公开(公告)号：US4977321A

公开(公告)日：1990-12-11

申请号：US265381

申请日：1988-10-31

Applicant: Nobufumi Mori ,  Tetsuo Oikawa

Inventor： Nobufumi Mori ,  Tetsuo Oikawa

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/244

CPC classification number: H01J37/224

Abstract: An exposed two-dimensional sensor and an exposed two-dimensional sensor in the camera compartment of an electron microscope are shielded against X-rays by respective covers. When a two-dimensional sensor is outside the protective covers during recording, the electron beam from the electron gun of the electron microscope is deflected and blocked by the diaphragm, thereby preventing generation of X-rays due to scattered electrons in the camera compartment. Such an arrangement makes a mechanical shutter unnecessary so that it is possible to prevent exposure of the two-dimentional sensors due to X-rays generated at the shutter and exposure of the two-dimensional sensors due to X-rays generated by scattered electrons in the camera compartment.

Abstract translation: 曝光的二维传感器和电子显微镜的照相机室中的暴露的二维传感器被相应的盖子遮蔽X射线。 当记录期间二维传感器在保护罩外面时，来自电子显微镜的电子枪的电子束被隔膜偏转和阻挡，从而防止由于照相机室中散射的电子而产生X射线。 这样的结构使得不需要机械快门，使得可以防止由于在快门处产生的X射线和二维传感器由于散射电子产生的X射线而导致的二维传感器的曝光 相机隔间

公开(公告)号：US4873440A

公开(公告)日：1989-10-10

申请号：US137691

申请日：1987-12-24

Applicant: Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

Inventor： Nobufumi Mori ,  Takayuki Katoh ,  Tetsuo Oikawa ,  Yoshiyasu Harada ,  Junji Miyahara

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/224

Abstract: In a system for outputting an electron microscope image, a two-dimensional sensor for storing electron beam energy thereon is exposed to an electron beam passing through a specimen in a vacuum to have the electron beam energy stored on the two-dimensional sensor, and is then exposed to light or heat to release the stored energy as light emission. The emitted light is photoelectrically detected to obtain image signals, and an electron beam image of the specimen is output on the basis of the image signals. The specimen is divided into a plurality of divisions, and the storage of the electron beam energy is carried out for each of the divisions. The image signals obtained at the divisions are combined to form composite image signals that represent an overall specimen image formed by a group of the divisions, and the image signals at the divisions are corrected so that signal values of the boundary areas of adjacent divisions become approximately equal to each other.

Abstract translation: 在用于输出电子显微镜图像的系统中，用于在其上存储电子束能的二维传感器暴露于在真空中通过样本的电子束，以将电子束能量存储在二维传感器上，并且是 然后暴露于光或热以释放储存的能量作为发光。 发射的光被光电检测以获得图像信号，并且基于图像信号输出样本的电子束图像。 样本被分成多个部分，并且对于每个部分执行电子束能量的存储。 在分割处获得的图像信号被组合以形成表示由一组分割形成的总体样本图像的合成图像信号，并且校正分割处的图像信号，使得相邻分区的边界区域的信号值变为约 相等。

公开(公告)号：US4866274A

公开(公告)日：1989-09-12

申请号：US267736

申请日：1988-11-03

Applicant: Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori ,  Masaru Noguchi

Inventor： Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori ,  Masaru Noguchi

IPC: H01J37/22

CPC classification number: H01J37/224

Abstract: An apparatus for recording and reproducing an image of a specimen produced by an electron microscope includes a two-dimensional image sensor for storing the energy of an electron beam having passed through the specimen, a stimulating system for scanning the two-dimensional image sensor with stimulating energy to discharge the stored electron beam energy as light from the two-dimensional image sensor, a photoelectric transducer for photoelectrically detecting the light discharged from the two-dimensional image sensor, and an erasing system for applying erasing energy to the two-dimensional image sensor to discharge energy remaining thereon after the light has been photoelectrically detected.

公开(公告)号：US4651220A

公开(公告)日：1987-03-17

申请号：US786080

申请日：1985-10-10

Applicant: Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

Inventor： Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

IPC: G01Q30/02 ,  G01Q30/04 ,  G01T1/29 ,  H01J37/22 ,  H04N1/10

CPC classification number: H01J37/224 ,  G01T1/2012

Abstract: A stimulable phosphor sheet is exposed to an electron beam having passed through a specimen in an electron microscope to record a first magnified image of the specimen on the sheet. A stimulating energy is applied to the sheet for discharging light therefrom which represents the first magnified image. The light discharged from the image sensor is photoelectrically detected to reproduce the first magnified image which can be observed to attain a desired focused condition and/or a desired field on the electron microscope. Then, the same or another stimulable phosphor sheet is exposed to the electron beam to record a second magnified image of the specimen on the sheet, and the second magnified image is reproduced as a final image under the desired focused condition and/or with the desired field.

