Abstract:
A laser machining method includes, before laser machining: calculating the amount of focus movement on the basis of a first measurement value measured with the external optical system warmed up and being the amount of energy of a laser beam passing through a small-diameter hole and a first reference value (database D1) predetermined depending on the type of contamination of the external optical system in relation to the first measurement value; and compensating the focus position in laser machining on the basis of the calculated amount of focus movement.
Abstract:
A laser processing system herein includes a laser oscillator, a laser optical path that guides laser beam from the laser oscillator to a workpiece, a purge gas supply line for supplying a purge gas into the laser optical path, oxygen sensor and an impure gas sensor which detects an impure gas influencing the propagation of the laser beam that are installed in the laser optical path, and an impure gas sensor output value correction unit. The impure gas sensor output value correction unit corrects an output value of the impure gas sensor based on an output value of the oxygen sensor.
Abstract:
A laser machining method includes the steps of: outputting a laser beam to the workpiece at a laser power low enough not to melt or oxidize the workpiece to measure reflected light of the laser beam; selecting a laser power suitable for melting or oxidizing the workpiece based on a measured value of the reflected light; determining whether or not the workpiece can be melted or oxidized based on the selected laser power; when the workpiece can be melted or oxidized, outputting a laser beam to the workpiece at a laser power high enough to melt or oxidize the workpiece; outputting again a laser beam to the workpiece at the low laser power to measure reflected light of the laser beam; and checking the degree of the melting or oxidization of the workpiece based on a measured value of the reflected light to determine whether or not to start laser machining.
Abstract:
A laser processing head able to prevent leakage of a coolant out of a flow path or a coolant supply pipe. The laser processing head includes a closed-circulation path that circulates the coolant for removing the heat generated in the laser processing head due to a laser beam propagating in the laser processing head, and a coolant circulation device that allows the coolant to flow in the circulation path and circulates the coolant in the circulation path.
Abstract:
A beam profiler which can determine whether or not a laser beam can be suitably output at a lower cost. The beam profiler is provided with a partial reflecting mirror, light receiving parts, and laser intensity sensors which are individually attached to the light receiving parts. The light receiving parts include a first light receiving part which receives a first region which includes an optical axis of the laser beam in a laser irradiation region of the laser beam and a second light receiving part which is insulated heat-wise from the first light receiving part and which receives a second region of a laser irradiation region which is different from the first region.