MASK ASSEMBLY, AND APPARATUS AND METHOD FOR DETECTING FILM THICKNESS OF EVAPORATION MATERIAL ON THE MASK

    公开(公告)号:US20180291495A1

    公开(公告)日:2018-10-11

    申请号:US15909055

    申请日:2018-03-01

    IPC分类号: C23C14/04 G01B11/06 C23C14/24

    摘要: The disclosure provides a mask assembly comprising a mask which comprises a first surface facing towards an evaporation source and a second surface facing towards an article to be deposited, and pattern openings are formed in the mask, wherein the mask assembly further comprises at least one test sheet which is detachably provided on the mask. The test sheet is provided at a region on the mask where no pattern opening is provided, and is configured such that an evaporation material can be deposited on the test sheet when an evaporation process is performed by using the mask assembly. The disclosure further provides an apparatus and a method for detecting a film thickness of the evaporation material on the mask assembly. With the apparatus, the film thickness of the evaporation material deposited on the mask assembly can be easily detected.

    MASK, MASKING EXPOSURE METHOD, MASK SYSTEM AND PATTERN CONTROL DEVICE

    公开(公告)号:US20180095360A1

    公开(公告)日:2018-04-05

    申请号:US15522276

    申请日:2016-05-06

    IPC分类号: G03F1/60 G03F7/20 G03F1/00

    摘要: Embodiments of the present disclosure relate to a mask, a masking exposure method, a mask system and a pattern control device. The mask according to embodiments of the present disclosure includes a pattern control layer and a light conversion layer. The pattern control layer includes a plurality of light-transmission units and a control circuit connected to each of the light-transmission units. The control circuit is configured to control conversion of each of the light-transmission units between in a light-transmission state and in a light-tight state, such that different mask patterns are formed. The light conversion layer is provided on a light-outgoing directional side or a light-incoming directional side of the pattern control layer and is configured to convert incoming light into parallel light so as to emit the parallel light.

    Film thickness regulator and manufacturing method thereof, film thickness regulating method and evaporation apparatus

    公开(公告)号:US09930787B2

    公开(公告)日:2018-03-27

    申请号:US15149573

    申请日:2016-05-09

    摘要: A film thickness regulator and its manufacturing method, a regulating method, an evaporation apparatus are disclosed. The film thickness regulator comprises a frame and at least two deformable thin films disposed therein, the film surfaces of which are parallel to each other; each deformable thin film is provided with conductive structures and via holes for molecules of an evaporation coating material to pass through; when voltages are applied to the conductive structures of any two deformable thin films, due to the attraction or repulsion between the conductive structures, the two deformable thin films are moved, and the relative positions of the via holes of any two deformable thin films change, thus solving the problem that the uniformity of the thickness of the evaporation coating film is poor in the related art, and achieving the effect of improving the uniformity of the thickness of the evaporation coating film.

    Frame seal structure on substrate, substrate, and liquid crystal display device
    55.
    发明授权
    Frame seal structure on substrate, substrate, and liquid crystal display device 有权
    基板,基板和液晶显示装置上的框架密封结构

    公开(公告)号:US09563081B2

    公开(公告)日:2017-02-07

    申请号:US14526446

    申请日:2014-10-28

    IPC分类号: G02F1/1339 F16J15/06

    CPC分类号: G02F1/1339 F16J15/06

    摘要: The present disclosure relates to the field of liquid crystal display, and particularly to a frame seal structure on a substrate, a substrate, and a liquid crystal display device. The frame seal structure comprises a primary seal and an assembly process dummy seal. The assembly process dummy seal is formed in an area between the primary seal and an edge of the substrate, and consists of a plurality of sub-seals which are arranged discontinuously. The present frame seal structure is a novel frame seal structure which is proposed with respect to drawbacks of the process dummy seal during assembling with a VIF process in a liquid crystal display device with post spacers. By virtue of the novel frame seal, the peripheral region of the substrate will not be pressed airtight during assembling, so that the gas can be discharged, and poor sealing in a certain area is avoided. Thus the present disclosure can solve the problem of poor pressing of frame seal, particularly the problems like seal brush and seal narrow, and can be better adapted to the VIF process and improve the yield.

    摘要翻译: 本公开涉及液晶显示领域,特别涉及基板,基板和液晶显示装置上的框架密封结构。 框架密封结构包括主密封件和组装工艺虚拟密封件。 组装工艺虚拟密封件形成在主密封件和基板的边缘之间的区域中,并且由不连续地布置的多个副密封件组成。 本框架密封结构是一种新颖的框架密封结构,该结构关于在具有后间隔件的液晶显示装置中的VIF工艺组装期间的工艺虚拟密封件的缺点提出。 由于新颖的框架密封,组装时的基板的周边区域不会被气密地挤压,所以能够排出气体,避免了在某一区域的密封性差。 因此,本公开可以解决框架密封件压制不良的问题,特别是密封刷和密封件狭窄的问题,并且可以更好地适应VIF工艺并提高产量。

    FRAME SEAL STRUCTURE ON SUBSTRATE, SUBSTRATE, AND LIQUID CRYSTAL DISPLAY DEVICE
    56.
    发明申请
    FRAME SEAL STRUCTURE ON SUBSTRATE, SUBSTRATE, AND LIQUID CRYSTAL DISPLAY DEVICE 有权
    基板,基板和液晶显示装置上的框架密封结构

    公开(公告)号:US20150338690A1

    公开(公告)日:2015-11-26

    申请号:US14526446

    申请日:2014-10-28

    IPC分类号: G02F1/1339 F16J15/06

    CPC分类号: G02F1/1339 F16J15/06

    摘要: The present disclosure relates to the field of liquid crystal display, and particularly to a frame seal structure on a substrate, a substrate, and a liquid crystal display device. The frame seal structure comprises a primary seal and an assembly process dummy seal. The assembly process dummy seal is formed in an area between the primary seal and an edge of the substrate, and consists of a plurality of sub-seals which are arranged discontinuously. The present frame seal structure is a novel frame seal structure which is proposed with respect to drawbacks of the process dummy seal during assembling with a VIF process in a liquid crystal display device with post spacers. By virtue of the novel frame seal, the peripheral region of the substrate will not be pressed airtight during assembling, so that the gas can be discharged, and poor sealing in a certain area is avoided. Thus the present disclosure can solve the problem of poor pressing of frame seal, particularly the problems like seal brush and seal narrow, and can be better adapted to the VIF process and improve the yield. (FIG. 1)

    摘要翻译: 本公开涉及液晶显示领域,特别涉及基板,基板和液晶显示装置上的框架密封结构。 框架密封结构包括主密封件和组装工艺虚拟密封件。 组装工艺虚拟密封件形成在主密封件和基板的边缘之间的区域中,并且由不连续地布置的多个副密封件组成。 本框架密封结构是一种新颖的框架密封结构,其针对在具有柱间隔件的液晶显示装置中的VIF工艺组装期间的工艺虚拟密封件的缺点提出。 由于新颖的框架密封,组装时的基板的周边区域不会被气密地挤压,所以能够排出气体,避免了在某一区域的密封性差。 因此,本公开可以解决框架密封件压制不良的问题,特别是密封刷和密封件狭窄的问题,并且可以更好地适应VIF工艺并提高产量。 (图。1)