Apparatus enabling particle detection utilizing wide view lens
    52.
    发明授权
    Apparatus enabling particle detection utilizing wide view lens 失效
    利用广视镜进行粒子检测的装置

    公开(公告)号:US06825437B2

    公开(公告)日:2004-11-30

    申请号:US10231267

    申请日:2002-08-30

    IPC分类号: B23K1000

    摘要: When determining the presence of foreign particles in a processing chamber by radiating a laser beam inside a processing chamber and detecting scattered light from foreign particles within the processing chamber, the detection of scattered light is performed using a detecting lens having a wide field angle and deep focal depth. Accordingly, the detection of foreign particles floating in the processing chamber can be performed across a wide range, and with uniform sensitivity, with a detecting optical system having a simple constitution.

    摘要翻译: 当通过在处理室内辐射激光束并且检测处理室内的异物的散射光来确定处理室中外来颗粒的存在时,使用具有宽场角和深度的检测透镜来执行散射光的检测 焦点深度 因此,利用具有简单结构的检测光学系统,可以在宽范围内以及具有均匀灵敏度的方式对漂浮在处理室中的异物进行检测。

    Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses

    公开(公告)号:US06355570B1

    公开(公告)日:2002-03-12

    申请号:US09260074

    申请日:1999-03-02

    IPC分类号: H01L21302

    摘要: The present invention provides a semiconductor manufacturing method, a plasma processing method and a plasma processing apparatus for generating a plasma in a processing chamber and carrying out processing on material to be processed by using the plasma, comprising a floating-foreign-particle measuring apparatus including: a light radiating optical system for radiating a light having a desired wavelength and completing intensity modulation at a desired frequency to the processing chamber; a scattered-light detecting optical system for separating a component with the desired wavelength from scattered lights obtained from the processing chamber as a result of radiation of the light by the light radiating optical system, for optically receiving the component and for converting the component into a first signal; and a foreign-particle-signal extracting unit which separates a second signal representing foreign particle floating in the plasma or in an area in proximity to the plasma from a third signal obtained by emission of the plasma for detection of the second signal by extraction of a component with the desired frequency used for the intensity modulation from the first signal obtained from the scattered-light detecting optical system.

    Drain mechanism for hydraulic power transmission joint
    54.
    发明授权
    Drain mechanism for hydraulic power transmission joint 有权
    液压传动接头排水机构

    公开(公告)号:US06336539B1

    公开(公告)日:2002-01-08

    申请号:US09571357

    申请日:2000-05-15

    IPC分类号: F16D3102

    CPC分类号: F16D43/284 F16D31/02

    摘要: A drain plug is disposed in a drain hole through which oil is discharged from a high-pressure chamber formed in a valve block. Within the drain plug there is arranged a drain pin that slidably opens and closes the drain hole. A fixed pin serves to restrict a displacement of the drain pin. A thermo-switch is located within a low-pressure chamber behind the drain pin in such a manner as to be urged by a return spring so that the drain pin is pressed to keep the drain hole closed. When a predetermined temperature is reached, the thermo-switch allows its head pin to extend, with the reaction force as a result of abutment of the head pin against the fixed pin causing the thermo-switch to retreat to release the pressing force exerted on the drain pin. In consequence, the drain pin is displaced by a high pressure toward the direction in which the drain hole is opened, allowing high-pressure oil to be drained into the low pressure side.

    摘要翻译: 排水塞设置在排水孔中,通过该排水孔从形成在阀块中的高压室排出油。 在排水塞内设有可滑动地打开和关闭排水孔的排水销。 固定销用于限制排水销的位移。 热开关位于排水管后面的低压室内,以便由复位弹簧推动,以便排水管被压紧以保持排水孔闭合。 当达到预定温度时,热敏开关允许其头销延伸,由于头销与固定销的邻接而产生反作用力,导致热敏开关退回以释放施加在该固定销上的压力 漏极引脚。 因此,排水销朝着排水孔打开的方向高压移位,允许将高压油排入低压侧。

    Optical transmission device and optical transmission system employing the same
    55.
    发明授权
    Optical transmission device and optical transmission system employing the same 失效
    光传输装置及采用该传输装置的光传输系统

