摘要:
A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.
摘要:
For high-voltage devices such as particle accelerators, novel geometries for a triple-junction at which an insulator, an anode and a vacuum meet are disclosed. A singularity in the electric field at the triple-junction is eliminated, reducing dielectric flashover and allowing the devices to operate at higher voltages without breakdown. In one aspect, such a device includes a cathode, an anode having an anode surface exposed to a vacuum, and a dielectric body disposed between the cathode and anode, the dielectric body having a dielectric surface that is exposed to the vacuum, wherein the dielectric surface and the anode surface approach each other such that an angle measured across the vacuum between the dielectric surface and the anode surface decreases with decreasing distance between the dielectric surface and the anode surface until the dielectric surface and the anode surface meet and are parallel.
摘要:
A diode pulser is described which comprises a diode and an inductor connected in series, the impedance of the diode being controllable to suddenly increase the impedance to produce a high voltage pulse across the diode. The diode can include a pair of spaced electrodes (12, 14 in FIG. 2) forming a gap between them across which electrons move when a voltage is applied. To increase the impedance, a magnetic field (38) is suddenly applied parallel to the electrode surfaces, to bend the electron paths so as to require a much higher voltage to move the electrons across the gap, the inductor (26) creating such voltage to maintain the current flow for a brief time. The diode pulser is useful as a rapid-acting switch, and as a source of high energy electrons that are useful to generate X-rays, microwaves, and for other purposes.
摘要:
Electron tube assemble having coaxial electrodes and grids, including a tube with given electrode trajectories and oscillation period, and interfering retarding-field effect elimination means disposed around the tube for generating a magnetic field having field lines running inside the tube substantially parallel to the electrodes and grids deflecting the trajectories of the electrons moving radially with respect to the anode during operation of the tube and substantially perpendicularly intersecting and elongating the trajectories of the electrons for increasing the oscillation period of the electrons and eliminating interfering retarding-field effects.