公开(公告)号：US06548373B2

公开(公告)日：2003-04-15

申请号：US09821432

申请日：2001-03-29

Applicant: Shu-Ya Chuang ,  Aaron Lee

Inventor： Shu-Ya Chuang ,  Aaron Lee

IPC: H01L2176

CPC classification number: H01L21/76224

Abstract: A method for forming a STI structure. A pad oxide layer is formed over a substrate. A sacrificial layer is formed over the pad oxide layer. A mask layer is formed over the sacrificial layer. The mask layer is patterned, and then the sacrificial layer, the pad oxide layer and the substrate are etched in sequence to form a trench. A thermal oxidation is performed to form a liner layer along the exposed sidewalls of the sacrificial layer and the exposed substrate surface inside the trench. Insulation material is deposited over the substrate, completely filling the trench. A chemical-mechanical polishing step is performed to remove a portion of the insulation layer and a portion of the mask layer so that an insulation plug is formed inside the trench. After the polishing step, the top surface of the insulation plug and the top surface of the mask layer are at the same surface. The mask layer is patterned to expose a portion of the sacrificial layer near the central region of two neighboring trenches. An ion implantation is carried out. The mask layer and the sacrificial layer are removed.

Abstract translation: 一种用于形成STI结构的方法。 在衬底上形成衬垫氧化物层。 在衬垫氧化物层上形成牺牲层。 在牺牲层上形成掩模层。 对掩模层进行图案化，然后依次蚀刻牺牲层，焊盘氧化物层和衬底以形成沟槽。 执行热氧化以沿着牺牲层的暴露的侧壁和沟槽内的暴露的衬底表面形成衬垫层。 绝缘材料沉积在衬底上，完全填充沟槽。 执行化学机械抛光步骤以去除绝缘层的一部分和掩模层的一部分，使得在沟槽内部形成绝缘插头。 在抛光步骤之后，绝缘塞的顶表面和掩模层的顶表面处于相同的表面。 对掩模层进行图案化以在两个相邻沟槽的中心区域附近露出牺牲层的一部分。 进行离子注入。 去除掩模层和牺牲层。

公开(公告)号：US06344415B1

公开(公告)日：2002-02-05

申请号：US09397161

申请日：1999-09-15

Applicant: Shu-Ya Chuang ,  Aaron Lee

Inventor： Shu-Ya Chuang ,  Aaron Lee

IPC: H01L21302

CPC classification number: H01L21/76224

Abstract: A method for forming a STI structure. A pad oxide layer is formed over a substrate. An amorphous silicon layer is formed over the pad oxide layer. A mask layer is formed over the amorphous silicon layer. The mask layer is patterned, and then the amorphous silicon layer, the pad oxide layer and the substrate are etched in sequence to form a trench. A thermal oxidation is performed to form a liner layer along the exposed sidewalls of the amorphous silicon layer and the exposed substrate surface inside the trench. Insulation material is deposited over the substrate, completely filling the trench. A chemical-mechanical polishing step is performed to remove a portion of the insulation layer and a portion of the mask layer so that an insulation plug is formed inside the trench. After the polishing step, the top surface of the insulation plug and the top surface of the mask layer are at the same surface. The mask layer is patterned to expose a portion of the amorphous silicon layer near the central region of two neighboring trenches. An ion implantation is carried out. The mask layer is removed. The amorphous silicon layer is removed.

Abstract translation: 一种用于形成STI结构的方法。 在衬底上形成衬垫氧化物层。 在衬垫氧化物层上形成非晶硅层。 在非晶硅层上形成掩模层。 对掩模层进行构图，然后依次蚀刻非晶硅层，衬垫氧化物层和衬底以形成沟槽。 执行热氧化以沿着非晶硅层的暴露的侧壁和沟槽内的暴露的衬底表面形成衬垫层。 绝缘材料沉积在衬底上，完全填充沟槽。 执行化学机械抛光步骤以去除绝缘层的一部分和掩模层的一部分，使得在沟槽内部形成绝缘插头。 在抛光步骤之后，绝缘塞的顶表面和掩模层的顶表面处于相同的表面。 将掩模层图案化以暴露出两个相邻沟槽的中心区域附近的非晶硅层的一部分。 进行离子注入。 去除掩模层。 去除非晶硅层。

公开(公告)号：US06302421B1

公开(公告)日：2001-10-16

申请号：US09571077

申请日：2000-05-15

Applicant: Aaron Lee

Inventor： Aaron Lee

IPC: B62B910

CPC classification number: A61G5/023 ,  A61G5/1051 ,  B62B3/001 ,  B62H7/00 ,  B62K5/08

Abstract: A vehicle with a caster (12) has a disconnectable steering system so the vehicle can be quickly and easily converted back and forth between rider-steerable and externally steerable configurations. The vehicle includes a frame (body) (20), the caster, and a steering mechanism (22, 24, 34) mounted on the frame. A disconnecting device (32) is mounted between the steering mechanism and the caster. When the disconnecting device connects the steering mechanism to the caster, the vehicle can be steered by the occupant since the steering mechanism and caster rotate as one unit. When the disconnecting device disconnects the steering mechanism from the caster, the caster is allowed to swivel freely (360°) about its vertical axis so that the vehicle can be pushed or pulled in any direction by an external operator. The vehicle may be a stroller, a toy vehicle, a scooter, a wheelchair, a cart, a dolly, etc., and it can have more than one caster.

