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51.发明申请Apparatus and method for characterizing an image system in lithography projection tool 有权用于表征光刻投影工具中的图像系统的装置和方法公开(公告)号：US20060251994A1
公开(公告)日：2006-11-09
申请号：US11203331
申请日：2005-08-13
IPC分类号： G03C5/00
CPC分类号： G03F7/706
摘要： A system and method for characterizing an imaging system causes a diffraction image indicative of a test structure having a generalized line-grating to be formed and then extracts from a measurement of the diffraction image a lens transmittance function, a photoresist property or a defocus distance.
摘要翻译： 用于表征成像系统的系统和方法使得将形成指示具有广义线光栅的测试结构的衍射图像，然后从衍射图像的测量中提取透镜透射函数，光致抗蚀剂性质或散焦距离。
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公开(公告)号：US20060248499A1
公开(公告)日：2006-11-02
申请号：US11203522
申请日：2005-08-13
申请人： Abdurrahman Sezginer , Roy Prasad
发明人： Abdurrahman Sezginer , Roy Prasad
IPC分类号： G06F17/50
CPC分类号： G06F17/5068 , G03F1/36 , G03F7/70291 , G03F7/70441
摘要： A method of modifying polygons in a data set mask-less or mask based optical projection lithography includes: 1) mapping the data set to a figure-of-demerit; 2) moving individual polygon edges to decrease the figure-of-demerit; and 3) disrupting the set of polygons to enable a further decrease in the figure-of-demerit, wherein disrupting polygons includes any of the following polygon disruptions: breaking up, merging, or deleting polygons.
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公开(公告)号：US20060164632A1
公开(公告)日：2006-07-27
申请号：US11364312
申请日：2006-02-28
IPC分类号： G01N21/01
CPC分类号： G01N21/9501 , G01N21/274 , G01N21/278 , G01N21/93
摘要： A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.
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54.发明申请公开(公告)号：US20060072097A1
公开(公告)日：2006-04-06
申请号：US10960357
申请日：2004-10-06
申请人： Franz Zach , Bo Wu , Abdurrahman Sezginer
发明人： Franz Zach , Bo Wu , Abdurrahman Sezginer
IPC分类号： G03B27/72
CPC分类号： G03B27/72 , G03F7/70133
摘要： Pupil intensity distribution of an imaging system is measured by exposing an image field of a radiation detector with a bright feature, positioning the detector at a distance away from the image plane, and exposing the image field of the detector with a bright feature, resulting in a cumulative exposure of the image field of the detector from the two exposures. A characteristic of a spatial pattern in the cumulative exposure of the image field of the detector is then determined.
摘要翻译： 成像系统的瞳孔强度分布通过用具有明亮特征的放射线检测器的图像场曝光来测量，将检测器定位在远离图像平面的距离处，并且用明亮特征曝光检测器的图像场，导致 来自两次曝光的检测器的图像场的累积曝光。 然后确定检测器的图像场的累积曝光中的空间图案的特性。
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公开(公告)号：US20050018190A1
公开(公告)日：2005-01-27
申请号：US10917219
申请日：2004-08-12
IPC分类号： G03F7/20 , H01L23/544 , G01B11/00
CPC分类号： G03F7/70633 , H01L22/34 , H01L2223/54453
摘要： Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries. The calculation may involve interpolation of pre-computed entries from a database accessible to the processor. The calculated and measured responses are iteratively compared and the model parameters changed to minimize the difference.
摘要翻译： 使用包括在被测试层的测试区域中形成的基本上重叠的衍射光栅的测量目标来测量两个或更多个图案化层之间的对准精度。 光学仪器照亮目标区域的全部或部分，并测量光学响应。 仪器可以测量作为波长，极角入射角，入射方位角和/或照明和检测光的偏振的函数的透射率，反射率和/或椭偏参数。 包含测试光栅的那些层之间的叠加误差或偏移量被编程为使用考虑光栅衍射的模型和光栅与彼此的相互作用计算包括重叠误差的一组参数的光学响应的处理器来确定 '衍射场 模型参数也可能考虑到制造的不对称性。 该计算可以包括从处理器可访问的数据库插入预先计算的条目。 迭代比较计算和测量的响应，改变模型参数以最小化差异。
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公开(公告)号：US06738136B2
公开(公告)日：2004-05-18
申请号：US10290730
申请日：2002-11-07
IPC分类号： G01J308
CPC分类号： G01J3/02 , G01J3/0218 , G01J3/08 , G01J3/42 , G01N21/55
摘要： The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.
