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    High vacuum gettering pump
    1.
    发明授权
    High vacuum gettering pump 失效
    高真空泵

    公开(公告)号：US3666377A

    公开(公告)日：1972-05-30

    申请号：US3666377D

    申请日：1969-06-02

    申请人： VARIAN ASSOCIATES

    发明人： ROBERTSON DAVID D ,  WHEELER WILLIAM R

    IPC分类号： H01J7/18 ,  H01J41/16 ,  F04B37/02

    CPC分类号： H01J7/18 ,  H01J41/16

    摘要： A HIGH VACUUM GETTERING PUMP IS DESCRIBED WHICH IS CAPABLE OF PROVIDING A HIGH VAPORIZATION RATE OF A GETTER MATERIAL. THE PUMP INCLUDES A HIGH THERMIONIC EMISSION CATHODE FILAMENT DISPOSED OVER A SURFACE OF A BULK SUPPLY OF A GETTER MATERAL SUCH AS TITANIUM. THE GETTER MATERIAL IS CONTAINED WITHIN A CUP-SHAPED HEAT SHIELD AND HAS A PERIPHERAL CONFIGURATION MINIMIZING THE AMOUNT OF MATERIAL AT THE SIDES OF THE BODY OF GETTER MATERIAL WHICH WILL NOT BE MELTED BY THERMIONIC EMISSION FROM THE FILAMENT WHEN A HIGH OPERATING POTENTIAL IS APPLIED BETWEEN THE FILAMENT AND THE GETTER MATERIAL BODY. A SHIELD IS ALSO

    PROVIDED BLOCKING LINE-OF-SIGHT TRAVEL OF VAPORIZED GETTER MATERIAL TO A PORTION OF THE FILAMENT WHICH DOES NOT REACH A HIGH ENOUGH TEMPERATURE TO PREVENT CONDENSATION OF THE GETTER MATERIAL. THE SHEILD IS TAPERED INWARDLY AND CURVED AWAY FROM THE FILAMENT ADJACENT AN UNSHIELDED PORTION THEREOF TO MINIMIZE THE EFFECT CAUSED ON THE OPERATION OF THE FILAMENT BY THE BUILD-UP OF GETTER MATERIAL ON THE SHIELD.