die includes a second integrated circuit region and a second seal ring region around the second integrated circuit region, and has a second alignment mark within the second seal ring region and corresponding to the first alignment mark.
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公开(公告)号:US10269749B2
公开(公告)日:2019-04-23
申请号:US15194160
申请日:2016-06-27
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jie Chen , Hsien-Wei Chen
IPC: H01L21/768 , H01L23/485 , H01L23/00 , H01L23/31 , H01L23/525 , H01L23/532 , H01L23/29
Abstract: A method for manufacturing semiconductor devices is provided. A protection layer is conformally deposited over a passivation layer such that the protection layer has a protrusion pattern that protrudes from a top surface of the protection layer. Further, a post-passivation interconnect structure (PPI) is conformally formed on the protection layer such that the PPI structure includes a landing pad region, a protrusion pattern conformal to the protrusion pattern of the protection layer, and a connection line electrically connected to the conductive pad. A solder bump is then placed on the landing pad region in contact with the protrusion pattern of PPI structure. A semiconductor device with bump stop structure is also provided. The protrusion pattern of the PPI structure serves as a bump stop that constrains a ball shift in the placement of the solder bump over the landing pad.
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公开(公告)号:US20190067001A1
公开(公告)日:2019-02-28
申请号:US15884328
申请日:2018-01-30
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jie Chen , Hsien-Wei Chen , Tzuan-Horng Liu , Ying-Ju Chen
IPC: H01L21/027 , H01L23/498 , H01L23/544 , H01L23/00
Abstract: A first mask and a second mask are sequentially provided to perform a multi-step exposure and development processes. Through proper overlay design of the first mask and the second mask, conductive wirings having acceptable overlay offset are formed.
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