摘要翻译： 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。
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57.发明授权Estimating permeability without determinating a distribution of relaxation times 有权估计渗透率而不确定松弛时间的分布公开(公告)号：US06559639B2
公开(公告)日：2003-05-06
申请号：US09397581
申请日：1999-09-16
IPC分类号： G01V300
CPC分类号： G01N24/081 , G01R33/4625 , G01V3/32
摘要： A permeability estimation technique for use with spin echo signals that are received from a sample includes summing indications of the amplitudes of the spin echo signals. The results of the summing are used to determine an indication of a permeability of the sample, without using a distribution of relaxation times in the determination. The products of indications of the amplitudes of the spin echo signals may be summed, and the results of the summing may be used to determine an indication of a permeability of the sample, without using a distribution of relaxation times in the determination.
摘要翻译： 与从样本接收的自旋回波信号一起使用的磁导率估计技术包括自旋回波信号幅度的相加指示。 求和的结果用于确定样品的渗透性的指示，而不使用在测定中松弛时间的分布。 可以将自旋回波信号的振幅的指示的乘积相加，并且求和的结果可以用于确定样品的渗透性的指示，而不使用确定中的松弛时间的分布。
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公开(公告)号：US06522137B1
公开(公告)日：2003-02-18
申请号：US09605805
申请日：2000-06-28
IPC分类号： G01V300
CPC分类号： G01V3/32 , G01N24/081
摘要： A downhole NMR measurement apparatus for use in a borehole includes at least one magnet, at least one RF transmission coil, at least one gradient coil and circuitry. The magnet(s) establish a magnetic field in a region of a formation that at least partially surrounds the measurement apparatus. The RF transmission coils(s) transmit RF pulses pursuant to an NMR pulse sequence into the region to, in combination with the magnetic field, induce the generation of spin echo signals from a resonance volume within the region. The gradient coil(s) establish a pulsed gradient field in the resonance volume, and the circuitry is coupled to the gradient coil(s) to control the generation of the pulsed gradient field to phase encode the spin echo signals for purposes of high resolution imaging of the formation.
摘要翻译： 用于钻孔的井下NMR测量装置包括至少一个磁体，至少一个RF传输线圈，至少一个梯度线圈和电路。 磁体在至少部分地围绕测量装置的地层区域中建立磁场。 RF传输线圈根据NMR脉冲序列将RF脉冲发送到与该磁场相结合的区域中，从该区域内的共振体积引起自旋回波信号的产生。 梯度线圈在谐振体积中建立脉冲梯度场，并且电路耦合到梯度线圈以控制脉冲梯度场的产生以对自旋回波信号进行相位编码，以用于高分辨率成像 的形成。
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公开(公告)号：US5977768A
公开(公告)日：1999-11-02
申请号：US880343
申请日：1997-06-23
CPC分类号： G01V3/32
摘要： Apparatus and method are disclosed for determining a nuclear magnetic resonance property of formations surrounding a borehole while drilling the borehole with a rotating drill bit on a drill string. An embodiment of the method includes the following steps: providing a logging device in the drill string, the logging device being rotatable with the drill string or a portion of the drill string, the logging device having a rotational axis; producing a static magnetic field and an RF magnetic field at the logging device, the static and RF magnetic fields having mutually orthogonal components in an investigation region in the formations surrounding the logging device, the magnitudes of the static and RF magnetic fields in the investigation region being substantially rotationally invariant as the logging device rotates around its axis; receiving nuclear magnetic resonance spin echoes at at least one circumferential sector on the logging device; and determining a nuclear magnetic resonance property of the formations, for different portions of the investigation region, from the received nuclear magnetic resonance spin echoes.
摘要翻译： 公开的装置和方法用于确定钻孔周围的地层的核磁共振性质，同时用钻柱上的旋转钻头钻孔。 该方法的实施例包括以下步骤：在钻柱中提供测井装置，测井装置可与钻柱或钻柱的一部分一起旋转，测井装置具有旋转轴线; 在测井装置处产生静磁场和RF磁场，静态和RF磁场在测井装置周围的地层中的调查区域中具有相互正交的分量，在调查区域中的静态和RF磁场的大小 当测井装置围绕其轴线旋转时，其基本上是旋转不变的; 在测井装置上的至少一个圆周扇区处接收核磁共振自旋回波; 并且对于研究区域的不同部分，从接收到的核磁共振自旋回波确定地层的核磁共振特性。
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公开(公告)号：US5767674A
公开(公告)日：1998-06-16
申请号：US639009
申请日：1996-04-17
CPC分类号： G01V3/32
摘要： The instruments of a pulsed nuclear magnetic resonance device are included in a drill collar for evaluating earth formations. The resulting tool makes NMR measurements through an electrically non-conductive shield while the formation is being drilled.
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