    公开(公告)号:US06314217B1

    公开(公告)日:2001-11-06

    申请号:US09663378

    申请日:2000-09-15

    IPC分类号: G02B628

    摘要: An optical transmission device which reduces optical noise in an optical transmission system. The optical transmission device includes a core light amplifying unit, and a first buffer light amplifying unit for amplifying a first signal light from a first transmission path and an amplified second signal light from the core light amplifying unit. The first buffer light amplifying unit supplies the core light amplifying unit with the first signal light, and supplies the first transmission path with the amplified second signal light. Also provided is a second buffer light amplifying unit for amplifying a second signal light from a second transmission path and an amplified first signal light from the core light amplifying unit. The second buffer light amplifying unit supplies the core light amplifying unit with the second signal light, and supplies the second transmission path with the amplified first signal light.

    摘要翻译: 一种降低光传输系统中的光噪声的光传输装置。 光传输装置包括核心光放大单元和用于放大来自第一传输路径的第一信号光和来自核心光放大单元的放大的第二信号光的第一缓冲光放大单元。 第一缓冲光放大单元向核心光放大单元提供第一信号光,并且向第一传输路径提供放大的第二信号光。 还提供了用于放大来自第二传输路径的第二信号光和来自核心光放大单元的放大的第一信号光的第二缓冲光放大单元。 第二缓冲光放大单元向核心光放大单元提供第二信号光,并且向第二传输路径提供放大的第一信号光。

    Method of measuring free carrier concentration and/or thickness of a
semiconductor and process of manufacturing semiconductor device and
semiconductor wafer using such method
    58.
    发明授权
    Method of measuring free carrier concentration and/or thickness of a semiconductor and process of manufacturing semiconductor device and semiconductor wafer using such method 失效
    使用这种方法测量半导体器件和半导体晶片的半导体自由载流子浓度和/或厚度的测量方法

    公开(公告)号:US6153444A

    公开(公告)日:2000-11-28

    申请号:US921829

    申请日:1997-09-02

    摘要: The invention provides a method of measuring a carrier concentration and/or thickness of a semiconductor, which includes the steps of determining the carrier concentration by optical measurement means using a light having at least a frequency band which causes light absorption by free carriers in the semiconductor. A reflection amplitude ratio and a phase of the light or the result of measurement of substitute parameters therefor are obtained by the optical measurement means, and the carrier concentration and/or thickness is determined based on the reflection amplitude ratio and the phase or said result of measurement of the substitute parameter therefor.

    摘要翻译: 本发明提供一种测量半导体的载流子浓度和/或厚度的方法,其包括以下步骤:通过光学测量装置确定载流子浓度,所述方法至少使用具有引起半导体中的自由载流子的光吸收的频带 。 通过光学测量装置获得光的反射振幅比和相位或其替代参数的测量结果,并且基于反射幅度比和相位或所述结果来确定载流子浓度和/或厚度 测量替代参数。

    Optical amplifier
    59.
    发明授权
    Optical amplifier 失效
    光放大器

    公开(公告)号:US6091540A

    公开(公告)日:2000-07-18

    申请号:US69772

    申请日:1998-04-30

    申请人: Hiroyuki Nakano

    发明人: Hiroyuki Nakano

    摘要: An optical amplifier which amplifies a signal light, wherein a pumping light source outputting a pumping light, a first wavelength multiplexer multiplexing the signal light and the pumping light and providing a multiplexed light to a first doped fiber. A first doped fiber amplifying the signal light, a wavelength demultiplexer receiving the multiplexed light from the first doped fiber and separately outputting the amplified signal light and the pumping light. An optical component receiving the amplified signal light form the demultiplexer and attenuating the amplified signal light and a second wavelength multiplexer multiplexing the attenuated signal light received from the optical component and the demultiplexed pumping light received from the wavelength demultiplexer. A second doped fiber amplifying the attenuated signal light.

    摘要翻译: 一种放大信号光的光放大器,其中输出泵浦光的泵浦光源,第一波长多路复用器对信号光和泵浦光进行复用,并向第一掺杂光纤提供多路复用的光。 第一掺杂光纤放大信号光,波长解复用器接收来自第一掺杂光纤的复用光,并分别输出放大的信号光和泵浦光。 接收放大的信号光的光学部件形成解复用器并衰减放大的信号光,并且第二波长多路复用器将从光学部件接收的衰减信号光和从波长解复用器接收的解复用的泵浦光复用。 放大衰减信号光的第二掺杂光纤。