Abstract translation: 具有脚轮（12）的车辆具有可拆卸的转向系统，使得车辆可以在骑车者可操纵和外部可操纵配置之间来回快速地转换。 车辆包括框架（主体）（20），脚轮以及安装在框架上的转向机构（22,24,34）。 断路装置（32）安装在转向机构和脚轮之间。 当分离装置将转向机构连接到脚轮时，由于转向机构和脚轮作为一个单元旋转，车辆可以被乘员转向。 当断开装置将转向机构与脚轮分离时，脚轮可以绕其垂直轴线自由旋转（360°），以便外部操作者可以向任何方向推动或拉动车辆。 车辆可以是婴儿车，玩具车，踏板车，轮椅，小车，小车等，并且可以具有不止一个脚轮。

公开(公告)号：US4669378A

公开(公告)日：1987-06-02

申请号：US766810

申请日：1985-08-19

Applicant: Aaron Lee

Inventor： Aaron Lee

IPC: B41F15/08 ,  B41F15/04 ,  B41F15/10 ,  B41F15/36

CPC classification number: B41F15/0863

Abstract: A multiple screen printing apparatus includes a fixed shaft extending upwardly from a base, and a lower rotatable shaft secured concentrically about a lower portion of the fixed shaft. A plurality of platen supporting assemblies extend radially outwardly from the lower rotatable shaft and are spaced at equal angles thereabout. An upper rotatable shaft is secured concentrically about an upper portion of the fixed shaft, and a disc-like table is secured thereto for rotation therewith. A spindle shaft extends upwardly from the top end of the fixed shaft, and a plurality of screen support arm assemblies extend radially outwardly therefrom for independent rotation thereabout. Each of the screen support arm assemblies includes an arm mounting bracket resting on the rotatable table, and clamping means secures the bracket to the table in an angularly adjustable fashion. Each of the platen supporting assemblies includes an alignment gate for engaging a screen in the printing position and angularly aligning the screen precisely with the respective platen.

Abstract translation: 多丝网印刷装置包括从基部向上延伸的固定轴和围绕固定轴的下部同心地固定的下部可旋转轴。 多个压板支撑组件从下部可旋转轴径向向外延伸并且在其周围以相等的角度间隔开。 上部可旋转轴围绕固定轴的上部同心地固定，并且将盘状工作台固定在其上以与其一起旋转。 主轴从固定轴的顶端向上延伸，并且多个屏幕支撑臂组件从其径向向外延伸，用于在其周围独立旋转。 每个屏幕支撑臂组件包括搁置在可旋转工作台上的臂安装支架，并且夹紧装置以可角度调节的方式将支架固定在桌子上。 每个压板支撑组件包括对准门，用于将丝网接合在打印位置，并将筛网与相应的压板精确对准。

公开(公告)号：US4573202A

公开(公告)日：1986-02-25

申请号：US572449

申请日：1984-01-20

Applicant: Aaron Lee

Inventor： Aaron Lee

IPC: A45C3/00 ,  A45C7/00 ,  A45C11/38 ,  A45C13/02 ,  A45C13/28

CPC classification number: A45C13/021 ,  A45C11/38 ,  A45C13/28 ,  A45C3/00 ,  A45C7/0081

Abstract: A container (20) for carrying fragile and delicate items, such as cameras, instruments, or the like, comprises a soft or rigid casing and an inner inflatable envelope (34) made of a resilient air-impermeable material. The inner envelope (34) is removable and is inserted into a space formed between the inner surface of the container (20) and a permanent liner (32) which is attached to the casing, leaving an opening for inserting the inflatable envelope into said space. The container is equipped with a pump for inflating the inner envelope (34). The pump is made in the form of a rubber bulb (42) with a check valve (44), a manually operated air release valve (46), and an automatic safety valve (48). This container can be embodied in the form of a suitcase, a briefcase, a wig tote, etc. It protects its contents from rough handling and accidental dropping by the energy-absorbing effect of the inflatable envelope and by the tight holding effect provided by the variable inflatability of the envelope.

Abstract translation: 用于携带脆弱和细腻物品（例如照相机，仪器等）的容器（20）包括柔软或刚性的外壳和由弹性不透气材料制成的内部可膨胀的外壳（34）。 内封套（34）是可拆卸的并且被插入形成在容器（20）的内表面和固定在外壳上的永久性内衬（32）之间的空间中，留下用于将可充气外壳插入所述空间的开口 。 容器装有用于使内封套（34）膨胀的泵。 泵以具有止回阀（44），手动空气释放阀（46）和自动安全阀（48）的橡胶球（42）的形式制成。 该容器可以以手提箱，公文包，假发手提箱等的形式实施。它通过可充气外壳的吸收能量以及由紧凑的保持效果来保护其内容物免于粗糙的处理和意外掉落 信封的可变膨胀性。