公开(公告)号：US08361331B2

公开(公告)日：2013-01-29

申请号：US13009964

申请日：2011-01-20

申请人： Xiao Yang ,  William Spencer Worley, III ,  Dongmin Chen ,  Ye Wang

发明人： Xiao Yang ,  William Spencer Worley, III ,  Dongmin Chen ,  Ye Wang

IPC分类号： B29D11/00 ,  H01L21/302

CPC分类号： G02B26/0841 ,  B41J2/471 ,  G02B26/105

摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

公开(公告)号：US08344980B2

公开(公告)日：2013-01-01

申请号：US12154602

申请日：2008-05-23

申请人： William Spencer Worley, III ,  Edwin Lyle Hudson ,  Wing Hong Chow

发明人： William Spencer Worley, III ,  Edwin Lyle Hudson ,  Wing Hong Chow

IPC分类号： G09G3/36

CPC分类号： G09G3/3659 ,  G09G3/2011 ,  G09G3/2022 ,  G09G3/2025 ,  G09G3/2081 ,  G09G3/3614 ,  G09G3/3648 ,  G09G3/3696 ,  G09G2300/0491 ,  G09G2300/0809 ,  G09G2300/0823 ,  G09G2300/0857 ,  G09G2310/063 ,  G09G2320/0204

摘要： A multiplexed pixel display includes a plurality of pixel electrodes, a plurality of storage elements, a first voltage supply terminal, a second voltage supply terminal, a common electrode, and a plurality of multiplexers each selectively coupling an associated one of the pixel electrodes with one of the first voltage supply terminal and the second voltage supply terminal responsive to a value of a data bit stored in an associated one of said storage elements. A controller is configured to sequentially write each bit of multi-bit data words to the storage elements, and assert, while each bit is stored in the storage elements, a first predetermined voltage on the first voltage supply terminal, a second predetermined voltage on the second voltage supply terminal, and a third predetermined voltage on the common electrode, for a time dependent on the significance of the stored bit. Various alternate controllers facilitate the use of additional driving schemes.

摘要翻译： 复用像素显示器包括多个像素电极，多个存储元件，第一电压供给端子，第二电压供应端子，公共电极和多个多路复用器，每个多路复用器选择性地将相关联的一个像素电极与一个像素电极 的第一电压供应端子和第二电压供应端子响应于存储在相关联的一个所述存储元件中的数据位的值。 控制器被配置为将多位数据字的每一位顺序地写入存储元件，并且在每个位被存储在存储元件中时断言第一电压提供端上的第一预定电压，第 第二电压供应端子和公共电极上的第三预定电压，时间取决于所存储的位的重要性。 各种备用控制器便于使用额外的驾驶方案。

公开(公告)号：US07898561B2

公开(公告)日：2011-03-01

申请号：US12019822

申请日：2008-01-25

申请人： Xiao Yang ,  William Spencer Worley, III ,  Dongmin Chen ,  Ye Wang

发明人： Xiao Yang ,  William Spencer Worley, III ,  Dongmin Chen ,  Ye Wang

IPC分类号： B41J2/47

CPC分类号： G02B26/0841 ,  B41J2/471 ,  G02B26/105

摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

公开(公告)号：US20090002805A1

公开(公告)日：2009-01-01

申请号：US12210119

申请日：2008-09-12

申请人： Xiao Yang ,  Yuxiang Wang ,  Wook Ji ,  Justin Allen Payne ,  Ye Wang ,  William Spencer Worley, III ,  Dongmin Chen ,  Howard Woo

发明人： Xiao Yang ,  Yuxiang Wang ,  Wook Ji ,  Justin Allen Payne ,  Ye Wang ,  William Spencer Worley, III ,  Dongmin Chen ,  Howard Woo

IPC分类号： G02B26/08 ,  G06F3/038

CPC分类号： G02B26/0841

摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.

摘要翻译： 显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。 显示系统还包括位于照明路径中的空间光调制器。 空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。 铰链结构包括硅材料。 空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。 显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。