Abstract translation: 将可刺激的荧光体片暴露于通过电子显微镜中的样品的电子束，以将样品的第一放大图像记录在片材上。 刺激能量被施加到片材上，用于从其中排出代表第一放大图像的光。 从图像传感器排出的光被光电检测，以再现可以观察到的第一放大图像，以获得期望的聚焦条件和/或电子显微镜上所需的场。 然后，将相同或另一种可刺激的荧光粉片暴露于电子束，以将样品的第二放大图像记录在片材上，并且将第二放大图像作为最终图像在期望的聚焦条件和/或期望的条件下再现 领域。

公开(公告)号：US4211924A

公开(公告)日：1980-07-08

申请号：US7647

申请日：1979-01-29

Applicant: Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

Inventor： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

IPC: H01J37/22 ,  H01J37/295

CPC classification number: H01J37/28 ,  H01J37/224 ,  H01J37/2955

Abstract: An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

Abstract translation: 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。

公开(公告)号：US4099055A

公开(公告)日：1978-07-04

申请号：US730854

申请日：1976-10-08

Applicant: Hideo Todokoro

Inventor： Hideo Todokoro

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/224 ,  H01J37/265

Abstract: A scanning transmission electron microscope includes means for irradiating with a finely focussed electron beam a sample to be observed within an evacuated chamber, means for scanning the surface of said sample with said electron beam, means for transducing an image of electron beam passed through said sample into an image formed by the light beam, light transmission means for transmitting said light beam image to the outside of said evacuated chamber, light interrupting means adapted to allow a selected part of said light beam image to pass while interrupting the other part of said image and light detecting means adapted to detect said part of said light beam which is allowed by said interrupting means to pass.

公开(公告)号：US3848126A

公开(公告)日：1974-11-12

申请号：US37172473

申请日：1973-06-20

Applicant: NAT RES DEV

Inventor： SWINDELLS N ,  BEVIS M

IPC: G01N23/205 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/2955 ,  G01N23/205 ,  H01J37/224

Abstract: A camera for photographing Kossel lines caused by irradiating crystalline specimens with electron beams is disclosed. Previously such photographs were taken either by back reflection or transmission methods with the plane of the photographic plate perpendicular to the beam axis. This causes numerous disadvantages. In the present embodiment the photographs are taken in a plane parallel to the electron beam, and technique for interpreting the photographs so taken is fully explained.

Abstract translation: 公开了一种用于用电子束照射结晶样品而拍摄Kossel线的相机。 以前，这样的照片是通过背景反射或透射方法拍摄的，其中照相板的平面垂直于光束轴线。 这导致许多缺点。

公开(公告)号：US3727233A

公开(公告)日：1973-04-10

申请号：US3727233D

申请日：1970-11-04

Applicant: GIJUTSUIN K INT TRADE IND

Inventor： KANAYA K ,  ATODA N

IPC: G03C7/00 ,  G03F1/00 ,  G03F7/00 ,  H01J37/22 ,  G01D15/34

CPC classification number: H01J37/224 ,  G03C7/00 ,  G03F7/001 ,  Y10S101/37

Abstract: A method of recording an electron image, in which a metal of high reflectivity is vacuum-evaporate on a substrate of glass, plastic, or the like, an electronic image is irradiated onto the organic film coated on the metal thereby to record the image by giving the reaction of polymerization, cross-linking, or degradation to said organic material to the extent corresponding to the irradiation intensity, and then the image is obtained which is quantitatively corresponding to the intensity distribution of the incident electrons by again vacuumevaporating a metal of high reflectivity on the recorded image. Further, a method of recording an electronic image, in which the sensitivity of a recording plate is improved by using a preexposure method, whereby a recordable exposure range is increased thereby to control the lightness and color of the image.

Abstract translation: 记录电子图像的方法，其中在玻璃，塑料等的基板上真空蒸发高反射率的金属，将电子图像照射到涂覆在金属上的有机膜上，从而将图像记录在 给予所述有机材料的聚合，交联或降解反应至对应于照射强度的程度，然后通过再次真空蒸发金属获得定量对应于入射电子的强度分布的图像 对记录图像具有高反射率。 此外，记录电子图像的方法，其中通过使用预曝光方法来提高记录板的灵敏度，由此增加可记录的曝光范围，从而控制图像的亮度和颜色。

公开(公告)号：US3671742A

公开(公告)日：1972-06-20

申请号：US3671742D

申请日：1970-04-28

Applicant: ASS ELECT IND

Inventor： BROWNING GEORGE WILLIAM

IPC: H01J37/22 ,  G01N23/00

CPC classification number: H01J37/224

Abstract: An electron microscope comprising a microscope chamber having a passageway extending therethrough and a film mechanism for driving an electron stimulated means, or film plate, into the microscope chamber. The film mechanism includes a tray disposed within the microscope chamber and communicating with the passageway, a closure member positioned across the passageway for preventing the passage of X-rays through the passageway, a storage chamber disposed externally of the microscope for storing a film plate, and transport means for driving a film plate from the storage chamber to the tray so that the film plate is moved to a position to intercept a beam of electrons passing through an object to be viewed.

Abstract translation: 一种电子显微镜，包括具有延伸穿过其的通道的显微镜室和用于将电子刺激装置或薄膜板驱动到显微镜室中的膜机构。 薄膜机构包括设置在显微镜室内并与通道连通的托盘，跨过通道定位的封闭构件，用于防止X射线通过通道;存储室，设置在显微镜外部用于存储薄膜板; 以及用于将胶片板从储存室驱动到托盘的传送装置，使得胶片板移动到拦截通过待观察物体的电子束的位置。

公开(公告)号：US3529154A

公开(公告)日：1970-09-15

申请号：US3529154D

申请日：1967-08-11

Applicant: PHILIPS CORP

Inventor： BOUWMEESTER AREND JAN

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/224